公开(公告)号：US09453335B2

公开(公告)日：2016-09-27

申请号：US13439539

申请日：2012-04-04

申请人： Albert Visscher ,  Joseph Hubert Marie Guillaume Schroen

发明人： Albert Visscher ,  Joseph Hubert Marie Guillaume Schroen

IPC分类号： H04R1/02 ,  E04B1/82

CPC分类号： E04B1/8218 ,  E04B1/8209

摘要： The invention relates to an enclosure with a substantial rectangular configuration, adapted to contain an apparatus sensitive to acoustic vibrations, the enclosure comprising walls and acoustic damping material located within the wall, wherein the acoustic damping material comprises at least one absorbing body of acoustic energy absorbing material located adjacent to a rib of the enclosure. The acoustic vibrations most disturbing the processes in the apparatus within the enclosure are caused by standing acoustic waves within the enclosure with frequencies in the range between 50 Hz and 1000 Hz. These acoustic waves are efficiently damped by the provision of a block of acoustic absorbing material adjacent to one of the ribs of the enclosure, to such an extent that the need for thick walls of the enclosure is substantially obviated, leading to a less voluminous enclosure.

摘要翻译： 本发明涉及具有基本矩形构造的外壳，其适于容纳对声振动敏感的装置，所述外壳包括位于所述壁内的壁和声阻尼材料，其中所述声阻尼材料包括至少一个吸收能量吸收体 位于与外壳的肋相邻的材料。 外壳内的设备中最为干扰过程的声音振动是由外壳内的驻波声频引起的，频率范围在50Hz到1000Hz之间。 这些声波通过提供与外壳的一个肋相邻的吸声材料块被有效地阻尼，使得对外壳的厚壁的需要基本上被消除，导致较少体积的外壳。

公开(公告)号：US09443697B2

公开(公告)日：2016-09-13

申请号：US13717272

申请日：2012-12-17

申请人： FEI Company

发明人： Chad Rue

IPC分类号： C23C14/14 ,  H01J37/305 ,  C23C14/46 ,  C23F1/00 ,  C23F1/02 ,  C23C14/02 ,  H01L21/311

CPC分类号： H01J37/3053 ,  C23C14/022 ,  C23C14/46 ,  C23F1/00 ,  C23F1/02 ,  H01J2237/3174 ,  H01L21/31138

摘要： A carbonaceous material is removed using a low energy focused ion beam in the presence of an etch-assisting gas. Applicant has discovered that when the beam energy of the FIB is lowered, an etch-assisting gas, such as O2, greatly increases the etch rate. In one example, polyimide material etched using a Xe+ plasma FIB with a beam energy from 8 keV to 14 keV and O2 as an etch-assisting gas, the increase in etch rate can approach 30× as compared to the default mill rate.

摘要翻译： 在存在蚀刻辅助气体的情况下，使用低能量聚焦离子束去除碳质材料。 申请人已经发现，当FIB的光束能量降低时，诸如O 2的蚀刻辅助气体大大增加了蚀刻速率。 在一个示例中，使用具有8keV至14keV的束能量和作为蚀刻辅助气体的O 2的Xe +等离子体FIB蚀刻的聚酰亚胺材料，与默认磨机速率相比，蚀刻速率的增加可以接近30×。

公开(公告)号：US09443692B2

公开(公告)日：2016-09-13

申请号：US14803964

申请日：2015-07-20

申请人： FEI Company

发明人： Mostafa Maazouz

IPC分类号： H01J3/14 ,  H01J37/07 ,  H01J37/21 ,  H01J37/10 ,  H01J37/04 ,  H01J37/305 ,  H01J3/02 ,  H01J37/06 ,  H01J37/147 ,  H01J37/248

CPC分类号： H01J37/07 ,  H01J3/026 ,  H01J37/04 ,  H01J37/06 ,  H01J37/10 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/248 ,  H01J37/3056 ,  H01J37/3178 ,  H01J2237/0473 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/1518 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/31749

摘要： The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.

公开(公告)号：US09384982B2

公开(公告)日：2016-07-05

申请号：US14758043

申请日：2013-12-30

申请人： FEI Company

发明人： Sang Hoon Lee ,  Jeffrey Blackwood ,  Stacey Stone

IPC分类号： H01L21/76 ,  H01L21/31 ,  H01L21/469 ,  H01L21/26 ,  H01L21/02 ,  H01L21/285 ,  C23C16/04 ,  H01L21/768

CPC分类号： H01L21/2605 ,  C23C16/045 ,  C23C16/047 ,  H01L21/02115 ,  H01L21/02277 ,  H01L21/0243 ,  H01L21/0262 ,  H01L21/02636 ,  H01L21/28556 ,  H01L21/76879 ,  H01L21/76898

摘要： A method is provided, along with a corresponding apparatus, for filling a high aspect ratio hole without voids or for producing high aspect ratio structures without voids. A beam having a diameter smaller than the diameter of the hole is directed into the hole to induced deposition beginning in the center region of the hole bottom. After an elongated structure is formed in the hole by the beam-induced deposition, a beam can then be scanned in a pattern at least as large as the hole diameter to fill the remainder of the hole. The high aspect ratio hole can then be cross-sectioned using an ion beam for observation without creating artefacts. When electron-beam-induced deposition is used, the electrons preferably have a high energy to reach the bottom of the hole, and the beam has a low current, to reduce spurious deposition by beam tails.

摘要翻译： 提供了一种方法，连同相应的装置，用于填充没有空隙的高纵横比孔或用于产生没有空隙的高纵横比结构。 直径小于孔直径的梁被引导到孔中以在孔底的中心区域开始诱导沉积。 在通过光束沉积在孔中形成细长结构之后，可以以至少与孔直径一样大的图案扫描光束，以填充孔的其余部分。 然后可以使用离子束对高纵横比孔进行横截面观察而不产生伪影。 当使用电子束感应沉积时，电子优选具有高能量以到达孔的底部，并且光束具有低电流，以减少光束尾部的杂散沉积。

公开(公告)号：US09336985B2

公开(公告)日：2016-05-10

申请号：US14684825

申请日：2015-04-13

申请人： FEI Company

发明人： Jeffrey Blackwood ,  Stacey Stone

IPC分类号： H01J37/28 ,  H01J37/18 ,  H01J37/20 ,  H01J37/06 ,  G01N23/04 ,  G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  H01J37/305 ,  H01J37/26

CPC分类号： G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

摘要： An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

公开(公告)号：US08829470B2

公开(公告)日：2014-09-09

申请号：US14060170

申请日：2013-10-22

申请人： FEI Company

发明人： Lubomir T{dot over (u)}ma ,  Josef {hacek over (S)}esták

IPC分类号： G21K5/08 ,  H01J37/26 ,  H01J37/141 ,  H01J37/20

CPC分类号： G21K5/08 ,  H01J37/1413 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/2802 ,  H01J2237/2813

摘要： The invention relates to a charged-particle apparatus having a charged particle source with an optical axis; a magnetic immersion lens comprising a first lens pole and a configurable magnetic circuit; and a first sample stage movable with respect to the optical axis. The apparatus has a first configuration to position the sample, mounted on the first stage, with respect to the optical axis and a second configuration, having a second lens pole mounted on the first stage and intersecting the optical axis, equipped with a second sample stage to position the sample between the two lens poles and is movable with respect to the optical axis, causing the optical properties of the magnetic immersion lens to differ in the two configurations, and can, in the second configuration, be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

摘要翻译： 本发明涉及具有光轴的带电粒子源的带电粒子装置; 一种包含第一透镜柱和可配置磁路的磁浸透镜; 以及可相对于光轴移动的第一样品台。 该装置具有第一配置，用于相对于光轴定位安装在第一台上的样品，并且具有第二配置，其具有安装在第一台上并与光轴相交的第二透镜杆，该第二透镜杆装备有第二样品台 将样品定位在两个透镜杆之间并且可相对于光轴移动，导致两种结构中的浸没透镜的光学特性不同，并且可以在第二构造中通过将第二透镜 使用第一级，从而改变磁路。

公开(公告)号：US11382830B1

公开(公告)日：2022-07-12

申请号：US17230811

申请日：2021-04-14

申请人： Fred D. West

发明人： Fred D. West

IPC分类号： A61H39/08 ,  A61H39/00 ,  H01L21/02 ,  C23C14/08 ,  A61N1/375 ,  A61N1/36 ,  A61N1/05

摘要： Semiconductor electroacupuncture needles are disclosed, as well methods of making and using the semiconductor electroacupuncture needles. A controller for controlling the characteristics of the voltage applied to the needles and/or the current flowing through the needles is described. In some embodiments, a portion of the electro acupuncture needle is insulated to control the position below the skin at which the current enters the patient. In some embodiments, an LED on the needle lights when current above a threshold value is passing through the needle and into the patient.

公开(公告)号：US10531041B2

公开(公告)日：2020-01-07

申请号：US16174822

申请日：2018-10-30

申请人： Chris Talbot

发明人： Chris Talbot

IPC分类号： H04N7/14 ,  H04M3/42 ,  H04M3/436 ,  H04N7/15

摘要： Embodiments of the present invention are directed to a method and system for providing a visual indication that a video relay service (VRS) call originates from an inmate at a corrections facility, in which the method includes initiating a video relay service (VRS) call from a corrections facility between a called party and an inmate incarcerated at the corrections facility; and displaying a visual indication on a VRS client used by the called party, the visual indication including at least one of a visual indication that the VRS call is originating from a corrections facility, a visual indication that the VRS call is from an inmate incarcerated at a corrections facility, and a visual indication that the VRS call is being recorded.

公开(公告)号：US10222005B2

公开(公告)日：2019-03-05

申请号：US15219246

申请日：2016-07-25

申请人： Sidney Howard Norton ,  Curtis Alan Roys

发明人： Sidney Howard Norton ,  Curtis Alan Roys

IPC分类号： F21V21/00 ,  F21K9/27 ,  F21V23/00 ,  F21Y115/10 ,  F21V19/00 ,  F21V23/06 ,  F21Y107/30 ,  H01R33/08

摘要： End caps that attach to any standard tubing to facilitate mounting a tube with LEDs into an existing fluorescent lamp cabinet. The tube can be cut to a desired length. The end caps can be supported by the fluorescent fixtures or mounting brackets in the cabinet. An assembly comprising a light emitting diode (LED) lamp for replacing fluorescent tube lights.

公开(公告)号：US10215398B2

公开(公告)日：2019-02-26

申请号：US15444209

申请日：2017-02-27

申请人： Daniel R Higgins ,  Eugene Sullivan

发明人： Daniel R Higgins ,  Eugene Sullivan

IPC分类号： B01D45/12 ,  B01D53/24 ,  F22B31/00 ,  F23G5/32 ,  F23J15/02 ,  F23G5/04 ,  F23G5/24 ,  F23G5/30 ,  F23G5/44 ,  F23G5/46 ,  F22B21/34 ,  F22B21/36

摘要： A ground supported power boiler is described combining a refractory lined and insulated conical floor; an insulated cylindrical combustion chamber; a cylindrical furnace with water tube wall; a rectangular convective section; a single vertical steam drum; tangential injection of the fuel and combustion air; means for fluidizing the fuel bed; means for selectively stripping particulates from the flue gases; multi-stage particulate stripping and filtering from flue gases, means for using the walls of steam drum as steam/water droplet separator, means for recirculating and capturing heat from the flue gases; means for pressurizing the interior of the boiler above atmospheric pressure; means for heating and drying fuel prior to feeding the fuel to the boiler; means for creating hydrogen shift reaction; means for eliminating any need for sootblowing; and designed to not require the use of an induced draft fan.