Apparatus and methods for determining floating body effects in SOI devices
    1.
    发明授权
    Apparatus and methods for determining floating body effects in SOI devices 失效
    用于确定SOI器件中的浮体效应的装置和方法

    公开(公告)号:US06777708B1

    公开(公告)日:2004-08-17

    申请号:US10342541

    申请日:2003-01-15

    CPC classification number: H01L22/34 G01R31/2882 G01R31/3016

    Abstract: Methods and systems are described for determining floating body delay effects in an SOI wafer, wherein test apparatus is provided in a wafer comprising a plurality of floating body devices fabricated in series in the wafer, and a pulse generation circuit providing a pulse output corresponding to a delay time associated with the floating body chain according to an input pulse edge and a propagated pulse edge from the floating body devices.

    Abstract translation: 描述了用于确定SOI晶片中的浮体延迟效应的方法和系统,其中测试装置设置在包括在晶片中串联制造的多个浮体装置的晶片中,以及脉冲产生电路,其提供对应于 根据输入脉冲边缘和浮体装置的传播脉冲边缘与浮体链相关联的延迟时间。

    Apparatus and methods for characterizing floating body effects in SOI devices
    2.
    发明授权
    Apparatus and methods for characterizing floating body effects in SOI devices 失效
    用于表征SOI器件中浮体效应的装置和方法

    公开(公告)号:US06774395B1

    公开(公告)日:2004-08-10

    申请号:US10345007

    申请日:2003-01-15

    CPC classification number: H01L22/34

    Abstract: Methods are described for characterizing floating body delay effects in SOI wafers comprising providing a pulse edge to a floating body and a tied body chain in the wafer, storing tied body chain data according to one or more of the floating body devices, and characterizing the floating body delay effects according to the stored tied body chain data. Test apparatus are also described comprising a floating body chain including a plurality of series connected floating body inverters or NAND gates fabricated in the wafer and a tied body chain comprising a plurality of series connected tied body devices to in the wafer. Storage devices are coupled with the tied body devices and with one or more of the floating body devices and operate to store tied body chain data from the tied body devices according to one or more signals from floating body chain.

    Abstract translation: 描述了用于表征SOI晶片中的浮体延迟效应的方法,包括向晶片中的浮体和绑定的主体链提供脉冲边缘,根据一个或多个浮体装置存储绑定的身体链数据,并表征浮动 根据存储的绑定的身体链数据的身体延迟效应。 还描述了测试装置,其包括浮体体链,其包括在晶片中制造的多个串联连接的浮体反相器或NAND门,以及包括多个串联连接的绑定体装置的晶片的绑定体链。 存储装置与绑定的身体装置和一个或多个浮体装置相耦合,并根据来自浮体的一个或多个信号,操作以从捆绑的身体装置中存储绑定的身体链数据。

    Low temperature method for metal deposition
    3.
    发明授权
    Low temperature method for metal deposition 有权
    金属沉积低温法

    公开(公告)号:US07176081B2

    公开(公告)日:2007-02-13

    申请号:US10851044

    申请日:2004-05-20

    CPC classification number: H01L21/2855 H01L21/32051 H01L28/60

    Abstract: A novel, low-temperature metal deposition method which is suitable for depositing a metal film on a substrate, such as in the fabrication of metal-insulator-metal (MIM) capacitors, is disclosed. The method includes depositing a metal film on a substrate using a deposition temperature of less than typically about 270 degrees C. The resulting metal film is characterized by enhanced thickness uniformity and reduced grain agglomeration which otherwise tends to reduce the operational integrity of a capacitor or other device of which the metal film is a part. Furthermore, the metal film is characterized by intrinsic breakdown voltage (Vbd) improvement.

    Abstract translation: 公开了一种适用于在金属 - 绝缘体 - 金属(MIM)电容器的制造中在基底上沉积金属膜的新颖的低温金属沉积方法。 该方法包括使用小于一般约270℃的沉积温度在基板上沉积金属膜。所得到的金属膜的特征在于增强的厚度均匀性和减小的晶粒聚集,否则倾向于降低电容器或其它的操作完整性 金属膜是其一部分的装置。 此外,金属膜的特征在于本征击穿电压(V BAT)改善。

    Stable plating performance in copper electrochemical plating
    5.
    发明授权
    Stable plating performance in copper electrochemical plating 有权
    铜电化学电镀中电镀性能稳定

    公开(公告)号:US06638409B1

    公开(公告)日:2003-10-28

    申请号:US10152471

    申请日:2002-05-21

    CPC classification number: C25D21/06 C25D21/12 C25D21/18

    Abstract: A real-time and in-line process control system maintains stable plating performance in copper electrochemical plating IC devices by using a real time, on-line programmable controller. Two or more valves to direct the flow of the electrolyte from the electroplating cell back to the reservoir connect an alternative carbon-filter as well as a mirco-filter. The programmable controller controls the operation of at least two in-line valves to direct the flow of the electrolyte within the system.

    Abstract translation: 实时和在线过程控制系统通过使用实时在线可编程控制器在铜电化学电镀IC器件中保持稳定的电镀性能。 两个或更多个阀将电解液从电镀池引导回储存器,连接另一个碳过滤器以及微过滤器。 可编程控制器控制至少两个直列阀的操作以引导系统内的电解质的流动。

    Multi-segment rotation robotic arm
    10.
    发明授权

    公开(公告)号:US11857282B2

    公开(公告)日:2024-01-02

    申请号:US17321552

    申请日:2021-05-17

    Abstract: Provided is a multi-segment rotation robotic arm which contains a plurality of concatenated robotic arm segments which can rotate 360 degrees along an adjacent oblique section thereof. Any one of the concatenated robotic arm segments of the multi-segment rotation robotic arm can be arbitrarily concatenate in accordance with use requirements. When the concatenated robotic arm segments rotate relatively, they can rotate 360 degrees without affecting the electric supply, and can also reduce the volume increase by rotated joints. Therefore, the multi-segment rotation robotic arm of the present invention can effectively adapt to complex and tortuous spaces in the body cavity to reduce the possibility of expanding the opening of the minimally invasive surgery and causing damage to organs or tissues in the body cavity.

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