公开(公告)号：US20230369049A1

公开(公告)日：2023-11-16

申请号：US18350583

申请日：2023-07-11

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chang-Jung Hsueh ,  Chen-En Yen ,  Chin Wei Kang ,  Kai Jun Zhan ,  Wei-Hung Lin ,  Cheng Jen Lin ,  Ming-Da Cheng ,  Ching-Hui Chen ,  Mirng-Ji Lii

IPC: H01L21/033 ,  H01L21/311 ,  H01L21/3105 ,  H01L21/3213 ,  H01L21/027

CPC classification number: H01L21/0337 ,  H01L21/31144 ,  H01L21/31058 ,  H01L21/0332 ,  H01L21/31116 ,  H01L21/32135 ,  H01L21/32139 ,  H01L21/0273

Abstract: A method includes depositing a plurality of layers on a substrate, patterning a first mask overlying the plurality of layers, and performing a first etching process on the plurality of layers using the first mask. The method also includes forming a polymer material along sidewalls of the first mask and sidewalls of the plurality of layers, and removing the polymer material. The method also includes performing a second etching process on the plurality of layers using the remaining first mask, where after the second etching process terminates a combined sidewall profile of the plurality of layers comprises a first portion and a second portion, and a first angle of the first portion and a second angle of the second portion are different to each other.

公开(公告)号：US11133285B2

公开(公告)日：2021-09-28

申请号：US16360411

申请日：2019-03-21

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Meng-Tse Chen ,  Yu-Chih Liu ,  Hui-Min Huang ,  Wei-Hung Lin ,  Jing Ruei Lu ,  Ming-Da Cheng ,  Chung-Shi Liu

IPC: H01L25/065 ,  H01L23/31 ,  H01L21/56 ,  H01L23/00 ,  H01L25/00 ,  H01L23/29

Abstract: The present disclosure, in some embodiments, relates to a method of forming a package. The method includes coupling a first package component to a second package component using a first set of conductive elements. A first polymer-comprising material is formed over the second package component and surrounding the first set of conductive elements. The first polymer-comprising material is cured to solidify the first polymer-comprising material. A part of the first polymer-comprising material is removed to expose an upper surface of the second package component. The second package component is coupled to a third package component using a second set of conductive elements that are formed onto the upper surface of the second package component.

公开(公告)号：US20210202335A1

公开(公告)日：2021-07-01

申请号：US17201445

申请日：2021-03-15

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chen-Hua Yu ,  Chung-Shi Liu ,  Chih-Fan Huang ,  Chih-Wei Lin ,  Wei-Hung Lin ,  Ming-Da Cheng

IPC: H01L23/31 ,  H01L25/10 ,  H01L21/56 ,  H01L23/528 ,  H01L21/768 ,  H01L21/82 ,  H01L23/04 ,  H01L23/367 ,  H01L23/538 ,  H01L23/00 ,  H01L23/498

Abstract: Packaged semiconductor devices and methods of packaging semiconductor devices are disclosed. In some embodiments, a packaged semiconductor device includes an integrated circuit die, a molding compound disposed around the integrated circuit die, and an interconnect structure disposed over the integrated circuit die and the molding compound. The molding compound is thicker than the integrated circuit die.

公开(公告)号：US10141281B2

公开(公告)日：2018-11-27

申请号：US15242722

申请日：2016-08-22

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Wei-Hung Lin ,  Hsiu-Jen Lin ,  Ming-Da Cheng ,  Yu-Min Liang ,  Chen-Shien Chen ,  Chung-Shi Liu

IPC: H01L23/00

Abstract: According to an exemplary embodiment, a substrate having a first area and a second area is provided. The substrate includes a plurality of pads. Each of the pads has a pad size. The pad size in the first area is larger than the pad size in the second area.

公开(公告)号：US10014260B2

公开(公告)日：2018-07-03

申请号：US15347912

申请日：2016-11-10

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yi-Da Tsai ,  Cheng-Ping Lin ,  Wei-Hung Lin ,  Chih-Wei Lin ,  Ming-Da Cheng ,  Ching-Hua Hsieh ,  Chung-Shi Liu

IPC: H01L23/552 ,  H01L21/56 ,  H01L23/538 ,  H01L23/00 ,  H01L23/31 ,  H01L21/48 ,  H01L21/683 ,  H01L23/29

Abstract: Package structures and methods for forming the same are provided. A method for forming a package structure includes providing a carrier substrate. The method also includes forming a conductive layer over the carrier substrate. The method further includes forming a passivation layer over the conductive layer. The passivation layer includes openings that expose portions of the conductive layer. In addition, the method includes bonding integrated circuit dies to the portions of the conductive layer through bumps. There is a space between the integrated circuit dies and the passivation layer. The method also includes filling the space with a first molding compound. The first molding compound surrounds the bumps and the integrated circuit dies. The method further includes forming a second molding compound capping the first molding compound and the integrated circuit dies. The passivation layer has a sidewall that is covered by the second molding compound.

公开(公告)号：US20170287865A1

公开(公告)日：2017-10-05

申请号：US15631436

申请日：2017-06-23

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chen-Hua Yu ,  Chung-Shi Liu ,  Ming-Da Cheng ,  Mirng-Ji Lii ,  Meng-Tse Chen ,  Wei-Hung Lin

IPC: H01L23/00 ,  H01L25/065 ,  H01L23/31

CPC classification number: H01L24/05 ,  B23K35/001 ,  B23K35/0222 ,  B23K35/22 ,  B23K35/262 ,  B23K35/3613 ,  H01L21/561 ,  H01L23/3135 ,  H01L23/3178 ,  H01L23/498 ,  H01L23/49816 ,  H01L24/08 ,  H01L24/13 ,  H01L24/14 ,  H01L24/16 ,  H01L24/17 ,  H01L24/81 ,  H01L24/94 ,  H01L24/97 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/105 ,  H01L25/50 ,  H01L2224/0401 ,  H01L2224/05022 ,  H01L2224/05124 ,  H01L2224/05139 ,  H01L2224/05144 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05572 ,  H01L2224/05611 ,  H01L2224/06181 ,  H01L2224/08113 ,  H01L2224/1184 ,  H01L2224/13005 ,  H01L2224/13014 ,  H01L2224/13022 ,  H01L2224/13023 ,  H01L2224/13026 ,  H01L2224/13124 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13184 ,  H01L2224/1355 ,  H01L2224/13561 ,  H01L2224/1357 ,  H01L2224/13582 ,  H01L2224/136 ,  H01L2224/13666 ,  H01L2224/1412 ,  H01L2224/14181 ,  H01L2224/16104 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/1703 ,  H01L2224/17051 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/81815 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2225/0651 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2225/06565 ,  H01L2225/06568 ,  H01L2225/1023 ,  H01L2225/1058 ,  H01L2924/00014 ,  H01L2924/014 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/381 ,  H01L2924/3841 ,  H01L2924/00 ,  H01L2224/81 ,  H01L2924/01047 ,  H01L2924/01029 ,  H01L2924/01083 ,  H01L2924/013 ,  H01L2924/206 ,  H01L2224/05552 ,  H01L2924/00012

Abstract: Some embodiments relate to a semiconductor device package, which includes a substrate with a contact pad. A non-solder ball is coupled to the contact pad at a contact pad interface surface. A layer of solder is disposed over an outer surface of the non-solder ball, and has an inner surface and an outer surface which are generally concentric with the outer surface of the non-solder ball. An intermediate layer separates the non-solder ball and the layer of solder. The intermediate layer is distinct in composition from both the non-solder ball and the layer of solder. Sidewalls of the layer of solder are curved or sphere-like and terminate at a planar surface, which is disposed at a maximum height of the layer of solder as measured from the contact pad interface surface.

公开(公告)号：US11664287B2

公开(公告)日：2023-05-30

申请号：US17201445

申请日：2021-03-15

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chen-Hua Yu ,  Chung-Shi Liu ,  Chih-Fan Huang ,  Chih-Wei Lin ,  Wei-Hung Lin ,  Ming-Da Cheng

IPC: H01L23/31 ,  H01L25/10 ,  H01L21/56 ,  H01L23/528 ,  H01L21/768 ,  H01L21/82 ,  H01L23/04 ,  H01L23/367 ,  H01L23/538 ,  H01L23/00 ,  H01L23/498

CPC classification number: H01L23/3114 ,  H01L21/561 ,  H01L21/565 ,  H01L21/568 ,  H01L21/768 ,  H01L21/82 ,  H01L23/04 ,  H01L23/3135 ,  H01L23/3142 ,  H01L23/367 ,  H01L23/49811 ,  H01L23/49822 ,  H01L23/528 ,  H01L23/5384 ,  H01L23/5389 ,  H01L24/18 ,  H01L24/19 ,  H01L24/96 ,  H01L24/97 ,  H01L25/105 ,  H01L23/3128 ,  H01L23/49816 ,  H01L24/73 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/48096 ,  H01L2224/48227 ,  H01L2224/48465 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/73267 ,  H01L2225/1035 ,  H01L2225/1058 ,  H01L2924/12042 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2924/181 ,  H01L2924/00 ,  H01L2924/12042 ,  H01L2924/00 ,  H01L2224/73265 ,  H01L2224/32225 ,  H01L2224/48227 ,  H01L2924/00012 ,  H01L2224/73204 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2924/00 ,  H01L2924/15311 ,  H01L2224/73265 ,  H01L2224/32225 ,  H01L2224/48227 ,  H01L2924/00 ,  H01L2924/15311 ,  H01L2224/73204 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2924/00 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2224/48465 ,  H01L2224/48227 ,  H01L2924/00 ,  H01L2224/48465 ,  H01L2224/48095 ,  H01L2924/00

Abstract: Packaged semiconductor devices and methods of packaging semiconductor devices are disclosed. In some embodiments, a packaged semiconductor device includes an integrated circuit die, a molding compound disposed around the integrated circuit die, and an interconnect structure disposed over the integrated circuit die and the molding compound. The molding compound is thicker than the integrated circuit die.

公开(公告)号：US10177104B2

公开(公告)日：2019-01-08

申请号：US15631436

申请日：2017-06-23

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chen-Hua Yu ,  Chung-Shi Liu ,  Ming-Da Cheng ,  Mirng-Ji Lii ,  Meng-Tse Chen ,  Wei-Hung Lin

IPC: H01L23/00 ,  H01L23/31 ,  H01L25/065 ,  H01L23/498 ,  H01L21/56 ,  H01L25/10 ,  H01L25/03 ,  H01L25/00 ,  B23K35/00 ,  B23K35/02 ,  B23K35/22 ,  B23K35/26 ,  B23K35/36

Abstract: Some embodiments relate to a semiconductor device package, which includes a substrate with a contact pad. A non-solder ball is coupled to the contact pad at a contact pad interface surface. A layer of solder is disposed over an outer surface of the non-solder ball, and has an inner surface and an outer surface which are generally concentric with the outer surface of the non-solder ball. An intermediate layer separates the non-solder ball and the layer of solder. The intermediate layer is distinct in composition from both the non-solder ball and the layer of solder. Sidewalls of the layer of solder are curved or sphere-like and terminate at a planar surface, which is disposed at a maximum height of the layer of solder as measured from the contact pad interface surface.

公开(公告)号：US09711470B2

公开(公告)日：2017-07-18

申请号：US14975911

申请日：2015-12-21

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chen-Hua Yu ,  Chung-Shi Liu ,  Ming-Da Cheng ,  Mirng-Ji Lii ,  Meng-Tse Chen ,  Wei-Hung Lin

IPC: H01L23/00 ,  B23K35/02 ,  B23K35/36 ,  B23K35/26 ,  B23K35/22 ,  H01L23/498 ,  H01L21/56 ,  H01L25/10 ,  H01L23/31 ,  H01L25/03 ,  H01L25/00 ,  B23K35/00

CPC classification number: H01L24/05 ,  B23K35/001 ,  B23K35/0222 ,  B23K35/22 ,  B23K35/262 ,  B23K35/3613 ,  H01L21/561 ,  H01L23/3135 ,  H01L23/3178 ,  H01L23/498 ,  H01L23/49816 ,  H01L24/08 ,  H01L24/13 ,  H01L24/14 ,  H01L24/16 ,  H01L24/17 ,  H01L24/81 ,  H01L24/94 ,  H01L24/97 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/105 ,  H01L25/50 ,  H01L2224/0401 ,  H01L2224/05022 ,  H01L2224/05124 ,  H01L2224/05139 ,  H01L2224/05144 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05572 ,  H01L2224/05611 ,  H01L2224/06181 ,  H01L2224/08113 ,  H01L2224/1184 ,  H01L2224/13005 ,  H01L2224/13014 ,  H01L2224/13022 ,  H01L2224/13023 ,  H01L2224/13026 ,  H01L2224/13124 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13184 ,  H01L2224/1355 ,  H01L2224/13561 ,  H01L2224/1357 ,  H01L2224/13582 ,  H01L2224/136 ,  H01L2224/13666 ,  H01L2224/1412 ,  H01L2224/14181 ,  H01L2224/16104 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/1703 ,  H01L2224/17051 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/81815 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2225/0651 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2225/06565 ,  H01L2225/06568 ,  H01L2225/1023 ,  H01L2225/1058 ,  H01L2924/00014 ,  H01L2924/014 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/381 ,  H01L2924/3841 ,  H01L2924/00 ,  H01L2224/81 ,  H01L2924/01047 ,  H01L2924/01029 ,  H01L2924/01083 ,  H01L2924/013 ,  H01L2924/206 ,  H01L2224/05552 ,  H01L2924/00012

Abstract: The described embodiments of mechanisms of forming a package on package (PoP) structure involve bonding with connectors with non-solder metal balls to a packaging substrate. The non-solder metal balls may include a solder coating layer. The connectors with non-solder metal balls can maintain substantially the shape of the connectors and control the height of the bonding structures between upper and lower packages. The connectors with non-solder metal balls are also less likely to result in bridging between connectors or disconnection (or cold joint) of bonded connectors. As a result, the pitch of the connectors with non-solder metal balls can be kept small.

公开(公告)号：US12027435B2

公开(公告)日：2024-07-02

申请号：US17818742

申请日：2022-08-10

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chen-Shien Chen ,  Kuo-Ching Hsu ,  Wei-Hung Lin ,  Hui-Min Huang ,  Ming-Da Cheng ,  Mirng-Ji Lii

IPC: H01L23/31 ,  H01L21/56 ,  H01L23/00 ,  H01L23/538

CPC classification number: H01L23/3114 ,  H01L21/56 ,  H01L23/5384 ,  H01L24/81

Abstract: A method includes forming a reconstructed package substrate, which includes placing a plurality of substrate blocks over a carrier, encapsulating the plurality of substrate blocks in an encapsulant, planarizing the encapsulant and the plurality of substrate blocks to reveal redistribution lines in the plurality of substrate blocks, and forming a redistribution structure overlapping both of the plurality of substrate blocks and encapsulant. A package component is bonded over the reconstructed package substrate.