HIGH DENSITY THREE-DIMENSIONAL INTEGRATED CAPACITORS
    3.
    发明申请
    HIGH DENSITY THREE-DIMENSIONAL INTEGRATED CAPACITORS 有权
    高密度三维集成电容器

    公开(公告)号:US20120181658A1

    公开(公告)日:2012-07-19

    申请号:US13182890

    申请日:2011-07-14

    IPC分类号: H01L29/92 H01L21/02

    摘要: A capacitor can include a substrate having a first surface, a second surface remote from the first surface, and a through opening extending between the first and second surfaces, first and second metal elements, and a capacitor dielectric layer separating and insulating the first and second metal elements from one another at least within the through opening. The first metal element can be exposed at the first surface and can extend into the through opening. The second metal element can be exposed at the second surface and can extend into the through opening. The first and second metal elements can be electrically connectable to first and second electric potentials. The capacitor dielectric layer can have an undulating shape.

    摘要翻译: 电容器可以包括具有第一表面的基板,远离第一表面的第二表面,以及在第一和第二表面之间延伸的通孔,第一和第二金属元件以及将第一和第二表面分离和绝缘的电容器介电层 至少在通孔内的金属元​​件彼此之间。 第一金属元件可以在第一表面暴露并且可以延伸到通孔中。 第二金属元件可以在第二表面处露出并且可以延伸到通孔中。 第一和第二金属元件可以电连接到第一和第二电位。 电容器介电层可以具有起伏的形状。

    BSI image sensor package with variable-height silicon for even reception of different wavelengths
    5.
    发明授权
    BSI image sensor package with variable-height silicon for even reception of different wavelengths 有权
    BSI图像传感器封装,具有可变高度的硅,用于均匀接收不同的波长

    公开(公告)号:US08937361B2

    公开(公告)日:2015-01-20

    申请号:US13114243

    申请日:2011-05-24

    IPC分类号: H01L31/0232 H01L27/146

    摘要: A microelectronic image sensor assembly for backside illumination and method of making same are provided. The assembly includes a microelectronic element having contacts exposed at a front face and light sensing elements arranged to receive light of different wavelengths through a rear face. A semiconductor region has a first thickness between the first light sensing element and the rear face and a second thickness between the second light sensing element and the rear face such that the first and second light sensing elements receive light of substantially the same intensity. A dielectric region is provided at least substantially filling a space of the semiconductor region adjacent at least one of the light sensing elements. The dielectric region may include at least one light guide.

    摘要翻译: 提供了一种用于背面照明的微电子图像传感器组件及其制造方法。 该组件包括具有在正面暴露的触点的微电子元件和被布置成通过后表面接收不同波长的光的光感测元件。 半导体区域在第一光感测元件和后表面之间具有第一厚度,并且在第二光感测元件和后表面之间具有第二厚度,使得第一和第二光感测元件接收基本上相同强度的光。 提供至少基本上填充与至少一个光感测元件相邻的半导体区域的空间的电介质区域。 电介质区域可以包括至少一个光导。

    Dual wafer spin coating
    8.
    发明授权
    Dual wafer spin coating 有权
    双晶圆片旋涂

    公开(公告)号:US08512491B2

    公开(公告)日:2013-08-20

    申请号:US12974611

    申请日:2010-12-21

    IPC分类号: B32B41/00

    CPC分类号: H01L22/12 H01L21/67092

    摘要: A method of bonding a first substrate and a second substrate includes the steps of rotating first substrate with an adhesive mass thereon, and second substrate contacting the mass and overlying the first substrate, controlling a vertical height of a heated control platen spaced apart from and not contacting the second substrate so as to control a temperature of the adhesive mass, so as to at least one of bond the first and second substrates in alignment with one another, or achieve a sufficiently planar adhesive interface between the first and second substrates.

    摘要翻译: 接合第一基板和第二基板的方法包括以下步骤:使第一基板与其上的粘合剂质量物质旋转,第二基板接触物料并覆盖第一基板,控制加热的控制台板的垂直高度, 使所述第二基板接触以控制所述粘合剂物料的温度,以便使所述第一和第二基板彼此对准的至少一个接合,或在所述第一和第二基板之间实现足够平坦的粘合界面。