Paddle for Materials Processing
    92.
    发明申请
    Paddle for Materials Processing 有权
    材料加工用桨

    公开(公告)号:US20160068988A1

    公开(公告)日:2016-03-10

    申请号:US14482981

    申请日:2014-09-10

    IPC分类号: C25D21/10 C25D17/10

    摘要: A paddle for a plating system has a housing with a back portion, a front portion, a first side portion, a second side portion, a first end portion, and a second end portion. A first fin is disposed laterally along a first external surface of the first side portion and offset and coupled to the first external surface to define a first passageway between the first external surface of the first side portion and a first internal surface of the first fin for flow of the electrolyte through the first passageway. A second fin is disposed laterally along a second external surface of the second side portion and offset and coupled to the second external surface to define a second passageway between the second external surface of the second side portion and a second internal surface of the second fin for flow of the electrolyte through the second passageway.

    摘要翻译: 用于电镀系统的桨具有具有后部,前部,第一侧部,第二侧部,第一端部和第二端部的壳体。 第一翅片沿着第一侧部分的第一外表面横向布置,并且偏移并联接到第一外表面,以在第一侧部分的第一外表面和第一翅片的第一内表面之间限定第一通道,用于 电解液通过第一通道流动。 第二翅片沿着第二侧部分的第二外表面横向布置,并且偏移并联接到第二外表面,以在第二侧部分的第二外表面和第二翅片的第二内表面之间限定第二通道,用于 电解液通过第二通道流动。

    LOW CTE COMPONENT WITH WIRE BOND INTERCONNECTS
    98.
    发明申请
    LOW CTE COMPONENT WITH WIRE BOND INTERCONNECTS 有权
    低电压组件与电线互连

    公开(公告)号:US20150348873A1

    公开(公告)日:2015-12-03

    申请号:US14289860

    申请日:2014-05-29

    摘要: A component such as an interposer or microelectronic element can be fabricated with a set of vertically extending interconnects of wire bond structure. Such method may include forming a structure having wire bonds extending in an axial direction within one of more openings in an element and each wire bond spaced at least partially apart from a wall of the opening within which it extends, the element consisting essentially of a material having a coefficient of thermal expansion (“CTE”) of less than 10 parts per million per degree Celsius (“ppm/° C.”). First contacts can then be provided at a first surface of the component and second contacts provided at a second surface of the component facing in a direction opposite from the first surface, the first contacts electrically coupled with the second contacts through the wire bonds.

    摘要翻译: 诸如插入件或微电子元件的部件可以用一组垂直延伸的引线接合结构的互连件制造。 这种方法可以包括形成具有线性结合的结构,所述线接合在元件中的多个开口之一内沿轴向延伸,并且每个引线键至少部分地与其延伸的开口的壁间隔开,所述元件基本上由材料 具有小于10摄氏度(“ppm /℃”)的百万分之几的热膨胀系数(“CTE”)。 然后可以在部件的第一表面处提供第一触点,并且提供在部件的第二表面处的面向第一表面的方向的第二触点,第一触头通过引线接合与第二触点电耦合。

    Method and structures for heat dissipating interposers
    99.
    发明授权
    Method and structures for heat dissipating interposers 有权
    散热插件的方法和结构

    公开(公告)号:US09123780B2

    公开(公告)日:2015-09-01

    申请号:US13720346

    申请日:2012-12-19

    摘要: A method for making an interconnect element includes depositing a thermally conductive layer on an in-process unit. The in-process unit includes a semiconductor material layer defining a surface and edges surrounding the surface, a plurality of conductive elements, each conductive element having a first portion extending through the semiconductor material layer and a second portion extending from the surface of the semiconductor material layer. Dielectric coatings extend over at least the second portion of each conductive element. The thermally conductive layer is deposited on the in-process unit at a thickness of at least 10 microns so as to overlie a portion of the surface of the semiconductor material layer between the second portions of the conductive elements with the dielectric coatings positioned between the conductive elements and the thermally conductive layer.

    摘要翻译: 制造互连元件的方法包括将热传导层沉积在处理单元上。 处理单元包括限定表面和围绕表面的边缘的半导体材料层,多个导电元件,每个导电元件具有延伸穿过半导体材料层的第一部分和从半导体材料的表面延伸的第二部分 层。 电介质涂层至少延伸到每个导电元件的第二部分。 导热层以至少10微米的厚度沉积在处理单元上,以覆盖在导电元件的第二部分之间的半导体材料层的表面的一部分,其中介电涂层位于导电 元件和导热层。

    On-chip impedance network with digital coarse and analog fine tuning
    100.
    发明授权
    On-chip impedance network with digital coarse and analog fine tuning 有权
    具有数字粗调和模拟微调的片上阻抗网络

    公开(公告)号:US09111671B2

    公开(公告)日:2015-08-18

    申请号:US13901520

    申请日:2013-05-23

    摘要: System and method for providing precision a self calibrating resistance circuit is described that provides for matching a reference resistor using dynamically configurable resistance networks. The resistor network is coupled to the connection, wherein the resistor network provides a configurable resistance across the connection. In addition, the resistor network comprises a digital resistor network and an analog resistor network. Also, the circuit includes control circuitry for configuring the configurable resistance based on a reference resistance of the reference resistor. The configurable resistance is configured by coarsely tuning the resistor network through the digital resistor network and fine tuning the resistor network through the analog resistor network.

    摘要翻译: 描述了提供精度自校准电阻电路的系统和方法,其使用可动态配置的电阻网络来匹配参考电阻。 电阻网络耦合到连接,其中电阻器网络通过连接提供可配置的电阻。 此外,电阻网络包括数字电阻网络和模拟电阻网络。 此外,电路包括用于基于参考电阻器的参考电阻配置可配置电阻的控制电路。 可配置电阻是通过数字电阻网络粗调电阻网络并通过模拟电阻网络微调电阻网络来配置的。