SOI substrate and method for manufacturing the same
    44.
    发明授权
    SOI substrate and method for manufacturing the same 有权
    SOI衬底及其制造方法

    公开(公告)号:US07262486B2

    公开(公告)日:2007-08-28

    申请号:US11154514

    申请日:2005-06-17

    IPC分类号: H01L21/40

    CPC分类号: H01L21/76286 H01L21/84

    摘要: The SOI substrate 1 has a supporting substrate 10, an insulating layer 20 formed on the supporting substrate 10 and a silicon layer 30 formed on the insulating layer 20. A through electrode 40 is provided in a device formation region A1 of the SOI substrate 1. The through electrode 40 reaches the insulating layer 20 from the silicon layer 30. Specifically, the through electrode 40 extends to an inner part of the insulating layer 20 originating from a surface of the silicon layer 30 while penetrating the silicon layer 30. Here, an end face 40a of the through electrode 40 at the insulating layer 20 side stops inside the insulating layer 20.

    摘要翻译: SOI衬底1具有支撑衬底10,形成在支撑衬底10上的绝缘层20和形成在绝缘层20上的硅层30。 在SOI衬底1的器件形成区域A 1中设置有贯通电极40。 通孔40从硅层30到达绝缘层20。 具体地,贯穿电极40延伸到绝缘层20的内部,源于硅层30的表面,同时穿透硅层30。 这里,绝缘层20侧的贯通电极40的端面40a停止在绝缘层20的内部。

    Semiconductor chip and method for manufacturing the same and semiconductor device
    46.
    发明授权
    Semiconductor chip and method for manufacturing the same and semiconductor device 有权
    半导体芯片及其制造方法及半导体器件

    公开(公告)号:US07598590B2

    公开(公告)日:2009-10-06

    申请号:US11143672

    申请日:2005-06-03

    IPC分类号: H01L29/66

    摘要: The semiconductor chip 1 has a semiconductor substrate 10. In the present embodiment, the semiconductor substrate 10, which is an SOI substrate, is constituted by comprising a support substrate 12, an insulating layer 14 formed on the support substrate 12 with a layered structure, and a silicon layer 16 formed on the insulating layer 14 with the layered structure. The semiconductor substrate 10 has a circuit forming region A1 provided in the silicon layer 16. An insulating region 18 is provided on the semiconductor substrate 10. The insulating region 18 is provided so as to surround the entire side face of the circuit forming region A1.

    摘要翻译: 半导体芯片1具有半导体基板10.在本实施方式中,作为SOI基板的半导体基板10由支撑基板12,形成在支撑基板12上的层叠结构的绝缘层14构成, 以及形成在具有层状结构的绝缘层14上的硅层16。 半导体衬底10具有设置在硅层16中的电路形成区域A.绝缘区域18设置在半导体衬底10上。绝缘区域18设置成围绕电路形成区域A1的整个侧面。