Laser ablation for integrated circuit fabrication
    9.
    发明授权
    Laser ablation for integrated circuit fabrication 有权
    激光烧蚀用于集成电路制造

    公开(公告)号:US08419895B2

    公开(公告)日:2013-04-16

    申请号:US12788843

    申请日:2010-05-27

    IPC分类号: B32B38/10

    摘要: A method for releasing a handler from a wafer, the wafer comprising an integrated circuit (IC) includes attaching the handler to the wafer using an adhesive comprising a polymer; performing edge processing to remove an excess portion of the adhesive from an edge of the handler and wafer; ablating the adhesive through the handler using a laser, wherein a wavelength of the laser is selected based on the transparency of the handler material; and separating the handler from the wafer. A system for releasing a handler from a wafer, the wafer comprising an IC includes a handler attached to a wafer using an adhesive comprising a polymer; an edge processing module, the edge processing module configured to remove an excess portion of the adhesive from the edge of the handler and wafer; and a laser, the laser configured to ablate the adhesive through the handler.

    摘要翻译: 一种用于从晶片释放处理器的方法,包括集成电路(IC)的晶片包括使用包含聚合物的粘合剂将处理器附接到晶片; 执行边缘处理以从处理器和晶片的边缘去除多余的粘合剂部分; 使用激光器通过处理器烧蚀粘合剂,其中基于处理材料的透明度选择激光的波长; 并将处理器与晶片分离。 一种用于从晶片释放处理器的系统,包括IC的晶片包括使用包含聚合物的粘合剂附接到晶片的处理器; 边缘处理模块,所述边缘处理模块被配置为从所述处理器和晶片的边缘去除所述粘合剂的多余部分; 和激光器,激光器被配置为通过处理器消融粘合剂。

    TECHNIQUES FOR PROVIDING DECOUPLING CAPACITANCE
    10.
    发明申请
    TECHNIQUES FOR PROVIDING DECOUPLING CAPACITANCE 有权
    提供去耦电容的技术

    公开(公告)号:US20080067628A1

    公开(公告)日:2008-03-20

    申请号:US11930698

    申请日:2007-10-31

    IPC分类号: H01L29/00

    摘要: Techniques for electronic device fabrication are provided. In one aspect, an electronic device is provided. The electronic device comprises at least one interposer structure having one or mote vias and a plurality of decoupling capacitors integrated therein, the at least one interposer structure being configured to allow for one or more of the plurality of decoupling capacitors to be selectively deactivated. In another aspect, a method of fabricating an electronic device comprising at least one interposer structure having one or more vias and a plurality of decoupling capacitors integrated therein comprises the following step. One or more of the plurality of decoupling capacitors are selectively deactivated

    摘要翻译: 提供电子器件制造技术。 一方面,提供一种电子设备。 该电子设备包括具有一个或多个微通孔和集成在其中的多个去耦电容器的至少一个插入器结构,所述至少一个插入器结构被配置为允许选择性地去激活多个去耦电容器中的一个或多个。 在另一方面,一种制造电子器件的方法,包括至少一个具有一个或多个通孔的内插器结构和集成在其中的多个去耦电容器,其包括以下步骤。 选择性地去激活多个去耦电容器中的一个或多个