Charged particle measuring device and measuring method thereof
    2.
    发明授权
    Charged particle measuring device and measuring method thereof 有权
    带电粒子测量装置及其测量方法

    公开(公告)号:US06639392B2

    公开(公告)日:2003-10-28

    申请号:US10084068

    申请日:2002-02-28

    IPC分类号: G01N2700

    CPC分类号: G01T1/24

    摘要: A highly sensitive charged particle measuring device capable of measuring low-level alpha rays comprises in a measurement chamber 7 provided with a sealable door 15, a test sample 2 and a semiconductor detector 1, a radiation measuring circuit 30 including a preamplifier 30c connected to the semiconductor detector 1, a linear amplifier 30d, and a pulse height analyzer 30e, a charged particle emission amount arithmetic unit 40 for performing the quantitative analysis of charged particles from its measurement, a display unit for displaying its analysis result, and further has an evacuation pipe line and a pure gas supply pipe line for performing supply and replacement of the pure gas in the measuring chamber 7.

    摘要翻译: 能够测量低水平α射线的高灵敏度带电粒子测量装置包括设置有可密封门15的测量室7,测试样品2和半导体检测器1,辐射测量电路30,包括连接到 半导体检测器1,线性放大器30d和脉冲高度分析器30e,用于从其测量执行带电粒子的定量分析的带电粒子发射量运算单元40,用于显示其分析结果的显示单元,并且进一步具有撤离 管线和纯气体供给管线,用于在测量室7中进行纯气体的供给和更换。