Multi-site probe
    4.
    发明授权
    Multi-site probe 有权
    多站点探测

    公开(公告)号:US07847568B2

    公开(公告)日:2010-12-07

    申请号:US11840587

    申请日:2007-08-17

    IPC分类号: G01R31/02

    摘要: Various probe substrates for probing a semiconductor die and methods of use thereof are disclosed. In one aspect, a method of manufacturing is provided that includes forming a first matrix array of conductor pins and a second matrix array of conductor pins on a probe substrate. The second matrix array of conductor pins is separated from the first matrix array of conductor pins by a first pitch along a first axis selected to substantially match a second pitch between a first semiconductor die and a second semiconductor die of a semiconductor workpiece.

    摘要翻译: 公开了用于探测半导体管芯的各种探针衬底及其使用方法。 一方面,提供一种制造方法,其包括在探针基板上形成导体引脚的第一矩阵阵列和导体引脚的第二矩阵阵列。 导体引脚的第二矩阵阵列沿着第一轴线与导体引脚的第一矩阵阵列分离,所述第一轴线被选择为基本匹配半导体工件的第一半导体管芯和第二半导体管芯之间的第二间距。