摘要:
In a method of forming a conductive pattern structure of a semiconductor device, a first insulating interlayer is formed on a substrate. A first wiring is formed to pass through the first insulating interlayer. An etch stop layer and a second insulating interlayer are sequentially formed on the first insulating interlayer. A second wiring is formed to pass through the second insulating interlayer and the etch stop layer. A dummy pattern is formed to pass through the second insulating layer and the etch stop layer at the same time as forming the second wiring. The second wiring is electrically connected to the first wiring. The dummy pattern is electrically isolated from the second wiring.
摘要:
In a method of forming a conductive pattern structure of a semiconductor device, a first insulating interlayer is formed on a substrate. A first wiring is formed to pass through the first insulating interlayer. An etch stop layer and a second insulating interlayer are sequentially formed on the first insulating interlayer. A second wiring is formed to pass through the second insulating interlayer and the etch stop layer. A dummy pattern is formed to pass through the second insulating layer and the etch stop layer at the same time as forming the second wiring. The second wiring is electrically connected to the first wiring. The dummy pattern is electrically isolated from the second wiring.
摘要:
A method of manufacturing a reference sample substrate for analyzing a metal contamination level includes coating an organic silica solution including metal impurities on a semiconductor substrate and forming an oxide layer on the semiconductor substrate by thermally treating the semiconductor substrate having the coated organic silica solution. The metal impurities are substantially uniformly distributed in the oxide layer and the metal impurities are positioned at predetermined portions of the oxide layer.
摘要:
A method of manufacturing a reference sample substrate for analyzing a metal contamination level includes coating an organic silica solution including metal impurities on a semiconductor substrate and forming an oxide layer on the semiconductor substrate by thermally treating the semiconductor substrate having the coated organic silica solution. The metal impurities are substantially uniformly distributed in the oxide layer and the metal impurities are positioned at predetermined portions of the oxide layer.
摘要:
A bump structure may include a body portion spaced apart from a pad disposed on a substrate and a first extension extending from a side of the body portion onto the pad. A second extension extends from another side of the body portion.
摘要:
Provided are a target biomaterial detecting kit and a method of detecting the target biomaterial. The target biomaterial detecting kit includes a guided mode resonance filter comprising a substrate transmitting or reflecting light, a grating layer formed on the substrate, and a capture layer formed on the grating layer to capture a target biomaterial; and a nano complex comprising a nanoparticle head and a connection tail. Therefore, the wavelength peak of a reflection/transmission spectrum of light coming from the guided mode resonance filter can be largely shifted, and thus the presence and quantity of a target biomaterial can be easily detected. Moreover, although the amount of the target biomaterial is small, the target biomaterial can be reliably detected.
摘要:
A method may include providing a substrate including a chip pad, forming on the substrate a solder stack including at least two solder layers which are stacked and at least one intermediate layer interposed between the at least two solder layers. The solder stack can be reflowed to form a bump stack that is electrically connected to the chip pad. The bump stack may include at least two solder bumps which are stacked and the at least one intermediate layer interposed between the at least two solder bumps. Related structures are also disclosed.
摘要:
A belt with a health management function includes a health information extraction module extracting health related information from various biomedical signals, a buckle housing the health information extraction module, and a strap connected to an end of the buckle. The health information extraction module includes a sensor module detecting various biomedical signals, and a process/extraction unit digitally processing the detected biomedical signals and extracting the health related information from the processed digital signals.
摘要:
An electrical interconnection can be provided using a bump stack including at least two solder bumps which are stacked on one another and at least one intermediate layer interposed between the at least stacked two solder bumps.
摘要:
The present invention relates to a method for preparing a fusion polypeptide comprising epidermal growth factor (EGF) and human serum albumin in a plant.