公开(公告)号：US09847276B2

公开(公告)日：2017-12-19

申请号：US14463645

申请日：2014-08-19

申请人： Pil-Kyu Kang ,  Byung Lyul Park ,  SungHee Kang ,  Taeseong Kim ,  Taeyeong Kim ,  Kwangjin Moon ,  Jae-Hwa Park ,  Sukchul Bang ,  Seongmin Son ,  Jin Ho An ,  Ho-Jin Lee ,  Jeonggi Jin

发明人： Pil-Kyu Kang ,  Byung Lyul Park ,  SungHee Kang ,  Taeseong Kim ,  Taeyeong Kim ,  Kwangjin Moon ,  Jae-Hwa Park ,  Sukchul Bang ,  Seongmin Son ,  Jin Ho An ,  Ho-Jin Lee ,  Jeonggi Jin

IPC分类号： H01L29/40 ,  H01L23/48 ,  H01L21/768

CPC分类号： H01L23/481 ,  H01L21/7682 ,  H01L21/76831 ,  H01L21/76898 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device includes a semiconductor substrate having a top surface and a bottom surface facing each other, an interlayer dielectric layer provided on the top surface of the semiconductor substrate and including an integrated circuit, an inter-metal dielectric layer provided on the interlayer dielectric layer and including at least one metal interconnection electrically connected to the integrated circuit, an upper dielectric layer disposed on the inter-metal dielectric layer, a through-electrode penetrating the inter-metal dielectric layer, the interlayer dielectric layer, and the semiconductor substrate, a via-dielectric layer surrounding the through-electrode and electrically insulating the through-electrode from the semiconductor substrate. The via-dielectric layer includes one or more air-gaps between the upper dielectric layer and the interlayer dielectric layer.

公开(公告)号：US20170110445A1

公开(公告)日：2017-04-20

申请号：US15391424

申请日：2016-12-27

申请人： PIL-KYU KANG ,  Byung Lyul Park ,  Taeyeong Kim ,  Yeun-Sang Park ,  Dosun Lee ,  Ho-Jin Lee ,  Jinho Chun ,  JU-IL CHOI ,  Yi Koan Hong

发明人： PIL-KYU KANG ,  Byung Lyul Park ,  Taeyeong Kim ,  Yeun-Sang Park ,  Dosun Lee ,  Ho-Jin Lee ,  Jinho Chun ,  JU-IL CHOI ,  Yi Koan Hong

IPC分类号： H01L25/00 ,  H01L21/304 ,  H01L23/48 ,  H01L25/065 ,  H01L21/66 ,  H01L21/768 ,  H01L23/00

CPC分类号： H01L25/50 ,  H01L21/304 ,  H01L21/561 ,  H01L21/76898 ,  H01L22/32 ,  H01L23/3128 ,  H01L23/481 ,  H01L24/03 ,  H01L24/05 ,  H01L24/06 ,  H01L24/08 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/92 ,  H01L24/94 ,  H01L25/0657 ,  H01L25/18 ,  H01L2224/0401 ,  H01L2224/05568 ,  H01L2224/0557 ,  H01L2224/05573 ,  H01L2224/05624 ,  H01L2224/05647 ,  H01L2224/06181 ,  H01L2224/08146 ,  H01L2224/131 ,  H01L2224/13124 ,  H01L2224/13147 ,  H01L2224/16145 ,  H01L2224/16146 ,  H01L2224/16225 ,  H01L2224/81191 ,  H01L2224/81193 ,  H01L2224/9202 ,  H01L2224/94 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06558 ,  H01L2225/06565 ,  H01L2225/06596 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/1431 ,  H01L2924/1434 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2224/81 ,  H01L2224/11 ,  H01L2224/03 ,  H01L2924/00014 ,  H01L2924/014

摘要： A semiconductor device having a chip stack and an interconnection terminal is provided. The chip stack includes a first semiconductor chip, a second semiconductor chip and a third semiconductor chip stacked on each other. The interconnection terminal is electrically coupled to the chip stack. The first semiconductor chip includes a first front surface and a first backside surface. The second semiconductor chip includes a second front surface, a second backside surface, a second circuit layer and a through-electrode which is electrically coupled to the second circuit layer and penetrates the second semiconductor chip. The third semiconductor chip includes a third front surface, a third backside surface opposite to the third front surface and a third circuit layer adjacent to the third front surface. The first front surface and the second front surface face each other. The third front surface and the second backside surface face each other.

公开(公告)号：US09852965B2

公开(公告)日：2017-12-26

申请号：US15204632

申请日：2016-07-07

申请人： Ho-Jin Lee ,  Byung Lyul Park ,  Kwangjin Moon ,  Jisoon Park ,  Jin Ho An

发明人： Ho-Jin Lee ,  Byung Lyul Park ,  Kwangjin Moon ,  Jisoon Park ,  Jin Ho An

IPC分类号： H01L23/48 ,  H01L21/768

CPC分类号： H01L23/481 ,  H01L21/76898 ,  H01L2224/11 ,  H01L2224/16145 ,  H01L2924/181 ,  H01L2924/00012

摘要： Provided herein are semiconductor devices with through electrodes and methods of fabricating the same. The methods may include providing a semiconductor substrate having top and bottom surfaces facing each other, forming on the top surface of the semiconductor substrate a main via having a hollow cylindrical structure and a metal line connected to the main via, forming an interlayered insulating layer on the top surface of the semiconductor substrate to cover the main via and the metal line, removing a portion of the semiconductor substrate to form a via hole exposing a portion of a bottom surface of the main via, and forming in the via hole a through electrode that is electrically connected to the main via. The bottom surface of the main via is overlapped by a circumference of the via hole, when viewed in a plan view.

公开(公告)号：US20170047270A1

公开(公告)日：2017-02-16

申请号：US15204632

申请日：2016-07-07

申请人： Ho-Jin Lee ,  Byung Lyul Park ,  Kwangjin Moon ,  Jisoon Park ,  Jin Ho An

发明人： Ho-Jin Lee ,  Byung Lyul Park ,  Kwangjin Moon ,  Jisoon Park ,  Jin Ho An

IPC分类号： H01L23/48 ,  H01L21/768

CPC分类号： H01L23/481 ,  H01L21/76898 ,  H01L2224/11 ,  H01L2224/16145 ,  H01L2924/181 ,  H01L2924/00012

摘要： Provided herein are semiconductor devices with through electrodes and methods of fabricating the same. The methods may include providing a semiconductor substrate having top and bottom surfaces facing each other, forming on the top surface of the semiconductor substrate a main via having a hollow cylindrical structure and a metal line connected to the main via, forming an interlayered insulating layer on the top surface of the semiconductor substrate to cover the main via and the metal line, removing a portion of the semiconductor substrate to form a via hole exposing a portion of a bottom surface of the main via, and forming in the via hole a through electrode that is electrically connected to the main via. The bottom surface of the main via is overlapped by a circumference of the via hole, when viewed in a plan view.

摘要翻译： 本文提供了具有通孔电极的半导体器件及其制造方法。 所述方法可以包括提供具有彼此面对的顶表面和底表面的半导体衬底，在半导体衬底的顶表面上形成具有中空圆柱形结构的主通孔和连接到主通路的金属线，在其上形成层间绝缘层 半导体衬底的顶表面覆盖主通孔和金属线，去除半导体衬底的一部分以形成露出主通孔的底表面的一部分的通孔，并且在通孔中形成通孔 电连接到主通路。 当在平面图中观察时，主通孔的底表面与通孔的圆周重叠。

公开(公告)号：US09171753B2

公开(公告)日：2015-10-27

申请号：US13758239

申请日：2013-02-04

申请人： Ho-Jin Lee ,  Kyu-ha Lee ,  Gilheyun Choi ,  YongSoon Choi ,  Pil-Kyu Kang ,  Byung-Lyul Park ,  Hyunsoo Chung

发明人： Ho-Jin Lee ,  Kyu-ha Lee ,  Gilheyun Choi ,  YongSoon Choi ,  Pil-Kyu Kang ,  Byung-Lyul Park ,  Hyunsoo Chung

IPC分类号： H01L21/768 ,  H01L23/00 ,  H01L23/48 ,  H01L21/02 ,  H01L25/065 ,  H01L23/31 ,  H01L21/683

CPC分类号： H01L21/768 ,  H01L21/02271 ,  H01L21/6836 ,  H01L21/76898 ,  H01L23/3192 ,  H01L23/481 ,  H01L24/03 ,  H01L24/05 ,  H01L24/06 ,  H01L24/13 ,  H01L25/0657 ,  H01L2221/68372 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/05009 ,  H01L2224/05027 ,  H01L2224/05548 ,  H01L2224/05567 ,  H01L2224/05568 ,  H01L2224/0557 ,  H01L2224/05571 ,  H01L2224/06181 ,  H01L2224/13006 ,  H01L2224/13009 ,  H01L2224/13022 ,  H01L2224/13023 ,  H01L2224/13025 ,  H01L2224/13076 ,  H01L2224/13082 ,  H01L2224/131 ,  H01L2224/14181 ,  H01L2224/16146 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06548 ,  H01L2225/06565 ,  H01L2924/00014 ,  H01L2924/181 ,  H01L2924/351 ,  H01L2924/00012 ,  H01L2924/014 ,  H01L2224/05552 ,  H01L2924/00

摘要： In one embodiment, the method includes forming a conductive via structure in a base layer. The base layer has a first surface and a second surface, and the second surface is opposite the first surface. The method further includes removing the second surface of the base layer to expose the conductive via structure such that the conductive via structure protrudes from the second surface, and forming a first lower insulating layer over the second surface such that an end surface of the conductive via structure remains exposed by the first lower insulating layer.

摘要翻译： 在一个实施例中，该方法包括在基层中形成导电通孔结构。 基层具有第一表面和第二表面，并且第二表面与第一表面相对。 该方法还包括去除基底层的第二表面以暴露导电通路结构，使得导电通孔结构从第二表面突出，并且在第二表面上形成第一下绝缘层，使得导电通孔的端表面 结构保持由第一下绝缘层暴露。

公开(公告)号：US08952543B2

公开(公告)日：2015-02-10

申请号：US13718580

申请日：2012-12-18

申请人： Ho-Jin Lee ,  Pil-Kyu Kang ,  Kyu-Ha Lee ,  Byung-Lyul Park ,  Hyun-Soo Chung ,  Gil-Heyun Choi

发明人： Ho-Jin Lee ,  Pil-Kyu Kang ,  Kyu-Ha Lee ,  Byung-Lyul Park ,  Hyun-Soo Chung ,  Gil-Heyun Choi

IPC分类号： H01L23/48 ,  H01L21/768 ,  H01L23/00

CPC分类号： H01L23/481 ,  H01L21/76898 ,  H01L23/525 ,  H01L24/05 ,  H01L24/13 ,  H01L24/16 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/05 ,  H01L2224/05024 ,  H01L2224/05027 ,  H01L2224/05568 ,  H01L2224/06181 ,  H01L2224/13111 ,  H01L2224/13139 ,  H01L2224/13147 ,  H01L2224/16145 ,  H01L2924/00014 ,  H01L2924/13091 ,  H01L2924/00 ,  H01L2224/05552

摘要： A semiconductor device including a lower layer, an insulating layer on a first side of the lower layer, an interconnection structure in the insulating layer, a via structure in the lower layer. The via structure protrudes into the insulating layer and the interconnection structure.

摘要翻译： 一种半导体器件，包括下层，在下层的第一侧上的绝缘层，绝缘层中的互连结构，下层中的通孔结构。 通孔结构突出到绝缘层和互连结构中。

公开(公告)号：US08564139B2

公开(公告)日：2013-10-22

申请号：US13610068

申请日：2012-09-11

申请人： Ho-Jin Lee ,  Pil-Kyu Kang ,  Seokho Kim ,  Byung Lyul Park ,  Kyu-Ha Lee ,  Hyunsoo Chung ,  Gilheyun Choi

发明人： Ho-Jin Lee ,  Pil-Kyu Kang ,  Seokho Kim ,  Byung Lyul Park ,  Kyu-Ha Lee ,  Hyunsoo Chung ,  Gilheyun Choi

IPC分类号： H01L23/48

CPC分类号： H01L23/3192 ,  H01L23/3128 ,  H01L23/481 ,  H01L23/53238 ,  H01L23/53252 ,  H01L23/53266 ,  H01L24/03 ,  H01L24/05 ,  H01L24/13 ,  H01L25/0657 ,  H01L2224/02166 ,  H01L2224/0345 ,  H01L2224/03916 ,  H01L2224/0401 ,  H01L2224/05023 ,  H01L2224/05025 ,  H01L2224/05026 ,  H01L2224/05082 ,  H01L2224/05139 ,  H01L2224/05144 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05166 ,  H01L2224/05169 ,  H01L2224/05181 ,  H01L2224/05184 ,  H01L2224/05186 ,  H01L2224/05564 ,  H01L2224/05569 ,  H01L2224/05572 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/05684 ,  H01L2224/06181 ,  H01L2224/13023 ,  H01L2224/13099 ,  H01L2224/16147 ,  H01L2224/16148 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/17181 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06565 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/15311 ,  H01L2924/00012 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2224/05099 ,  H01L2224/05599 ,  H01L2224/05552

摘要： Provided are semiconductor devices and methods of manufacturing the same. the device may include a semiconductor substrate, a first conductive pattern provided in the semiconductor substrate to have a first width at a surface level of the semiconductor substrate, a barrier pattern covering the first conductive pattern and having a second width substantially greater than the first width, a second conductive pattern partially covering the barrier pattern and having a third width substantially smaller than the second width, and an insulating pattern disposed on a sidewall of the second conductive pattern. The second width may be substantially equal to or less than to a sum of the third width and a width of the insulating pattern.

摘要翻译： 提供半导体器件及其制造方法。 所述器件可以包括半导体衬底，设置在所述半导体衬底中以在所述半导体衬底的表面电平处具有第一宽度的第一导电图案，覆盖所述第一导电图案并具有基本上大于所述第一宽度的第二宽度的阻挡图案 ，部分地覆盖所述阻挡图案并且具有基本上小于所述第二宽度的第三宽度的第二导电图案，以及设置在所述第二导电图案的侧壁上的绝缘图案。 第二宽度可以基本上等于或小于绝缘图案的第三宽度和宽度之和。

公开(公告)号：US20130134603A1

公开(公告)日：2013-05-30

申请号：US13610068

申请日：2012-09-11

申请人： Ho-Jin Lee ,  Pil-Kyu Kang ,  Seokho Kim ,  Byung Lyul Park ,  Kyu-Ha Lee ,  Hyunsoo Chung ,  Gilheyun Choi

发明人： Ho-Jin Lee ,  Pil-Kyu Kang ,  Seokho Kim ,  Byung Lyul Park ,  Kyu-Ha Lee ,  Hyunsoo Chung ,  Gilheyun Choi

IPC分类号： H01L23/48

CPC分类号： H01L23/3192 ,  H01L23/3128 ,  H01L23/481 ,  H01L23/53238 ,  H01L23/53252 ,  H01L23/53266 ,  H01L24/03 ,  H01L24/05 ,  H01L24/13 ,  H01L25/0657 ,  H01L2224/02166 ,  H01L2224/0345 ,  H01L2224/03916 ,  H01L2224/0401 ,  H01L2224/05023 ,  H01L2224/05025 ,  H01L2224/05026 ,  H01L2224/05082 ,  H01L2224/05139 ,  H01L2224/05144 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05166 ,  H01L2224/05169 ,  H01L2224/05181 ,  H01L2224/05184 ,  H01L2224/05186 ,  H01L2224/05564 ,  H01L2224/05569 ,  H01L2224/05572 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/05684 ,  H01L2224/06181 ,  H01L2224/13023 ,  H01L2224/13099 ,  H01L2224/16147 ,  H01L2224/16148 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/17181 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06565 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/15311 ,  H01L2924/00012 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2224/05099 ,  H01L2224/05599 ,  H01L2224/05552

摘要： Provided are semiconductor devices and methods of manufacturing the same. the device may include a semiconductor substrate, a first conductive pattern provided in the semiconductor substrate to have a first width at a surface level of the semiconductor substrate, a barrier pattern covering the first conductive pattern and having a second width substantially greater than the first width, a second conductive pattern partially covering the barrier pattern and having a third width substantially smaller than the second width, and an insulating pattern disposed on a sidewall of the second conductive pattern. The second width may be substantially equal to or less than to a sum of the third width and a width of the insulating pattern.

摘要翻译： 提供半导体器件及其制造方法。 所述器件可以包括半导体衬底，设置在所述半导体衬底中以在所述半导体衬底的表面电平处具有第一宽度的第一导电图案，覆盖所述第一导电图案并具有基本上大于所述第一宽度的第二宽度的阻挡图案 ，部分地覆盖所述阻挡图案并且具有基本上小于所述第二宽度的第三宽度的第二导电图案，以及设置在所述第二导电图案的侧壁上的绝缘图案。 第二宽度可以基本上等于或小于绝缘图案的第三宽度和宽度之和。

公开(公告)号：US09859191B2

公开(公告)日：2018-01-02

申请号：US15065903

申请日：2016-03-10

申请人： Ho-Jin Lee ,  Byung Lyul Park ,  Jin Ho An

发明人： Ho-Jin Lee ,  Byung Lyul Park ,  Jin Ho An

IPC分类号： H01L23/48 ,  H01L21/768 ,  H01L23/538 ,  H01L23/31 ,  H01L23/532

CPC分类号： H01L23/481 ,  H01L21/76831 ,  H01L21/76898 ,  H01L23/3128 ,  H01L23/53238 ,  H01L23/5384 ,  H01L23/5385 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/00012

摘要： A semiconductor device includes a semiconductor substrate, a circuit layer including an interlayer insulating layer on an upper surface of the substrate, and a conductive via penetrating through the interlayer insulating layer and the substrate, and electrically connected to the circuit layer. The device further includes an insulating layer surrounding the conductive via, and located between the conductive via and the substrate and between the conductive via and interlayer insulating layer, and a buffer layer located between the insulating layer and the conductive via, and overlapping at least a portion of the interlayer insulating layer in a depth direction of the conductive via.

公开(公告)号：US09153489B2

公开(公告)日：2015-10-06

申请号：US13474992

申请日：2012-05-18

申请人： Ho-Jin Lee ,  Byung Lyul Park ,  SeYoung Jeong ,  Hyunsoo Chung ,  Gilheyun Choi

发明人： Ho-Jin Lee ,  Byung Lyul Park ,  SeYoung Jeong ,  Hyunsoo Chung ,  Gilheyun Choi

IPC分类号： H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H01L21/768

CPC分类号： H01L21/76898 ,  H01L21/7682 ,  H01L23/481 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/05 ,  H01L2224/05548 ,  H01L2224/06181 ,  H01L2224/13 ,  H01L2224/13023 ,  H01L2224/13024 ,  H01L2224/13025

摘要： A microelectronic device includes a substrate having a trench extending therethrough between an active surface thereof and an inactive surface thereof opposite the active surface, a conductive via electrode extending through the substrate between sidewalls of the trench, and an insulating layer extending along the inactive surface of the substrate outside the trench and extending at least partially into the trench. The insulating layer defines a gap region in the trench that separates the substrate and the via electrode. Related devices and methods of fabrication are also discussed.

摘要翻译： 微电子器件包括：衬底，其具有在其活性表面与其与有源表面相对的非活性表面之间延伸穿过的沟槽;在沟槽的侧壁之间延伸通过衬底的导电通孔电极，以及沿沟槽的非活性表面延伸的绝缘层 衬底在沟槽外部并且至少部分地延伸到沟槽中。 绝缘层限定沟槽中的间隙区域，其分离衬底和通孔电极。 还讨论了相关装置和制造方法。