公开(公告)号：US10181411B2

公开(公告)日：2019-01-15

申请号：US14950180

申请日：2015-11-24

Applicant: Invensas Corporation

Inventor： Michael Newman ,  Cyprian Uzoh ,  Charles G. Woychik ,  Pezhman Monadgemi ,  Terrence Caskey

IPC: H05K7/10 ,  H05K7/12 ,  H01L21/48 ,  H05K1/11 ,  H05K3/40 ,  H01L23/14 ,  H01L23/498 ,  H05K3/00

Abstract: An insulating second element is provided and overlies a surface of a first element which consists essentially of a material having a CTE of less than 10 ppm/° C. and has a first thickness in a first direction normal to the surface. Openings extend in the first direction through the second element. The first element is abraded to produce a thinned first element having a second thickness less than the first thickness. Conductive elements are formed at a first side of the interposer coincident with or adjacent to a surface of the thinned first element remote from the second element. A conductive structure extends through the openings in the second element, wherein the conductive elements are electrically connected with terminals of the interposer through the conductive structure, and the terminals are disposed at a second side of the interposer opposite from the first side.

公开(公告)号：US09685401B2

公开(公告)日：2017-06-20

申请号：US14815282

申请日：2015-07-31

Applicant: Invensas Corporation

Inventor： Cyprian Emeka Uzoh ,  Pezhman Monadgemi ,  Terrence Caskey ,  Fatima Lina Ayatollahi ,  Belgacem Haba ,  Charles G. Woychik ,  Michael Newman

IPC: H05K1/00 ,  H01L23/498 ,  H01L21/768 ,  H01L23/373 ,  H01L23/48 ,  H01L23/36 ,  H01L23/367

CPC classification number: H01L23/49827 ,  H01L21/76829 ,  H01L21/76898 ,  H01L23/36 ,  H01L23/367 ,  H01L23/3677 ,  H01L23/3736 ,  H01L23/481 ,  H01L23/49838 ,  H01L23/49866 ,  H01L2924/00 ,  H01L2924/0002

Abstract: An interconnect element includes a semiconductor or insulating material layer that has a first thickness and defines a first surface; a thermally conductive layer; a plurality of conductive elements; and a dielectric coating. The thermally conductive layer includes a second thickness of at least 10 microns and defines a second surface of the interconnect element. The plurality of conductive elements extend from the first surface of the interconnect element to the second surface of the interconnect element. The dielectric coating is between at least a portion of each conductive element and the thermally conductive layer.

公开(公告)号：US09398700B2

公开(公告)日：2016-07-19

申请号：US13924002

申请日：2013-06-21

Applicant: Invensas Corporation

Inventor： Cyprian Emeka Uzoh ,  Belgacem Haba ,  Charles G. Woychik ,  Michael Newman ,  Terrence Caskey

IPC: H05K3/30 ,  H05K1/18 ,  H01L23/00 ,  H01L25/065 ,  H01L25/00 ,  H01L21/56

CPC classification number: H01L24/13 ,  H01L21/563 ,  H01L23/564 ,  H01L24/02 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/14 ,  H01L24/16 ,  H01L24/17 ,  H01L24/32 ,  H01L24/81 ,  H01L24/83 ,  H01L24/92 ,  H01L25/0652 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/02372 ,  H01L2224/0345 ,  H01L2224/03462 ,  H01L2224/03464 ,  H01L2224/0347 ,  H01L2224/03912 ,  H01L2224/03914 ,  H01L2224/0401 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05557 ,  H01L2224/05568 ,  H01L2224/05571 ,  H01L2224/05609 ,  H01L2224/05611 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05657 ,  H01L2224/05664 ,  H01L2224/10145 ,  H01L2224/1146 ,  H01L2224/11462 ,  H01L2224/11464 ,  H01L2224/1147 ,  H01L2224/11903 ,  H01L2224/13024 ,  H01L2224/13025 ,  H01L2224/13109 ,  H01L2224/13111 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13157 ,  H01L2224/13164 ,  H01L2224/1319 ,  H01L2224/14517 ,  H01L2224/1601 ,  H01L2224/16057 ,  H01L2224/16058 ,  H01L2224/16104 ,  H01L2224/16105 ,  H01L2224/16145 ,  H01L2224/16146 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/16503 ,  H01L2224/17505 ,  H01L2224/17517 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/81001 ,  H01L2224/81007 ,  H01L2224/811 ,  H01L2224/81139 ,  H01L2224/8192 ,  H01L2224/83104 ,  H01L2224/9201 ,  H01L2224/9212 ,  H01L2225/06513 ,  H01L2225/06524 ,  H01L2225/06541 ,  H01L2924/00014 ,  H05K1/181 ,  H05K3/30 ,  Y10T29/4913 ,  H01L2924/00012 ,  H01L2924/01015 ,  H01L2924/01074 ,  H01L2224/05552

Abstract: Microelectronic assemblies and methods for making the same are disclosed herein. In one embodiment, a method of forming a microelectronic assembly comprises assembling first and second components to have first major surfaces of the first and second components facing one another and spaced apart from one another by a predetermined spacing, the first component having first and second oppositely-facing major surfaces, a first thickness extending in a first direction between the first and second major surfaces, and a plurality of first metal connection elements at the first major surface, the second component having a plurality of second metal connection elements at the first major surface of the second component; and plating a plurality of metal connector regions each connecting and extending continuously between a respective first connection element and a corresponding second connection element opposite the respective first connection element in the first direction.

Abstract translation: 本文公开了微电子组件及其制造方法。 在一个实施例中，形成微电子组件的方法包括组装第一和第二部件以使第一和第二部件的第一主表面彼此面对并且彼此隔开预定间隔，第一部件具有第一和第二相对 主表面，在第一和第二主表面之间沿第一方向延伸的第一厚度和在第一主表面处的多个第一金属连接元件，第二部件在第一主要部分具有多个第二金属连接元件 第二部件的表面; 以及电镀多个金属连接器区域，每个金属连接器区域在第一方向上在相应的第一连接元件和与相应的第一连接元件相对的相应的第二连接元件之间连续延伸。

公开(公告)号：US09355905B2

公开(公告)日：2016-05-31

申请号：US14722672

申请日：2015-05-27

Applicant: Invensas Corporation

Inventor： Cyprian Emeka Uzoh ,  Pezhman Monadgemi ,  Michael Newman ,  Charles G. Woychik ,  Terrence Caskey

IPC: H01L21/768 ,  H01L21/78 ,  H01L21/56 ,  H01L23/48 ,  H01L21/3105 ,  H01L21/683 ,  H01L23/00

CPC classification number: H01L21/76898 ,  H01L21/31053 ,  H01L21/561 ,  H01L21/6835 ,  H01L21/768 ,  H01L21/76841 ,  H01L21/76877 ,  H01L21/78 ,  H01L23/481 ,  H01L24/94 ,  H01L2221/68327 ,  H01L2221/68381 ,  H01L2924/0002 ,  H01L2924/12042 ,  H01L2924/00

Abstract: Methods of forming a microelectronic assembly and the resulting structures and devices are disclosed herein. In one embodiment, a method of forming a microelectronic assembly includes removing material exposed at portions of a surface of a substrate to form a processed substrate having a plurality of thinned portions separated by integral supporting portions of the processed substrate having a thickness greater than a thickness of the thinned portions, at least some of the thinned portions including a plurality of electrically conductive interconnects extending in a direction of the thicknesses of the thinned portions and exposed at the surface; and removing the supporting portions of the substrate to sever the substrate into a plurality of individual thinned portions, at least some individual thinned portions including the interconnects.

公开(公告)号：US09237648B2

公开(公告)日：2016-01-12

申请号：US13776035

申请日：2013-02-25

Applicant: Invensas Corporation

Inventor： Michael Newman ,  Cyprian Emeka Uzoh ,  Charles G. Woychik ,  Pezhman Monadgemi ,  Terrence Caskey

IPC: H05K7/10 ,  H05K7/12 ,  H05K1/11 ,  H05K3/40 ,  H01L23/14 ,  H01L23/498 ,  H01L21/48

CPC classification number: H01L21/486 ,  H01L23/147 ,  H01L23/49827 ,  H01L2224/13 ,  H01L2224/16225 ,  H05K1/111 ,  H05K3/0014 ,  H05K3/4038 ,  Y10T29/49117

Abstract: An interposer has conductive elements at a first side and terminals at a second side opposite therefrom, for connecting with a microelectronic element and a second component, respectively. The component includes a first element having a thermal expansion coefficient less than 10 ppm/° C., and an insulating second element, with a plurality of openings extending from the second side through the second element towards the first element. A conductive structure extending through the openings in the second element and through the first element electrically connects the terminals with the conductive elements.

Abstract translation: 插入件在第一侧具有导电元件，在与其相对的第二侧具有端子，用于分别与微电子元件和第二元件连接。 该组件包括具有小于10ppm /℃的热膨胀系数的第一元件和绝缘的第二元件，多个开口从第二侧延伸穿过第二元件朝向第一元件。 延伸穿过第二元件中的开口并通过第一元件的导电结构将端子与导电元件电连接。

公开(公告)号：US20150155230A1

公开(公告)日：2015-06-04

申请号：US14096387

申请日：2013-12-04

Applicant: Invensas Corporation

Inventor： Andrew Cao ,  Michael Newman

IPC: H01L23/498 ,  H01L21/48

CPC classification number: H01L21/4853 ,  H01L21/486 ,  H01L23/13 ,  H01L23/147 ,  H01L23/49811 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/562 ,  H01L24/02 ,  H01L24/05 ,  H01L24/13 ,  H01L24/16 ,  H01L24/17 ,  H01L24/48 ,  H01L25/0657 ,  H01L25/16 ,  H01L2224/0231 ,  H01L2224/0237 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/05569 ,  H01L2224/05624 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05664 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2224/13109 ,  H01L2224/13111 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/17181 ,  H01L2224/48145 ,  H01L2224/48227 ,  H01L2224/73257 ,  H01L2224/81424 ,  H01L2224/81447 ,  H01L2224/81455 ,  H01L2224/81464 ,  H01L2924/00014 ,  H01L2924/12042 ,  H01L2924/00 ,  H01L2924/014 ,  H01L2224/45099 ,  H01L2924/00012

Abstract: A component, e.g., interposer has first and second opposite sides, conductive elements at the first side and terminals at the second side. The terminals can connect with another component, for example. A first element at the first side can comprise a first material having a thermal expansion coefficient less than 10 ppm/° C., and a second element at the second side can comprise a plurality of insulated structures separated from one another by at least one gap. Conductive structure extends through at least one insulated structure and is electrically coupled with the terminals and the conductive elements. The at least one gap can reduce mechanical stress in connections between the terminals and another component.

Abstract translation: 诸如插入件的部件具有第一和第二相对侧，第一侧的导电元件和第二侧的端子。 终端可以连接另一个组件，例如。 第一侧的第一元件可以包括具有小于10ppm /℃的热膨胀系数的第一材料，并且第二侧的第二元件可以包括通过至少一个间隙彼此分离的多个绝缘结构 。 导电结构延伸穿过至少一个绝缘结构，并与端子和导电元件电耦合。 所述至少一个间隙可以减小端子与另一部件之间的连接中的机械应力。

公开(公告)号：US20150044820A1

公开(公告)日：2015-02-12

申请号：US14524280

申请日：2014-10-27

Applicant: Invensas Corporation

Inventor： Charles G. Woychik ,  Cyprian Emeka Uzoh ,  Michael Newman ,  Terrence Caskey

IPC: H01L21/48 ,  H01L23/31 ,  H01L23/00 ,  H01L21/56

CPC classification number: H01L27/14634 ,  H01L21/4846 ,  H01L21/4853 ,  H01L21/4857 ,  H01L21/486 ,  H01L21/56 ,  H01L21/561 ,  H01L21/563 ,  H01L21/6835 ,  H01L23/3128 ,  H01L23/3135 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/49827 ,  H01L23/5384 ,  H01L24/11 ,  H01L24/16 ,  H01L24/17 ,  H01L24/80 ,  H01L24/81 ,  H01L24/97 ,  H01L27/14618 ,  H01L27/14636 ,  H01L27/1469 ,  H01L2221/68345 ,  H01L2221/68359 ,  H01L2221/68377 ,  H01L2221/68381 ,  H01L2224/13 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/81191 ,  H01L2224/81801 ,  H01L2224/97 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/15311 ,  H01L2924/15788 ,  H01L2924/351 ,  H05K1/0298 ,  H01L2224/81 ,  H01L2924/00

Abstract: A microelectronic assembly including a dielectric region, a plurality of electrically conductive elements, an encapsulant, and a microelectronic element are provided. The encapsulant may have a coefficient of thermal expansion (CTE) no greater than twice a CTE associated with at least one of the dielectric region or the microelectronic element.

Abstract translation: 提供了包括电介质区域，多个导电元件，密封剂和微电子元件的微电子组件。 密封剂可以具有不大于与电介质区域或微电子元件中的至少一个相关联的CTE的两倍的热膨胀系数（CTE）。

公开(公告)号：US08884427B2

公开(公告)日：2014-11-11

申请号：US13828938

申请日：2013-03-14

Applicant: Invensas Corporation

Inventor： Charles G. Woychik ,  Cyprian Emeka Uzoh ,  Michael Newman ,  Terrence Caskey

IPC: H01L23/34 ,  H01L23/495 ,  H01L21/58 ,  H05K1/02

CPC classification number: H01L27/14634 ,  H01L21/4846 ,  H01L21/4853 ,  H01L21/4857 ,  H01L21/486 ,  H01L21/56 ,  H01L21/561 ,  H01L21/563 ,  H01L21/6835 ,  H01L23/3128 ,  H01L23/3135 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/49827 ,  H01L23/5384 ,  H01L24/11 ,  H01L24/16 ,  H01L24/17 ,  H01L24/80 ,  H01L24/81 ,  H01L24/97 ,  H01L27/14618 ,  H01L27/14636 ,  H01L27/1469 ,  H01L2221/68345 ,  H01L2221/68359 ,  H01L2221/68377 ,  H01L2221/68381 ,  H01L2224/13 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/81191 ,  H01L2224/81801 ,  H01L2224/97 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/15311 ,  H01L2924/15788 ,  H01L2924/351 ,  H05K1/0298 ,  H01L2224/81 ,  H01L2924/00

Abstract: A microelectronic assembly including a dielectric region, a plurality of electrically conductive elements, an encapsulant, and a microelectronic element are provided. The encapsulant may have a coefficient of thermal expansion (CTE) no greater than twice a CTE associated with at least one of the dielectric region or the microelectronic element.

Abstract translation: 提供了包括电介质区域，多个导电元件，密封剂和微电子元件的微电子组件。 密封剂可以具有不超过与电介质区域或微电子元件中的至少一个相关联的CTE的两倍的热膨胀系数（CTE）。

公开(公告)号：US20140175654A1

公开(公告)日：2014-06-26

申请号：US13722365

申请日：2012-12-20

Applicant: INVENSAS CORPORATION

Inventor： Belgacem Haba ,  Fatima Lina Ayatollahi ,  Michael Newman ,  Pezhman Monadgemi

IPC: H01L23/48 ,  H01L21/768

CPC classification number: H01L23/481 ,  H01L21/76898 ,  H01L23/50 ,  H01L23/5226 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Microelectronic elements and methods of their manufacture are disclosed. A microelectronic element may include a substrate including an opening extending through a semiconductor region of the substrate, a dielectric layer cover a wall of the opening within at least a first portion of the opening, a first metal disposed within the first portion of the opening, a second metal disposed within a second portion of the opening. The second metal may form at least part of a contact of the microelectronic element.

Abstract translation: 公开了微电子元件及其制造方法。 微电子元件可以包括：衬底，其包括延伸穿过衬底的半导体区域的开口;电介质层覆盖开口的至少第一部分内的开口的壁;布置在开口的第一部分内的第一金属， 设置在开口的第二部分内的第二金属。 第二金属可以形成微电子元件的接触的至少一部分。

公开(公告)号：US10403510B2

公开(公告)日：2019-09-03

申请号：US15626577

申请日：2017-06-19

Applicant: Invensas Corporation

Inventor： Andrew Cao ,  Michael Newman

IPC: H01L21/00 ,  H01L21/48 ,  H01L23/498 ,  H01L23/00 ,  H01L25/065 ,  H01L25/16 ,  H01L23/14 ,  H01L23/13

Abstract: A component, e.g., interposer has first and second opposite sides, conductive elements at the first side and terminals at the second side. The terminals can connect with another component, for example. A first element at the first side can comprise a first material having a thermal expansion coefficient less than 10 ppm/° C., and a second element at the second side can comprise a plurality of insulated structures separated from one another by at least one gap. Conductive structure extends through at least one insulated structure and is electrically coupled with the terminals and the conductive elements. The at least one gap can reduce mechanical stress in connections between the terminals and another component.