Scan technique to reduce transient wafer temperatures during ion
implantation
    1.
    发明授权
    Scan technique to reduce transient wafer temperatures during ion implantation 失效
    扫描技术可以减少离子注入过程中的瞬态晶片温度

    公开(公告)号:US5486702A

    公开(公告)日:1996-01-23

    申请号:US125117

    申请日:1993-09-21

    CPC分类号: H01J37/3171

    摘要: During ion implantation, beam heating of the substrates must be reduced to eliminate self-annealing of the wafers during implant and to eliminate damager to masking materials, principally photoresist, that is mounted on the surface of the wafers. In this work, we describe a technique which may be used with both single-wafer and batch ion implantation systems to reduce transient wafer temperatures during implant.

    摘要翻译: 在离子注入期间,必须减少衬底的光束加热,以消除在植入期间晶片的自退火,并且消除掩蔽材料(主要是光致抗蚀剂),该材料安装在晶片的表面上。 在这项工作中,我们描述了可以与单晶片和批次离子注入系统一起使用的技术,以减少植入期间的晶片临时温度。

    CONSTRUCTION PAYMENT MANAGEMENT SYSTEMS AND METHODS WITH SPECIFIED BILLING FEATURES
    4.
    发明申请
    CONSTRUCTION PAYMENT MANAGEMENT SYSTEMS AND METHODS WITH SPECIFIED BILLING FEATURES 有权
    建筑支付管理系统和具有明确结算功能的方法

    公开(公告)号:US20090012886A1

    公开(公告)日:2009-01-08

    申请号:US12112754

    申请日:2008-04-30

    IPC分类号: G06Q30/00

    CPC分类号: G06Q30/04 G06Q10/06 G06Q40/02

    摘要: Systems and methods for managing payments. One construction of the system includes a software enabled user interface accessible by a first party and a second party, at least one computer readable memory, and a processor. The processor is configured to selectively operate in a specified billing mode in response to an input received from the first party. The processor is configured to receiving invoice details from the first party when operating in the specified billing mode and from the second party when not operating in the specified billing mode. The processor is further configured to generate an invoice based on the invoice details, display the invoice to the first party and the second party, and request an approval or a rejection of the invoice from the first party or the second party.

    摘要翻译: 用于管理付款的系统和方法。 系统的一个结构包括可由第一方和第二方访问的启用软件的用户界面,至少一个计算机可读存储器和处理器。 处理器被配置为响应于从第一方接收到的输入,以指定的计费模式选择性地操作。 处理器被配置为在以指定的计费模式操作时从第一方接收发票详细信息,并且在不以指定的计费模式操作时从第二方接收发票详细信息。 处理器还被配置为基于发票详细信息生成发票,将发票显示给第一方和第二方,并且要求来自第一方或第二方的发票的批准或拒绝。

    Vapor phase connection techniques
    10.
    发明授权
    Vapor phase connection techniques 有权
    气相连接技术

    公开(公告)号:US06675469B1

    公开(公告)日:2004-01-13

    申请号:US09636790

    申请日:2000-08-11

    IPC分类号: H05K336

    摘要: Electrical connections are made between a pair of elements disposed on opposite side of the hole extending through a dielectric layer by evaporating a conductive material such as a metal having high vapor pressure within the hole while maintaining the hole in a substantially sealed condition. The process may be performed simultaneously to form numerous connections within a microelectronic unit as, for example, within a multilayer circuit panel.

    摘要翻译: 通过在保持孔处于基本上密封的状态下蒸发导电材料(例如在孔内具有高蒸气压的金属),在布置在电介质层的相对侧上的一对元件之间形成电连接。 该过程可以同时执行以在微电子单元内形成多个连接,例如在多层电路板内。