公开(公告)号：US20170263414A1

公开(公告)日：2017-09-14

申请号：US15174323

申请日：2016-06-06

申请人： Taiwan Electron Microscope Instrument Corporation

发明人： FU-RONG CHEN ,  Tsu-Wei HUANG ,  Shih-Yi LIU ,  I-Jiun CHEN ,  CHIH WEI CHEN ,  Ying-Shuo TSENG ,  Yu-Shan HUANG ,  Hsin-Yu LIN ,  Jian-Min FANG ,  Chin-Liang HSU ,  LI-CHIAO YANG

IPC分类号： H01J37/26 ,  H01J37/16 ,  H01J37/20

CPC分类号： H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/162 ,  H01J2237/166 ,  H01J2237/188 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/202

摘要： An electron microscope includes a charged particle beam generator, a detector, a film and a bearing unit. The charged particle beam generator generates a first charged particle beam to bomb an object. The detector detects a second charged particle from the object to form an image. The film disposes on downstream of charged particle beam generator and has a first surface and a second surface. A space between charged particle beam generator and the first surface of film is a vacuum environment. The bearing unit disposes at a side of second surface of film and has a bearing surface and a back surface. The object disposes on the bearing surface of the bearing unit and a distance between an analyzed surface of the object and the film is less than a predetermined spacing. A liquid space exists between the analyzed surface and the film to be filled a liquid.

公开(公告)号：US20170250054A1

公开(公告)日：2017-08-31

申请号：US15440327

申请日：2017-02-23

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Motohiro TAKAHASHI ,  Yoshimasa FUKUSHIMA ,  Katsunori ONUKI ,  Tetsuya NIIBORI

IPC分类号： H01J37/20 ,  H01J37/26

CPC分类号： H01J37/20 ,  H01J37/16 ,  H01J37/261 ,  H01J2237/0216

摘要： There is proposed a column supporting structure that includes a viscoelastic sheet, a supporting plate which holds the viscoelastic sheet, and a fixation portion which connects the supporting plate to each lens barrel. The viscoelastic sheet is disposed to extend in a plane perpendicular to one lens barrel or the other lens barrel.

公开(公告)号：US20170229284A1

公开(公告)日：2017-08-10

申请号：US15514656

申请日：2014-09-29

申请人： HITACHI, LTD.

发明人： Shinichi MATSUBARA ,  Hiroyasu SHICHI ,  Takashi OHSHIMA

IPC分类号： H01J37/26 ,  H01J37/08 ,  H01J37/16

CPC分类号： H01J37/26 ,  H01J37/08 ,  H01J37/16 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/0807 ,  H01J2237/2003 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2608 ,  H01J2237/31749

摘要： Since a diffraction phenomenon occurs in the electron beam passing through a differential evacuation hole, an electron beam whose probe diameter is narrowed cannot pass through a hole having an aspect ratio of a predetermined value or more, and accordingly, a degree in vacuum on the electron beam side cannot be improved. By providing a differential evacuation hole with a high aspect ratio in an ion beam device, it becomes possible to obtain an observed image on a sample surface, with the sample being placed under the atmospheric pressure or a pressure similar thereto, in a state where the degree of vacuum on the ion beam side is stabilized. Moreover, by processing the differential evacuation hole by using an ion beam each time it is applied, both a normal image observation with high resolution and an image observation under atmospheric pressure or a pressure similar thereto can be carried out.

公开(公告)号：US09572240B2

公开(公告)日：2017-02-14

申请号：US15107824

申请日：2014-12-12

申请人： USHIO DENKI KABUSHIKI KAISHA

发明人： Gota Niimi ,  Hironobu Yabuta

IPC分类号： H05G2/00 ,  F21V14/04 ,  H01J37/16 ,  H01J37/32

CPC分类号： H05G2/003 ,  F21V14/04 ,  G03F7/70033 ,  G03F7/70916 ,  H01J37/16 ,  H01J37/3244 ,  H01J37/3266 ,  H01J2237/022 ,  H01J2237/026 ,  H01J2237/028 ,  H05G2/008

摘要： Disclosed herein a light source apparatus that is capable of suppressing a light transmission rate of a debris trap to be lowered and a reflection rate in a light condenser mirror to be lowered. In the light source apparatus, a shielding member is provided having an aperture is provided in front of a stationary type foil trap to limit a solid angle of light emitted from a high temperature plasma. Furthermore, the stationary type foil trap is provided with a driving mechanism to allow the foil trap to be revolved such that an adhesion part of the debris of the foil trap is deviated from a position of the foil trap facing the aperture.

摘要翻译： 这里公开了一种光源装置，其能够抑制要降低的碎屑陷阱的光透射率和降低聚光镜中的反射率。 在光源装置中，设置有在固定型箔捕获器的前方设置有孔径以限制从高温等离子体发射的光的立体角的屏蔽构件。 此外，固定式箔捕获器设置有驱动机构，以允许箔捕获器旋转，使得箔捕获器的碎屑的粘附部分偏离面向孔的箔捕获器的位置。

公开(公告)号：US09564288B2

公开(公告)日：2017-02-07

申请号：US14438691

申请日：2013-10-29

申请人： Hitachi High-Technologies Corporation

发明人： Yusuke Ominami ,  Shinsuke Kawanishi ,  Hiroyuki Suzuki

IPC分类号： H01J37/16 ,  H01J37/20 ,  H01J37/28

CPC分类号： H01J37/16 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006 ,  H01J2237/20221 ,  H01J2237/20235 ,  H01J2237/28

摘要： A sample storage container of the present invention includes: a storage container (100) that stores a sample (6) under an atmosphere different from an atmosphere of an outside; a diaphragm (10) through which a charged particle beam passes through or transmits; a sample stage (103) that is arranged inside the storage container (100) and that is capable of moving a relative position of the sample (6) to the diaphragm (10) in a horizontal direction and in a vertical direction under an atmospheric state where the atmospheric states inside the storage container and outside the storage container are different each other; and an operating section (104) that moves the sample stage (103) from an outside of the storage container (100), wherein the sample storage container is set in a state where the sample (6) is stored in a vacuum chamber of a charged particle beam apparatus.

摘要翻译： 本发明的样品储存容器包括：储存容器（100），其在不同于外部气氛的气氛下存储样品（6）; 带电粒子束穿过或透过的隔膜（10）; 布置在储存容器（100）的内部并且能够在大气压下沿水平方向和垂直方向将样品（6）的相对位置移动到隔膜（10）的样品台（103） 存储容器内部和储存容器外的大气状态彼此不同; 以及从所述存储容器（100）的外部移动所述样品台（103）的操作部（104），其中，所述样本收纳容器被设定为将样品（6）储存在所述储存容器 带电粒子束装置。

公开(公告)号：US20160343538A1

公开(公告)日：2016-11-24

申请号：US15111907

申请日：2015-02-10

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Shinsuke KAWANISHI ,  Yuusuke OOMINAMI

IPC分类号： H01J37/18 ,  H01J37/28

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/28 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2605

摘要： In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.

摘要翻译： 在扫描型电子显微镜中，使用透过带电粒子束的隔离膜将具有布置在其中的试样的空气压力空间和布置在带电粒子光学系统侧的真空空间彼此隔离。 扫描电子显微镜具有电子光学镜筒，底盘和隔离膜。 电子光学镜筒将一次电子束辐射到样品上。 底盘直接接合到电子光学镜筒的内部，并且至少在一次电子束的辐射期间具有变成比电子光学镜筒的内部更低的真空状态的内部。 隔离膜将具有安装在其中的试样的大气压气氛中的空间与底盘的内部隔离，并且透射初级带电粒子束。

公开(公告)号：US09472375B2

公开(公告)日：2016-10-18

申请号：US14443293

申请日：2013-11-21

申请人： Hitachi High-Technologies Corporation

发明人： Yusuke Ominami ,  Mami Konomi ,  Shinsuke Kawanishi ,  Hiroyuki Suzuki

IPC分类号： G21K5/04 ,  H01J37/26 ,  H01J37/20 ,  H01J37/16 ,  H01J37/28 ,  H01J37/22

CPC分类号： H01J37/20 ,  H01J37/16 ,  H01J37/224 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2608 ,  H01J2237/28

摘要： A charged particle beam device provided with: a charged particle optical lens column generating a primary charged particle beam; a housing which has its inside evacuated by a vacuum pump; a first diaphragm that forms a part of the housing and able to keep an airtight state of the interior space of the housing; and a second diaphragm disposed between the first diaphragm and the sample, wherein a primary charged particle beam generated by the charged particle optical lens column is transmitted by or passes through the first diaphragm and the second diaphragm, and then is irradiated, on the sample that is in contact with the second diaphragm.

摘要翻译： 一种带电粒子束装置，具有：产生初级带电粒子束的带电粒子光学透镜柱; 其内部通过真空泵抽真空的壳体; 第一隔膜，其形成所述壳体的一部分并且能够保持所述壳体的内部空间的气密状态; 以及设置在第一膜片和样品之间的第二膜片，其中由带电粒子光学透镜柱产生的初级带电粒子束通过第一膜片和第二膜片透过或通过第一膜片和第二膜片，然后照射在样品上， 与第二隔膜接触。

公开(公告)号：US20160217971A1

公开(公告)日：2016-07-28

申请号：US15023429

申请日：2014-09-05

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Toshie YAGUCHI ,  Yasuhira NAGAKUBO ,  Toshiyuki IWAHORI

IPC分类号： H01J37/20 ,  H01J37/16

CPC分类号： H01J37/20 ,  H01J37/16 ,  H01J37/32862 ,  H01J2237/184 ,  H01J2237/2002 ,  H01J2237/2003

摘要： The purpose of the present invention is to provide a charged particle beam device and a sample holder for the charged particle beam device by which it is possible to form various environments, and perform in-situ observation and analysis without removing a sample from the charged particle beam device. In the present invention, inserting a detachable reverse side entry portion from a side facing a sample holding means, said portion being provided with a function for changing the state of a sample attached to the sample holding means, makes it possible to observe/analyze changes in the sample by a different process without removing the sample from the charged particle beam device by combining a reverse side entry portion having a different function with the sample holding means. The reverse side entry portion comprises two parts, and a tip thereof, which is one of the parts, is removable. After mounting the reverse side entry portion onto the sample holding means, the sample can be transported while maintaining the same atmosphere, and the sample can be transported between different devices without exposing the sample to air.

摘要翻译： 本发明的目的是提供一种用于带电粒子束装置的带电粒子束装置和样品保持器，通过该装置可以形成各种环境，并且在不从带电粒子中去除样品的情况下进行原位观察和分析 梁装置。 在本发明中，从面向样品保持装置的一侧插入可拆卸的反面入口部分，所述部分具有改变附着在样品保持装置上的样品的状态的功能，使得可以观察/分析变化 通过将不同功能的反面入口部分与样品保持装置组合，通过不同的方法在样品中不从带电粒子束装置中取出样品。 反侧入口部分包括两部分，其一部分中的一个尖端是可移除的。 在将反面入口部分安装到样品保持装置上之后，可以在保持相同的气氛的同时传送样品，并且可以在不将样品暴露于空气的情况下在不同的装置之间传送样品。

公开(公告)号：US09355751B2

公开(公告)日：2016-05-31

申请号：US14541238

申请日：2014-11-14

申请人： MAPPER LITHOGRAPHY IP B.V.

发明人： Willem Henk Urbanus ,  Marco Jan-Jaco Wieland

IPC分类号： G21K1/02 ,  G21K5/04 ,  H01J37/24 ,  H01J37/30 ,  H01J37/317 ,  H01J37/02 ,  H01J37/16 ,  H01J37/065 ,  H01J37/12

CPC分类号： G21K1/02 ,  G21K5/04 ,  H01J37/026 ,  H01J37/065 ,  H01J37/12 ,  H01J37/16 ,  H01J37/24 ,  H01J37/3002 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3175 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/04 ,  H01J2237/1215 ,  H01J2237/16 ,  H01J2237/1825 ,  H01J2237/303 ,  H01J2237/30472

摘要： The invention relates to an electrode stack (70) comprising stacked electrodes (71-80) for manipulating a charged particle beam along an optical axis (A). Each electrode comprises an electrode body with an aperture for the charged particle beam. The electrode bodies are mutually spaced and the electrode apertures are coaxially aligned along the optical axis. The electrode stack comprises electrically insulating spacing structures (89) between each pair of adjacent electrodes for positioning the electrodes (71-80) at predetermined mutual distances along the axial direction (Z). A first electrode and a second electrode each comprise an electrode body with one or more support portions (86), wherein each support portion is configured to accommodate at least one spacing structure (89). The electrode stack has at least one clamping member (91-91c) configured to hold the support portions (86) of the first and second electrodes, as well as the intermediate spacing structure (89) together.

摘要翻译： 本发明涉及一种电极堆叠（70），其包括用于沿光轴（A）操纵带电粒子束的堆叠电极（71-80）。 每个电极包括具有用于带电粒子束的孔的电极体。 电极体相互间隔开，并且电极孔沿光轴同轴对准。 电极堆叠包括在每对相邻电极之间的电绝缘间隔结构（89），用于将电极（71-80）沿着轴向方向（Z）定位在预定的相互距离处。 第一电极和第二电极各自包括具有一个或多个支撑部分（86）的电极主体，其中每个支撑部分构造成容纳至少一个间隔结构（89）。 电极堆叠具有至少一个构造成将第一和第二电极的支撑部分（86）以及中间间隔结构（89）保持在一起的夹紧构件（91-91c）。

公开(公告)号：US09289779B2

公开(公告)日：2016-03-22

申请号：US14480120

申请日：2014-09-08

申请人： GLOBAL PLASMA SOLUTIONS, LLC

发明人： Charles Houston Waddell ,  Joseph Anton Christiansen

IPC分类号： H01T23/00 ,  B03C3/41 ,  B03C3/011 ,  F02M27/04 ,  F16M13/02 ,  H01J37/16 ,  H01J37/30 ,  A61L9/22 ,  H01J27/02

CPC分类号： A61L9/22 ,  A61L2209/16 ,  B01D46/0032 ,  B01D46/521 ,  B03C3/011 ,  B03C3/04 ,  B03C3/155 ,  B03C3/41 ,  B03C3/82 ,  F01N3/0892 ,  F02M27/04 ,  F02M27/042 ,  F02M35/0205 ,  F02M35/0217 ,  F16M13/02 ,  F24F3/166 ,  F24F2003/1682 ,  H01J27/022 ,  H01J27/028 ,  H01J37/08 ,  H01J37/16 ,  H01J37/3002 ,  H01T23/00

摘要： A system and method of treating air. Bipolar ionization is delivered to an airflow within a conduit from a tubeless ion generator. The ionized airflow may be delivered to a conditioned airspace by an HVAC system. In alternate applications, the airflow delivers ionized combustion air to an engine. The invention also includes a mounting assembly for positioning one or more ion generators into an airflow.

摘要翻译： 一种处理空气的系统和方法。 双极电离从无内胎离子发生器输送到导管内的气流中。 电离气流可以通过HVAC系统输送到调节空气空间。 在替代应用中，气流将离子化的燃烧空气传送到发动机。 本发明还包括用于将一个或多个离子发生器定位到气流中的安装组件。