Solder jointing system, solder jointing method, semiconductor device manufacturing method, and semiconductor device manufacturing system
    6.
    发明授权
    Solder jointing system, solder jointing method, semiconductor device manufacturing method, and semiconductor device manufacturing system 有权
    焊接接头系统,焊接方法,半导体器件制造方法以及半导体器件制造系统

    公开(公告)号:US06732911B2

    公开(公告)日:2004-05-11

    申请号:US09970802

    申请日:2001-10-05

    IPC分类号: B23K3538

    摘要: There is provided a chamber open to the outside through openings through which a solder-adhered object is passed and the chamber having a heating/melting area, a carrying mechanism for carrying the solder-adhered object into the heating/melting area, a formic-acid supplying means for supplying a formic acid into the heating/melting area, an exhausting means for exhausting a gas from the heating/melting area and its neighboring area to create a lower pressure area in the heating/melting area as compared to the pressure of outside the chamber, heating means for heating directly or indirectly the solder-adhered object in the heating/melting area, and an air-stream suppressing means for disturbing a gas flow between the heating/melting area and the carrying areas. Accordingly, there can be provided a solder jointing system for jointing solder layers of a semiconductor device, an electronic device, or the like to the wirings or the pads, which is capable of having a high processing ability and preventing re-oxidation.

    摘要翻译: 设置有通过开口穿过焊料粘附物体的开口的室,并且具有加热/熔化区域的室,用于将焊料粘附物携带到加热/熔融区域中的承载机构, 用于将甲酸供应到加热/熔化区域的酸供应装置,用于从加热/熔化区域及其相邻区域排出气体的排气装置,以在加热/熔化区域中产生较低压力区域, 在室外,用于在加热/熔化区域中直接或间接加热焊接物体的加热装置,以及用于扰乱加热/熔化区域和承载区域之间的气流的气流抑制装置。 因此,可以提供一种用于将半导体器件,电子器件等的焊料层接合到布线或焊盘上的焊接接合系统,其能够具有高处理能力并防止再氧化。