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    Electron source having a tungsten single crystal electrode
    41.
    发明授权
    Electron source having a tungsten single crystal electrode 有权
    具有钨单晶电极的电子源

    公开(公告)号：US08593048B2

    公开(公告)日：2013-11-26

    申请号：US13695625

    申请日：2010-11-30

    Applicant: Ryozo Nonogaki ,  Toshiyuki Morishita

    Inventor： Ryozo Nonogaki ,  Toshiyuki Morishita

    IPC: H01J1/304

    CPC classification number: H01J1/15 ,  H01J1/304 ,  H01J37/06 ,  H01J2237/06316

    Abstract: Provided are an electron source which allows a high-angle current density operation even at a low extraction voltage, and reduces excess current that causes vacuum deterioration; and an electronic device using the electron source. The electron source has a cathode composed of single-crystal tungsten, and a diffusion source provided in the intermediate portion of the cathode. In the cathode, the angle between the axial direction of the cathode and orientation of the cathode is adjusted so that electrons to be emitted from the vicinity of the boundary between surface and surface formed on the tip of the cathode, are emitted substantially parallel to the axis of the cathode. The electronic device is provided with the electron source.

    Abstract translation: 提供了即使在低提取电压下也允许高角度电流密度操作并且减少导致真空劣化的过电流的电子源。 以及使用该电子源的电子装置。 电子源具有由单晶钨组成的阴极和设置在阴极的中间部分的扩散源。 在阴极中，调节阴极的轴向和阴极的<100>取向之间的角度，使得从形成在阴极顶端的表面和表面之间的边界附近发射的电子基本上被发射 平行于阴极的轴线。 电子设备设有电子源。

    ELECTRON SOURCE
    42.
    发明申请
    ELECTRON SOURCE 有权
    电子源

    公开(公告)号：US20130049568A1

    公开(公告)日：2013-02-28

    申请号：US13695625

    申请日：2010-11-30

    Applicant: Ryozo Nonogaki ,  Toshiyuki Morishita

    Inventor： Ryozo Nonogaki ,  Toshiyuki Morishita

    IPC: H01J1/304

    CPC classification number: H01J1/15 ,  H01J1/304 ,  H01J37/06 ,  H01J2237/06316

    Abstract: Provided are an electron source which allows a high-angle current density operation even at a low extraction voltage, and reduces excess current that causes vacuum deterioration; and an electronic device using the electron source. The electron source has a cathode composed of single-crystal tungsten, and a diffusion source provided in the intermediate portion of the cathode. In the cathode, the angle between the axial direction of the cathode and orientation of the cathode is adjusted so that electrons to be emitted from the vicinity of the boundary between surface and surface formed on the tip of the cathode, are emitted substantially parallel to the axis of the cathode. The electronic device is provided with the electron source.

    Abstract translation: 提供了即使在低提取电压下也允许高角度电流密度操作并且减少导致真空劣化的过电流的电子源。 以及使用该电子源的电子装置。 电子源具有由单晶钨组成的阴极和设置在阴极的中间部分的扩散源。 在阴极中，调节阴极的轴向和阴极的<100>取向之间的角度，使得从形成在阴极顶端的表面和表面之间的边界附近发射的电子基本上被发射 平行于阴极的轴线。 电子设备设有电子源。

    Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
    44.
    发明授权
    Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope 有权
    界面，在非真空环境中观察物体的方法和扫描电子显微镜

    公开(公告)号：US08164057B2

    公开(公告)日：2012-04-24

    申请号：US12446757

    申请日：2007-10-23

    Applicant: Dov Shachal

    Inventor： Dov Shachal

    IPC: G01N23/00

    CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

    Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

    Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

    Magnetically insulated cold-cathode electron gun
    45.
    发明授权
    Magnetically insulated cold-cathode electron gun 有权
    磁绝缘冷阴极电子枪

    公开(公告)号：US08129910B2

    公开(公告)日：2012-03-06

    申请号：US12490251

    申请日：2009-06-23

    Applicant: David Riley Whaley ,  Ramon Duggal ,  Carter Michael Armstrong

    Inventor： David Riley Whaley ,  Ramon Duggal ,  Carter Michael Armstrong

    IPC: H01J1/52 ,  H01J5/02

    CPC classification number: H01J3/40 ,  H01J1/52 ,  H01J37/026 ,  H01J37/06 ,  H01J2237/0206 ,  H01J2237/0213 ,  H01J2237/06325

    Abstract: A system and method of magnetically insulating the cathode of a cold-cathode electron gun is achieved. A strong magnetic field is applied in the vicinity of the cold cathode to deflect and constrain the flow of electrons emitted from structures within the electron gun. The magnetic field largely prevents re-reflected primary and secondary electrons from reaching the cathode, thereby improving the operation and increasing the life of the cold-cathode electron gun. In addition, the insulating magnetic field improves electron beam focusing and enables a reduction in the magnitude of static electric focusing fields employed in the vicinity of the cold cathode, further reducing the electron gun's susceptibility to destructive arcing.

    Abstract translation: 实现了冷阴极电子枪的阴极的磁绝缘的系统和方法。 在冷阴极附近施加强磁场以偏转和限制从电子枪内的结构发射的电子的流动。 磁场大大地防止再反射的一次电子和二次电子到达阴极，从而改善了冷阴极电子枪的操作和寿命。 此外，绝缘磁场改善了电子束聚焦，并且能够减少在冷阴极附近使用的静电聚焦场的大小，进一步降低了电子枪对破坏性电弧的敏感性。

    Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device
    47.
    发明授权
    Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device 失效
    金刚石电子发射阴极，电子发射源，电子显微镜和电子束曝光装置

    公开(公告)号：US07863805B2

    公开(公告)日：2011-01-04

    申请号：US11665472

    申请日：2006-06-19

    Applicant: Yoshiyuki Yamamoto ,  Akihiko Ueda ,  Yoshiki Nishibayashi ,  Takahiro Imai

    Inventor： Yoshiyuki Yamamoto ,  Akihiko Ueda ,  Yoshiki Nishibayashi ,  Takahiro Imai

    IPC: H01J1/02 ,  H01J9/02 ,  H01J1/62 ,  H01J63/04

    CPC classification number: H01J1/15 ,  H01J1/14 ,  H01J37/06 ,  H01J2237/06308 ,  H01J2237/06316

    Abstract: It is possible to provide an electron emission cathode, an electron emission source having a high-luminance and narrow energy width by using diamond and an electronic device using them. The diamond electron discharge cathode has a monocrystal diamond at least at a part of it. The diamond electron emission cathode has a columnar shape including a sharpened section and a heating section. The sharpened section has an electron emission section. The electron emission section and the heating section are formed by diamond semiconductor, which is formed by a p-type semiconductor containing 2×1015 cm−3 of p-type impurities or above. The electron emission section has the semiconductor. A metal layer is formed on the surface of the electron emission cathode. The metal layer exists at least at a part of the heating section. The distance from the electron emission section to the position nearest to the end of the metal layer is 500 μm. A pair of current introduction terminals supplies current to the heating section to heat the heating section. A part of the introduced electrons is emitted from the electron emission section.

    Abstract translation: 可以通过使用金刚石和使用它们的电子装置来提供电子发射阴极，具有高亮度和窄能量宽度的电子发射源。 金刚石电子放电阴极至少在其一部分具有单晶金刚石。 金刚石电子发射阴极具有包括锐化部分和加热部分的柱状。 锐化部分具有电子发射部分。 电子发射部分和加热部分由金刚石半导体形成，其由含有2×10 15 cm -3的p型杂质或以上的p型半导体形成。 电子发射部分具有半导体。 在电子发射阴极的表面上形成金属层。 金属层至少存在于加热部的一部分。 从电子发射部到最接近金属层末端的位置的距离为500μm。 一对电流引入端子向加热部分供电以加热加热部分。 引入的电子的一部分从电子发射部分发射。

    Electron microscope with an emitter operating in medium vacuum
    48.
    发明申请
    Electron microscope with an emitter operating in medium vacuum 有权
    电子显微镜，发射体在中等真空中工作

    公开(公告)号：US20100314540A1

    公开(公告)日：2010-12-16

    申请号：US12653812

    申请日：2009-12-21

    Applicant: David L. Adler

    Inventor： David L. Adler

    IPC: G01N23/00

    CPC classification number: H01J37/26 ,  H01J37/06 ,  H01J37/28 ,  H01J2237/2605

    Abstract: An electron microscope is described. This electron microscope includes an electron emitter that has an evaporation or sublimation rate that is significantly less than that of tungsten at the reduced pressures around the electron emitter during operation of the electron microscope. As a consequence, the electron microscope may be able to operate at reduced pressures that are much larger than those in existing electron microscopes. For example, at least during the operation the reduced pressure in the electron microscope may be greater than or equal to a medium vacuum. This capability may allow the electron microscope to use a roughing pump to provide the reduced pressure, thereby reducing the cost and complexity of the electron microscope, and improving its reliability. In addition, the size of the electron microscope may be reduced, which may enable a hand-held or portable version of the electron microscope.

    Abstract translation: 描述电子显微镜。 该电子显微镜包括在电子显微镜操作期间在电子发射体周围的减压下具有显着小于钨的蒸发或升华速率的电子发射体。 因此，电子显微镜可能能够在比现有的电子显微镜中更大的压力下工作。 例如，至少在操作期间，电子显微镜中的减压可以大于或等于中等真空度。 该能力可以允许电子显微镜使用粗抽泵来提供减压，从而降低电子显微镜的成本和复杂性，并提高其可靠性。 此外，可以减小电子显微镜的尺寸，这可以实现电子显微镜的手持式或便携式。

    Apparatus for producing secondary electrons, a secondary electrode, and an acceleration electrode
    49.
    发明授权
    Apparatus for producing secondary electrons, a secondary electrode, and an acceleration electrode 有权
    用于产生二次电子的装置，二次电极和加速电极

    公开(公告)号：US07772572B2

    公开(公告)日：2010-08-10

    申请号：US12063000

    申请日：2008-04-04

    Applicant: Andreas Kyek

    Inventor： Andreas Kyek

    IPC: H01J37/304

    CPC classification number: H01J43/02 ,  H01J37/026 ,  H01J37/06 ,  H01J2237/0045

    Abstract: An apparatus includes a primary electrode and an acceleration electrode. The acceleration electrode or, alternatively, an additional secondary electrode contains a slot that extends obliquely through the acceleration electrode or through the secondary electrode. This measure allows secondary electrons to be produced in a highly effective manner.

    Abstract translation: 一种装置包括主电极和加速电极。 加速电极或备选地，附加的次级电极包含倾斜地穿过加速电极或通过次级电极延伸的槽。 该测量允许以高效的方式产生二次电子。

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