METAL BONDING APPARATUS
    24.
    发明申请
    METAL BONDING APPARATUS 审中-公开
    金属接合装置

    公开(公告)号:US20130284794A1

    公开(公告)日:2013-10-31

    申请号:US13772208

    申请日:2013-02-20

    IPC分类号: B23K20/24 B23K20/02

    摘要: The metal bonding apparatus comprises: a solution supply unit configured to supply a solution which is able to elute an oxide with copper oxide as a principal component, to at least one of a first bonding portion and a second bonding portion; a pressing unit configured to apply pressure to the first bonding portion and the second bonding portion so as to sandwich the solution between the first bonding portion and the second bonding portion, and in a direction in which a distance between the first bonding portion and the second bonding portion is reduced; and a heating unit configured to heat the first bonding portion and the second bonding portion, wherein the first bonding portion and the second bonding portion are bonded by the pressure applied by the pressing unit and the heat from the heating unit.

    摘要翻译: 金属接合装置包括:溶液供给单元,被配置为将能够以氧化铜作为主要成分洗脱氧化物的溶液供给到第一接合部和第二接合部中的至少一个; 压力单元,其构造成对所述第一接合部和所述第二接合部施加压力,以将所述溶液夹在所述第一接合部和所述第二接合部之间,并且在所述第一接合部和所述第二接合部之间的距离 结合部分减少; 以及加热单元,其构造成加热所述第一接合部和所述第二接合部,其中,所述第一接合部和所述第二接合部通过由所述加压单元施加的压力和来自所述加热单元的热而接合。

    SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD
    28.
    发明申请
    SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD 审中-公开
    半导体制造设备和半导体制造方法

    公开(公告)号:US20090001135A1

    公开(公告)日:2009-01-01

    申请号:US12163158

    申请日:2008-06-27

    IPC分类号: B23K20/10

    摘要: A semiconductor manufacturing apparatus operable to simultaneously apply supersonic vibration to two bonding sites located at different heights to simultaneously perform bonding of the two bonding sites, the apparatus includes: a cylindrical body; a first protrusion provided on an outer peripheral surface of the cylindrical body and receiving supersonic vibration propagated through the cylindrical body; and a second protrusion provided on the outer peripheral surface of the cylindrical body and receiving supersonic vibration propagated through the cylindrical body. A distance between an axial center of the cylindrical body and the tip of the first protrusion is generally equal to the distance between the axial center of the cylindrical body and the tip of the second protrusion. A tip surface of the first protrusion and a tip surface of the second protrusion are on different planes, respectively.

    摘要翻译: 一种半导体制造装置,其可操作以对位于不同高度的两个结合位置同时施加超音速振动,以同时进行所述两个结合位置的结合,所述装置包括:圆柱体; 设置在所述圆筒体的外周面上并且接收通过所述圆筒体传播的超音速振动的第一突起; 以及设置在所述圆筒体的外周面上并且接收通过所述圆筒体传播的超音速振动的第二突起。 圆柱体的轴心与第一突起的前端之间的距离通常等于圆柱体的轴心与第二突起的尖端之间的距离。 第一突起的尖端表面和第二突起的尖端表面分别在不同的平面上。