POSITIVE-TYPE PHOTOSENSITIVE INSULATING RESIN COMPOSITION, AND PATTERN FORMING METHOD USING SAME
    3.
    发明申请
    POSITIVE-TYPE PHOTOSENSITIVE INSULATING RESIN COMPOSITION, AND PATTERN FORMING METHOD USING SAME 审中-公开
    正型型光敏绝缘树脂组合物和使用其的图案形成方法

    公开(公告)号:US20120021357A1

    公开(公告)日:2012-01-26

    申请号:US13146841

    申请日:2010-01-29

    IPC分类号: G03F7/20 G03F7/028

    摘要: A photosensitive insulating resin composition, comprising a polymer, a photosensitizer, and an amide derivative that is expressed by the following general formula (1); (in formula (1), R1 represents a bivalent alkyl group, R2 represents a hydrocarbon group with a carbon number of 1 to 10, and R3 represents a hydrogen atom or an alkyl group with a carbon number of 1 to 4.)

    摘要翻译: 一种感光绝缘树脂组合物,其包含由以下通式(1)表示的聚合物,光敏剂和酰胺衍生物; (式(1)中,R 1表示二价烷基,R 2表示碳数为1〜10的烃基,R 3表示氢原子或碳原子数为1〜4的烷基)