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公开(公告)号:US20240395792A1
公开(公告)日:2024-11-28
申请号:US18790195
申请日:2024-07-31
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jie Chen , Ying-Ju Chen , Hsien-Wei Chen
IPC: H01L25/00 , H01L21/56 , H01L21/683 , H01L21/768 , H01L21/78 , H01L23/00 , H01L23/12 , H01L23/31 , H01L23/498 , H01L23/538 , H01L23/544 , H01L23/58 , H01L25/065 , H01L25/10
Abstract: Semiconductor device packages, packaging methods, and packaged semiconductor devices are disclosed. In some embodiments, a package for a semiconductor device includes an integrated circuit die mounting region and a molding material disposed around the integrated circuit die mounting region. An interconnect structure is disposed over the molding material and the integrated circuit die mounting region. A protection pattern is disposed in a perimeter region of the package. The protection pattern includes a conductive feature.
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公开(公告)号:US12148728B2
公开(公告)日:2024-11-19
申请号:US17646778
申请日:2022-01-03
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jie Chen , Hsien-Wei Chen
IPC: H01L23/00 , H01L21/48 , H01L21/56 , H01L21/683 , H01L21/768 , H01L23/538 , H01L25/00 , H01L25/10 , H01L21/3105 , H01L23/31
Abstract: A method includes surrounding a die and a conductive pillar proximate the die with a molding material, where the die and the conductive pillar are disposed over a first side of a first redistribution structure, where a second side of the first redistribution structure opposing the first side is attached to a first carrier; bonding conductive pads disposed on a first surface of a pre-made second redistribution structure to the die and to the conductive pillar, where a second surface of the pre-made second redistribution structure opposing the first surface is attached to a second carrier; after bonding the conductive pads, removing the second carrier to expose conductive features of the pre-made second redistribution structure proximate the second surface; and forming conductive bumps over and electrically coupled to the conductive features of the pre-made second redistribution structure.
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公开(公告)号:US20240363496A1
公开(公告)日:2024-10-31
申请号:US18771120
申请日:2024-07-12
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsien-Wei Chen , Jie Chen , Ming-Fa Chen
IPC: H01L23/48 , H01L21/768 , H01L23/00
CPC classification number: H01L23/481 , H01L21/76898 , H01L24/03 , H01L24/05 , H01L24/08 , H01L2224/02311 , H01L2224/02372 , H01L2224/02381 , H01L2224/05569 , H01L2224/0557 , H01L2224/05647 , H01L2224/08146
Abstract: A semiconductor device includes a first passivation layer over a circuit and. conductive pad over the first passivation layer, wherein the conductive pad is electrically connected to the circuit. A second passivation layer is disposed over the conductive pad and the first passivation layer, and has a first opening and a second opening. The first opening exposes an upper surface of a layer that extends underneath the conductive pad, and the second opening exposes the conductive pad. A first insulating layer is disposed over the second passivation layer and filling the first and second openings. A through substrate via extends through the insulating layer, second passivation layer, passivation layer, and substrate. A side of the through substrate via and the second passivation layer have a gap that is filled with the first insulating layer. A conductive via extends through the first insulating layer and connecting to the conductive pad.
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公开(公告)号:US12119338B2
公开(公告)日:2024-10-15
申请号:US18447655
申请日:2023-08-10
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jie Chen , Ying-Ju Chen , Hsien-Wei Chen
IPC: H01L21/44 , H01L21/56 , H01L21/683 , H01L21/768 , H01L21/78 , H01L23/00 , H01L23/12 , H01L23/31 , H01L23/498 , H01L23/538 , H01L23/544 , H01L23/58 , H01L25/00 , H01L25/065 , H01L25/10
CPC classification number: H01L25/50 , H01L21/56 , H01L21/561 , H01L21/565 , H01L21/568 , H01L21/6835 , H01L21/76838 , H01L21/78 , H01L23/12 , H01L23/3128 , H01L23/49816 , H01L23/49827 , H01L23/5389 , H01L23/544 , H01L23/562 , H01L23/585 , H01L24/06 , H01L24/19 , H01L24/20 , H01L24/73 , H01L24/97 , H01L25/0657 , H01L24/32 , H01L24/48 , H01L25/105 , H01L2221/68372 , H01L2223/5442 , H01L2223/54426 , H01L2223/54486 , H01L2224/04042 , H01L2224/04105 , H01L2224/12105 , H01L2224/2518 , H01L2224/32145 , H01L2224/32225 , H01L2224/45015 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2224/85399 , H01L2224/97 , H01L2225/0651 , H01L2225/06568 , H01L2225/1035 , H01L2225/1041 , H01L2225/1058 , H01L2924/00014 , H01L2924/14 , H01L2924/1431 , H01L2924/1433 , H01L2924/1434 , H01L2924/1436 , H01L2924/15311 , H01L2924/181 , H01L2924/18162 , H01L2924/18165 , H01L2224/48091 , H01L2924/00014 , H01L2224/73265 , H01L2224/32225 , H01L2224/48227 , H01L2924/00012 , H01L2224/73265 , H01L2224/32145 , H01L2224/48227 , H01L2924/00012 , H01L2224/97 , H01L2224/73265 , H01L2224/32145 , H01L2224/48227 , H01L2924/00 , H01L2924/181 , H01L2924/00012 , H01L2924/00014 , H01L2224/45099 , H01L2924/00014 , H01L2224/45015 , H01L2924/207 , H01L2924/15311 , H01L2224/73265 , H01L2224/32225 , H01L2224/48227 , H01L2924/00 , H01L2924/00014 , H01L2224/05599 , H01L2924/00014 , H01L2224/85399
Abstract: Semiconductor device packages, packaging methods, and packaged semiconductor devices are disclosed. In some embodiments, a package for a semiconductor device includes an integrated circuit die mounting region and a molding material disposed around the integrated circuit die mounting region. An interconnect structure is disposed over the molding material and the integrated circuit die mounting region. A protection pattern is disposed in a perimeter region of the package. The protection pattern includes a conductive feature.
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公开(公告)号:US11756907B2
公开(公告)日:2023-09-12
申请号:US17673953
申请日:2022-02-17
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Ming-Fa Chen , Sung-Feng Yeh , Hsien-Wei Chen , Jie Chen
IPC: H01L23/00 , H01L21/768 , H01L23/538
CPC classification number: H01L24/05 , H01L21/76843 , H01L21/76879 , H01L23/5384
Abstract: A package includes a first die that includes a first metallization layer, one or more first bond pad vias on the first metallization layer, wherein a first barrier layer extends across the first metallization layer between each first bond pad via and the first metallization layer, and one or more first bond pads on the one or more first bond pad vias, wherein a second barrier layer extends across each first bond pad via between a first bond pad and the first bond pad via, and a second die including one or more second bond pads, wherein a second bond pad is bonded to a first bond pad of the first die.
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公开(公告)号:US20230253395A1
公开(公告)日:2023-08-10
申请号:US18302063
申请日:2023-04-18
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsien-Wei Chen , Jie Chen
IPC: H01L25/00 , H01L23/00 , H01L23/31 , H01L21/56 , H01L23/498 , H01L21/48 , H01L21/683 , H01L25/065 , H01L25/10 , H01L25/18
CPC classification number: H01L25/50 , H01L24/02 , H01L24/09 , H01L23/3107 , H01L24/73 , H01L24/81 , H01L21/568 , H01L23/49811 , H01L21/4853 , H01L24/03 , H01L21/6835 , H01L24/92 , H01L24/96 , H01L21/6836 , H01L25/0657 , H01L25/10 , H01L25/18 , H01L25/065 , H01L25/105 , H01L21/4846 , H01L21/486 , H01L21/565 , H01L24/48 , H01L2224/02331 , H01L2224/02373 , H01L2224/0905 , H01L2224/48137 , H01L2224/13008 , H01L2924/181 , H01L2924/00014 , H01L2924/12042 , H01L2224/45144 , H01L23/3114 , H01L23/3128 , H01L21/561 , H01L2224/0401 , H01L2224/48091 , H01L23/49816 , H01L23/49822 , H01L2224/13084 , H01L2224/81895 , H01L2224/13311 , H01L2224/13181 , H01L24/05 , H01L24/06 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L2224/03003 , H01L2224/05082 , H01L2224/05083 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05166 , H01L2224/05171 , H01L2224/05611 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05684 , H01L2224/06181 , H01L2224/1132 , H01L2224/1145 , H01L2224/11452 , H01L2224/11462 , H01L2224/13021 , H01L2224/13023 , H01L2224/13025 , H01L2224/13082 , H01L2224/13083 , H01L2224/13109 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/13294 , H01L2224/133 , H01L2224/16227 , H01L2224/17181 , H01L2224/48227 , H01L2224/81005 , H01L2224/81024 , H01L2224/81191 , H01L2224/81192 , H01L2224/81193 , H01L2224/81411 , H01L2224/81447 , H01L2224/81815 , H01L2224/92 , H01L2224/96 , H01L2224/13166 , H01L2221/68327 , H01L2221/68345 , H01L2221/68372 , H01L2224/45147 , H01L2224/04105 , H01L2224/12105 , H01L2924/3511 , H01L2224/2518 , H01L2225/0651 , H01L2225/06562 , H01L2224/451 , H01L21/304
Abstract: Embodiments of the present disclosure include semiconductor packages and methods of forming the same. An embodiment is a semiconductor package including a first package including one or more dies, and a redistribution layer coupled to the one or more dies at a first side of the first package with a first set of bonding joints. The redistribution layer including more than one metal layer disposed in more than one passivation layer, the first set of bonding joints being directly coupled to at least one of the one or more metal layers, and a first set of connectors coupled to a second side of the redistribution layer, the second side being opposite the first side.
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公开(公告)号:US11609391B2
公开(公告)日:2023-03-21
申请号:US16877498
申请日:2020-05-19
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsien-Wei Chen , Jie Chen , Ming-Fa Chen
IPC: H01L23/498 , H01L21/48 , G02B6/42
Abstract: A semiconductor package includes a semiconductor die, a device layer, an insulator layer, a buffer layer, and connective terminals. The device layer is stacked over the semiconductor die. The device layer includes an edge coupler located at an edge of the semiconductor package and a waveguide connected to the edge coupler. The insulator layer is stacked over the device layer and includes a first dielectric material. The buffer layer is stacked over the insulator layer. The buffer layer includes a second dielectric material. The connective terminals are disposed on the buffer layer and reach the insulator layer through contact openings of the buffer layer.
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公开(公告)号:US20220328467A1
公开(公告)日:2022-10-13
申请号:US17383971
申请日:2021-07-23
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jie Chen , Hsien-Wei Chen , Ming-Fa Chen
IPC: H01L25/18 , H01L23/31 , H01L23/498 , H01L23/48 , H01L23/538 , H01L25/00 , H01L23/00
Abstract: A package includes an interposer having a first redistribution structure; a first die directly bonded to a first surface of the first redistribution structure with a dielectric-to-dielectric bond and a metal-to-metal bond; a second die directly bonded to the first surface of the first redistribution structure with a dielectric-to-dielectric bond and a metal-to-metal bond; an encapsulant around the first die and the second die; and a plurality of conductive connectors on a second side of the first redistribution structure opposite to the first die and the second die.
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公开(公告)号:US20220223553A1
公开(公告)日:2022-07-14
申请号:US17315487
申请日:2021-05-10
Applicant: Taiwan Semiconductor Manufacturing Co, Ltd.
Inventor: Ming-Fa Chen , Hsien-Wei Chen , Sung-Feng Yeh , Jie Chen
IPC: H01L23/00 , H01L25/065 , H01L25/00
Abstract: A semiconductor package includes a first semiconductor die, a second semiconductor die and a plurality of bumps. The first semiconductor die has a front side and a backside opposite to each other. The second semiconductor die is disposed at the backside of the first semiconductor die and electrically connected to first semiconductor die. The plurality of bumps is disposed at the front side of the first semiconductor die and physically connects first die pads of the first semiconductor die. A total width of the first semiconductor die may be less than a total width of the second semiconductor die.
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公开(公告)号:US20210391413A1
公开(公告)日:2021-12-16
申请号:US16901912
申请日:2020-06-15
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsien-Wei Chen , Ying-Ju Chen , Jie Chen , Ming-Fa Chen
IPC: H01L49/02 , H01L21/768 , H01G4/30 , H01L23/522
Abstract: Methods of forming a super high density metal-insulator-metal (SHDMIM) capacitor and semiconductor device are disclosed herein. A method includes depositing a first insulating layer over a semiconductor substrate and a series of conductive layers separated by a series of dielectric layers over the first insulating layer, the series of conductive layers including device electrodes and dummy metal plates. A first set of contact plugs through the series of conductive layers contacts one or more conductive layers of a first portion of the series of conductive layers. A second set of contact plugs through the series of dielectric layers avoids contact of a second portion of the series of conductive layers, the second portion of the series of conductive layers electrically floating.
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