公开(公告)号：US20240113177A1

公开(公告)日：2024-04-04

申请号：US17957887

申请日：2022-09-30

Applicant: Intel Corporation

Inventor： Sukru Yemenicioglu ,  Quan Shi ,  Marni Nabors ,  Charles H. Wallace ,  Xinning Wang ,  Tahir Ghani ,  Andy Chih-Hung Wei ,  Mohit K. Haran ,  Leonard P. Guler ,  Sivakumar Venkataraman ,  Reken Patel ,  Richard Schenker

IPC: H01L29/417 ,  H01L21/8234 ,  H01L27/088 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L29/775 ,  H01L29/778 ,  H01L29/786

CPC classification number: H01L29/41733 ,  H01L21/823412 ,  H01L21/823475 ,  H01L27/088 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/775 ,  H01L29/778 ,  H01L29/78696 ,  H01L21/823431 ,  H01L29/66795 ,  H01L29/7851

Abstract: An integrated circuit includes a first device having a first source or drain region, and a second device having a second source or drain region that is laterally adjacent to the first source or drain region. A conductive source or drain contact includes (i) a lower portion in contact with the first source or drain region, and extending above the first source or drain region, and (ii) an upper portion extending laterally from above the lower portion to above the second source or drain region. A dielectric material is between at least a section of the upper portion of the conductive source or drain contact and the second source or drain region. In an example, each of the first and second devices is a gate-all-around (GAA) device having one or more nanoribbons, nanowires, or nanosheets as channel regions, or is a finFet structure having a fin-based channel region.

公开(公告)号：US20240113107A1

公开(公告)日：2024-04-04

申请号：US17957821

申请日：2022-09-30

Applicant: Intel Corporation

Inventor： Sukru Yemenicioglu ,  Leonard P. Guler ,  Tahir Ghani ,  Marni Nabors ,  Xinning Wang

IPC: H01L27/088 ,  H01L21/762 ,  H01L21/8234 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L29/775 ,  H01L29/778 ,  H01L29/786

CPC classification number: H01L27/088 ,  H01L21/76224 ,  H01L21/823412 ,  H01L21/823481 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/775 ,  H01L29/778 ,  H01L29/78696 ,  H01L29/66795 ,  H01L29/7851

Abstract: An integrated circuit includes a first device and a laterally adjacent second device. The first device includes a first body including semiconductor material extending from a first source region to a first drain region, and a first gate structure on the first body. The second device includes a second body including semiconductor material extending from a second source region to a second drain region, and a second gate structure on the second body. A gate cut including dielectric material is between and laterally separates the first gate structure and the second gate structure. The first body is separated laterally from the gate cut by a first distance, and the second body is separated laterally from the gate cut by a second distance. In an example, the first and second distances differ by at least 2 nanometers. In an example, the first and second devices are fin-based devices or gate-all-around devices.

公开(公告)号：US20240105860A1

公开(公告)日：2024-03-28

申请号：US17955235

申请日：2022-09-28

Applicant: Intel Corporation

Inventor： Abhishek Anil Sharma ,  Tahir Ghani ,  WIlfred Gomes ,  Anand Murthy ,  Sagar Suthram ,  Pushkar Ranade

IPC: H01L29/93 ,  H01L21/28 ,  H01L29/51 ,  H01L29/66

CPC classification number: H01L29/93 ,  H01L29/40111 ,  H01L29/516 ,  H01L29/66174

Abstract: An integrated circuit (IC) die includes a plurality of varactor devices, where at least one varactor of the plurality of varactor devices comprises a first electrode, a second electrode, and a multi-layer stack of ferroelectric material (e.g., ferroelectric variable capacitance material) disposed between the first and second electrodes. Other embodiments are disclosed and claimed.

公开(公告)号：US11908856B2

公开(公告)日：2024-02-20

申请号：US16719257

申请日：2019-12-18

Applicant: Intel Corporation

Inventor： Biswajeet Guha ,  William Hsu ,  Chung-Hsun Lin ,  Kinyip Phoa ,  Oleg Golonzka ,  Tahir Ghani ,  Kalyan Kolluru ,  Nathan Jack ,  Nicholas Thomson ,  Ayan Kar ,  Benjamin Orr

IPC: H01L27/088 ,  H01L29/78 ,  H01L29/06

CPC classification number: H01L27/0886 ,  H01L29/0653 ,  H01L29/0673 ,  H01L29/785

Abstract: Gate-all-around structures having devices with source/drain-to-substrate electrical contact are described. An integrated circuit structure includes a first vertical arrangement of horizontal nanowires above a first fin. A first gate stack is over the first vertical arrangement of horizontal nanowires. A first pair of epitaxial source or drain structures is at first and second ends of the first vertical arrangement of horizontal nanowires. One or both of the first pair of epitaxial source or drain structures is directly electrically coupled to the first fin. A second vertical arrangement of horizontal nanowires is above a second fin. A second gate stack is over the second vertical arrangement of horizontal nanowires. A second pair of epitaxial source or drain structures is at first and second ends of the second vertical arrangement of horizontal nanowires. Both of the second pair of epitaxial source or drain structures is electrically isolated from the second fin.

公开(公告)号：US20240006415A1

公开(公告)日：2024-01-04

申请号：US17856885

申请日：2022-07-01

Applicant: Intel Corporation

Inventor： Abhishek Sharma ,  Wilfred Gomes ,  Tahir Ghani ,  Anand Murthy

IPC: H01L27/092 ,  H01L23/473 ,  H01L23/528 ,  H01L29/06 ,  H01L29/08 ,  H01L29/423 ,  H01L29/417 ,  H01L29/786 ,  H01L29/775 ,  H01L21/02 ,  H01L21/822 ,  H01L21/8238 ,  H01L29/66

CPC classification number: H01L27/0922 ,  H01L23/473 ,  H01L23/5286 ,  H01L29/0673 ,  H01L29/0847 ,  H01L29/42392 ,  H01L29/41733 ,  H01L29/78696 ,  H01L29/775 ,  H01L21/02603 ,  H01L21/8221 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823871 ,  H01L29/66742 ,  H01L29/66439

Abstract: Techniques and mechanisms for providing an integrated circuit (IC) which comprises an interconnect that extends between channel structures of two transistors. In an embodiment, a separation layer is provided between a first stack of channel structures and a second stack of channel structures, wherein an interior region of the separation layer comprises a sacrificial material which spans on overlap region between the stacks. Fabrication processes form a hole which exposes the interior region, and etching is performed to remove the sacrificial material from the separation layer. Subsequently, deposition processing forms in the interior region a trace portion of the interconnect. In another embodiment, the interconnect comprises a contiguous body of a conductor material, wherein the contiguous body extends to form respective regions of the trace portion, and a via portion of the interconnect.

公开(公告)号：US20240004129A1

公开(公告)日：2024-01-04

申请号：US17853732

申请日：2022-06-29

Applicant: Intel Corporation

Inventor： Sagar Suthram ,  Debendra Mallik ,  John Heck ,  Pushkar Sharad Ranade ,  Ravindranath Vithal Mahajan ,  Thomas Liljeberg ,  Wilfred Gomes ,  Abhishek A. Sharma ,  Tahir Ghani

IPC: G02B6/12 ,  G02B6/13 ,  H01L25/16 ,  H01L23/00

CPC classification number: G02B6/12002 ,  G02B6/12004 ,  G02B6/13 ,  H01L25/167 ,  H01L24/08 ,  H01L24/80 ,  H01L2224/08145 ,  H01L2224/80895 ,  H01L2224/80896

Abstract: Embodiments of a microelectronic assembly comprise: a plurality of microelectronic sub-assemblies arranged in an array; and a plurality of photonic integrated circuit (PIC) dies, each PIC die having waveguides. Adjacent microelectronic sub-assemblies are coupled to one of the PIC dies by interconnects such that any one PIC die is coupled to more than two adjacent microelectronic sub-assemblies, and the microelectronic sub-assemblies coupled to each PIC die in the plurality of PIC dies are communicatively coupled by the waveguides in the PIC die. Each microelectronic sub-assembly comprises: an interposer integrated circuit (IC) die comprising one or more electrical controller circuit proximate to at least one edge of the interposer IC die; a first plurality of IC dies coupled to a first surface of the interposer IC die; and a second plurality of IC dies coupled to an opposing second surface of the interposer IC die.

公开(公告)号：US11862728B2

公开(公告)日：2024-01-02

申请号：US17492487

申请日：2021-10-01

Applicant: Intel Corporation

Inventor： Abhishek A. Sharma ,  Van H. Le ,  Gilbert Dewey ,  Jack T. Kavalieros ,  Shriram Shivaraman ,  Benjamin Chu-Kung ,  Yih Wang ,  Tahir Ghani

IPC: H01L29/786 ,  H01L29/08 ,  H01L29/04 ,  H01L29/66 ,  H01L29/10 ,  H01L21/02 ,  H01L29/423 ,  H10B12/00 ,  H01L21/311

CPC classification number: H01L29/78642 ,  H01L21/02647 ,  H01L29/04 ,  H01L29/0847 ,  H01L29/1037 ,  H01L29/42384 ,  H01L29/6656 ,  H01L29/6675 ,  H01L29/78648 ,  H01L29/78696 ,  H10B12/05 ,  H10B12/315 ,  H10B12/50 ,  H01L21/31116 ,  H01L29/66969 ,  H01L29/7869

Abstract: Disclosed herein are dual gate trench shaped thin film transistors and related methods and devices. Exemplary thin film transistor structures include a non-planar semiconductor material layer having a first portion extending laterally over a first gate dielectric layer, which is over a first gate electrode structure, and a second portion extending along a trench over the first gate dielectric layer, a second gate electrode structure at least partially within the trench, and a second gate dielectric layer between the second gate electrode structure and the first portion.

公开(公告)号：US20230410907A1

公开(公告)日：2023-12-21

申请号：US18312867

申请日：2023-05-05

Applicant: Intel Corporation

Inventor： Abhishek A. Sharma ,  Sagar Suthram ,  Tahir Ghani ,  Wilfred Gomes ,  Anand S. Murthy

IPC: G11C16/04 ,  H10B43/27 ,  G11C16/26 ,  G11C16/10 ,  H01L29/78 ,  H01L29/06 ,  H01L29/778 ,  H01L29/423 ,  H01L29/786

CPC classification number: G11C16/0483 ,  H10B43/27 ,  G11C16/26 ,  G11C16/10 ,  H01L29/78696 ,  H01L29/0665 ,  H01L29/778 ,  H01L29/42392 ,  H01L29/7851

Abstract: IC devices implementing 2T memory cells with angled transistors, and related assemblies and methods, are disclosed herein. A transistor is referred to as an “angled transistor” if a longitudinal axis of an elongated semiconductor structure of the transistor (e.g., a fin or a nanoribbon) is neither perpendicular nor parallel to any edges of front or back sides of a support structure (e.g., a die) over which the transistor is implemented. 2T memory cells with read and write transistors provided in different planes of an IC device, stacked substantially over one another, and having either the read transistors or the write transistors being angled transistors provide a promising way to increasing memory cell densities, drive current, and design flexibility in making electrical connections to, or between, various transistor terminals and control lines of memory arrays, thus providing good scalability in the number of 2T memory cells included in memory arrays.

公开(公告)号：US20230395676A1

公开(公告)日：2023-12-07

申请号：US17829706

申请日：2022-06-01

Applicant: Intel Corporation

Inventor： Sagar Suthram ,  Abhishek A. Sharma ,  Wilfred Gomes ,  Tahir Ghani ,  Anand S. Murthy ,  Pushkar Sharad Ranade

IPC: H01L29/423 ,  H01L29/06 ,  H01L27/092

CPC classification number: H01L29/4238 ,  H01L29/0665 ,  H01L29/42392 ,  H01L27/092

Abstract: IC devices with transistors having angled gates, and related assemblies and methods, are disclosed herein. A transistor is referred to as having an “angled gate” if an angle between a projection of the gate of the transistor onto a plane of a support structure (e.g., a die) over which the transistor is implemented and an analogous projection of a longitudinal axis of an elongated structure (e.g., a fin or a nanoribbon having one or more semiconductor materials) based on which the transistor is built is between 10 degrees and 80 degrees. Transistors having angled gates provide a promising way to increasing densities of transistors on the limited real estate of semiconductor chips and/or decreasing short-channel effects associated with continuous scaling of IC components.

公开(公告)号：US11799015B2

公开(公告)日：2023-10-24

申请号：US17703884

申请日：2022-03-24

Applicant: Intel Corporation

Inventor： Tahir Ghani ,  Byron Ho ,  Michael L. Hattendorf ,  Christopher P. Auth

IPC: H01L29/66 ,  H01L29/78 ,  H01L21/02 ,  H01L21/033 ,  H01L21/28 ,  H01L21/285 ,  H01L21/308 ,  H01L21/311 ,  H01L21/762 ,  H01L21/768 ,  H01L21/8234 ,  H01L21/8238 ,  H01L23/522 ,  H01L23/528 ,  H01L23/532 ,  H01L27/02 ,  H01L27/088 ,  H01L27/092 ,  H01L49/02 ,  H01L29/06 ,  H01L29/08 ,  H01L29/165 ,  H01L29/167 ,  H01L29/417 ,  H01L29/51 ,  H10B10/00 ,  H01L23/00

CPC classification number: H01L29/66545 ,  H01L21/02532 ,  H01L21/02636 ,  H01L21/0337 ,  H01L21/28247 ,  H01L21/28518 ,  H01L21/28568 ,  H01L21/3086 ,  H01L21/31105 ,  H01L21/31144 ,  H01L21/76224 ,  H01L21/76232 ,  H01L21/76801 ,  H01L21/76802 ,  H01L21/76816 ,  H01L21/76834 ,  H01L21/76846 ,  H01L21/76849 ,  H01L21/76877 ,  H01L21/76897 ,  H01L21/823431 ,  H01L21/823481 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823821 ,  H01L21/823828 ,  H01L21/823842 ,  H01L21/823857 ,  H01L21/823871 ,  H01L21/823878 ,  H01L23/528 ,  H01L23/5226 ,  H01L23/5283 ,  H01L23/5329 ,  H01L23/53209 ,  H01L23/53238 ,  H01L23/53266 ,  H01L27/0207 ,  H01L27/0886 ,  H01L27/0922 ,  H01L27/0924 ,  H01L28/20 ,  H01L28/24 ,  H01L29/0649 ,  H01L29/0653 ,  H01L29/0847 ,  H01L29/165 ,  H01L29/167 ,  H01L29/41783 ,  H01L29/41791 ,  H01L29/516 ,  H01L29/6653 ,  H01L29/6656 ,  H01L29/66636 ,  H01L29/66795 ,  H01L29/66818 ,  H01L29/785 ,  H01L29/7843 ,  H01L29/7845 ,  H01L29/7846 ,  H01L29/7848 ,  H01L29/7851 ,  H01L29/7854 ,  H10B10/12 ,  H01L21/0217 ,  H01L21/02164 ,  H01L21/0332 ,  H01L21/76883 ,  H01L21/76885 ,  H01L21/823437 ,  H01L21/823475 ,  H01L24/16 ,  H01L24/32 ,  H01L24/73 ,  H01L29/665 ,  H01L29/7842 ,  H01L29/7853 ,  H01L2224/16227 ,  H01L2224/32225 ,  H01L2224/73204

Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, a method includes forming a plurality of fins and forming a plurality of gate structures over the plurality of fins. A dielectric material structure is formed between adjacent ones of the plurality of gate structures. A portion of a first of the plurality of gate structures is removed to expose a first portion of each of the plurality of fins, and a portion of a second of the plurality of gate structures is removed to expose a second portion of each of the plurality of fins. The exposed first portion of each of the plurality of fins is removed, but the exposed second portion of each of the plurality of fins is not removed.