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1.METHODS AND APPARATUSES FOR SHAPING AND LOOPING BONDING WIRES THAT SERVE AS STRETCHABLE AND BENDABLE INTERCONNECTS 审中-公开
Title translation: 形成可弯曲和可弯曲互连的成形和缠绕连接线的方法和装置公开(公告)号:WO2016048888A1
公开(公告)日:2016-03-31
申请号:PCT/US2015/051210
申请日:2015-09-21
Applicant: MC10, INC. , GARLOCK, David G. , LI, Xia , GUPTA, Sanja , DALAL, Mitul
Inventor: GARLOCK, David G. , LI, Xia , GUPTA, Sanja , DALAL, Mitul
IPC: H01L23/49
CPC classification number: H01L24/48 , G06K19/07779 , H01L24/45 , H01L24/78 , H01L24/85 , H01L2224/45118 , H01L2224/45139 , H01L2224/45144 , H01L2224/45147 , H01L2224/45155 , H01L2224/4516 , H01L2224/45164 , H01L2224/45166 , H01L2224/45169 , H01L2224/45171 , H01L2224/4809 , H01L2224/48092 , H01L2224/48137 , H01L2224/48463 , H01L2224/48511 , H01L2224/78252 , H01L2224/78301 , H01L2224/78349 , H01L2224/78611 , H01L2224/85207 , H01L2224/85947 , H01L2924/00014 , H01L2224/45015 , H01L2924/207 , H01L2224/05599 , H01L2224/85399
Abstract: A capillary tool for use in feeding, bending, and attaching a bonding wire between a pair of bond pads includes a body and a heating element. The body has an internal tube that extends from a first surface of the capillary tool to a second surface of the capillary tool. In some implementations, the internal tube has a portion with a generally helical shape that includes at least a portion of one complete revolution about a central axis of the body. The heating element is coupled to the body to provide a heat affected zone along a portion of the internal tube that heats the bonding wire as the bonding wire is fed through the internal tube.
Abstract translation: 用于在一对接合焊盘之间馈送,弯曲和连接接合线的毛细管工具包括主体和加热元件。 主体具有从毛细管工具的第一表面延伸到毛细管工具的第二表面的内管。 在一些实施方案中,内管具有大致螺旋形状的部分,其包括围绕主体的中心轴线的一整圈的至少一部分。 加热元件联接到主体,以沿着内管的一部分提供热影响区域,该热影响区域在接合线被馈送通过内管时加热接合线。
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公开(公告)号:WO2010005086A1
公开(公告)日:2010-01-14
申请号:PCT/JP2009/062635
申请日:2009-07-10
Applicant: 新日鉄マテリアルズ株式会社 , 株式会社日鉄マイクロメタル , 宇野 智裕 , 山田 隆 , 池田 敦夫
IPC: H01L21/60
CPC classification number: H01L24/85 , H01L24/05 , H01L24/43 , H01L24/45 , H01L24/48 , H01L2224/04042 , H01L2224/05556 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05664 , H01L2224/4312 , H01L2224/4321 , H01L2224/4382 , H01L2224/43825 , H01L2224/43826 , H01L2224/43827 , H01L2224/43848 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/4554 , H01L2224/45565 , H01L2224/45572 , H01L2224/45639 , H01L2224/45644 , H01L2224/45655 , H01L2224/45657 , H01L2224/45664 , H01L2224/45666 , H01L2224/45669 , H01L2224/45671 , H01L2224/45673 , H01L2224/45676 , H01L2224/48011 , H01L2224/48091 , H01L2224/4847 , H01L2224/48471 , H01L2224/48475 , H01L2224/48486 , H01L2224/48499 , H01L2224/48507 , H01L2224/48511 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48664 , H01L2224/48699 , H01L2224/48724 , H01L2224/48739 , H01L2224/48744 , H01L2224/48747 , H01L2224/48764 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48864 , H01L2224/78301 , H01L2224/85045 , H01L2224/85051 , H01L2224/85065 , H01L2224/85075 , H01L2224/85186 , H01L2224/85203 , H01L2224/85205 , H01L2224/85207 , H01L2224/85439 , H01L2224/85444 , H01L2224/85986 , H01L2225/06562 , H01L2924/00011 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01022 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01044 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01057 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01105 , H01L2924/01204 , H01L2924/01205 , H01L2924/01206 , H01L2924/01327 , H01L2924/10253 , H01L2924/14 , H01L2924/15311 , H01L2924/20751 , H01L2924/20752 , H01L2924/20753 , H01L2924/20754 , H01L2924/20755 , H01L2924/20756 , H01L2924/20757 , H01L2924/3025 , H01L2924/351 , Y10T428/12222 , H01L2924/20105 , H01L2924/20106 , H01L2924/20107 , H01L2924/20108 , H01L2924/00015 , H01L2924/01001 , H01L2924/01203 , H01L2924/20758 , H01L2924/20759 , H01L2924/2076 , H01L2924/20109 , H01L2924/2011 , H01L2924/20111 , H01L2924/20652 , H01L2924/20655 , H01L2924/20645 , H01L2924/00 , H01L2224/48824 , H01L2924/013 , H01L2924/01049
Abstract: 本発明は、材料費が安価で、バンプの上にウェッジ接合を行う逆ボンディングにおいて、連続ボンディングの生産性が高く、高温加熱、熱サイクル試験、リフロー試験又はHAST試験等の信頼性に優れる銅系ボンディングワイヤの接合構造を提供することを目的とする。 半導体素子の電極上に形成したボールバンプの上にボンディングワイヤを接続する接合構造であって、前記ボンディングワイヤ及び前記ボールバンプは銅を主成分とし、前記接合部の界面に銅以外の金属Rの濃度が前記ボールバンプにおける金属Rの平均濃度の10倍以上である濃化層Aを有し、且つ、ボールバンプと電極との接合界面に金属Rの濃度が、ボールバンプにおける金属Rの平均濃度の10倍以上である濃化層Bを有するボンディングワイヤの接合構造である。
Abstract translation: 公开了可以实现低材料成本的铜基接合线的接合结构,并且在用于凸块的楔形接合的反向接合中,可以实现高连续接合的生产率和高可靠性,例如在高温加热 ,热循环测试,回流测试或HAST测试。 接合结构包括连接到形成在半导体元件中的电极上的球凸块上的接合线。 接合线和球凸起主要由铜组成。 在接合部分的界面处设置具有不小于球凸块中的金属(R)的平均浓度的10倍的铜以外的金属(R)的浓度增加的浓度层(A) 。 在球凸块和电极的接合界面处设置具有不小于球凸块中的金属(R)的平均浓度的10倍的金属(R)浓度的增加的浓度层(B)。
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公开(公告)号:WO2012043727A1
公开(公告)日:2012-04-05
申请号:PCT/JP2011/072397
申请日:2011-09-29
Applicant: 新日鉄マテリアルズ株式会社 , 株式会社日鉄マイクロメタル , 宇野 智裕 , 山田 隆 , 池田 敦夫
IPC: H01L21/60
CPC classification number: H01B1/026 , B23K20/007 , H01L23/48 , H01L24/43 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/78 , H01L24/85 , H01L25/0657 , H01L2224/05624 , H01L2224/32145 , H01L2224/43 , H01L2224/43848 , H01L2224/45015 , H01L2224/45147 , H01L2224/45565 , H01L2224/45572 , H01L2224/45639 , H01L2224/45644 , H01L2224/45664 , H01L2224/45669 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/4845 , H01L2224/48465 , H01L2224/4851 , H01L2224/48511 , H01L2224/48599 , H01L2224/48799 , H01L2224/48824 , H01L2224/73265 , H01L2224/76268 , H01L2224/781 , H01L2224/78268 , H01L2224/85045 , H01L2224/85203 , H01L2224/85205 , H01L2224/85439 , H01L2224/85444 , H01L2224/85447 , H01L2224/85464 , H01L2225/0651 , H01L2225/06565 , H01L2924/00011 , H01L2924/00015 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/10253 , H01L2924/12041 , H01L2924/3025 , Y02P70/605 , H01L2224/45678 , H01L2924/00014 , H01L2924/00012 , H01L2924/00 , H01L2224/45144 , H01L2924/20752 , H01L2924/01204 , H01L2924/20108 , H01L2924/20109 , H01L2924/2011 , H01L2924/20111 , H01L2924/01083 , H01L2924/013 , H01L2924/00013
Abstract: 材料費が安価で、低ループ化、ボール接合性に優れ、積層チップ接続の量産適用性にも優れた、複層銅ボンディングワイヤのボール接合部の接合構造を提供する。 銅を主成分とする芯材21と、前記芯材の上にPd、Au、Ag、Ptのうち少なくとも1種から選ばれる貴金属を主成分とする外層22とを有する複層銅ボンディングワイヤの先端に形成したボール部を接続してボール接合部3の接合構造を形成する。前記貴金属の第1濃化部10を、前記ボール接合部の表面領域のなかでも前記銅ボンディングワイヤとの境界に位置するボール根元域9に形成する。
Abstract translation: 本发明提供一种用于连接多层铜接合线的球接头的结构,其具有廉价的材料成本,低回路,优异的球接合性能以及用于大量生产多层芯片连接的高适用性的结构。 用于接合球窝接头(3)的结构通过将形成在多层铜接合线的顶端上的球形部分接合而形成,该多孔铜接合线的接合线具有包含铜作为其主要成分的芯部(21)和外层 (22),所述外层含有选自Pd,Au,Ag和Pt中的至少一种贵金属作为其主要成分。 贵金属的第一集中部分(10)形成在位于与铜接合线的边界处的球基区域(9)中,该区域位于球窝接头的表面区域中。
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公开(公告)号:WO2008117488A1
公开(公告)日:2008-10-02
申请号:PCT/JP2007/069426
申请日:2007-09-27
Inventor: 中里 功
IPC: H01L21/60
CPC classification number: H01L24/85 , H01L23/4952 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/83 , H01L2224/291 , H01L2224/2919 , H01L2224/45015 , H01L2224/45144 , H01L2224/4809 , H01L2224/48091 , H01L2224/48095 , H01L2224/48227 , H01L2224/48229 , H01L2224/48247 , H01L2224/48465 , H01L2224/48511 , H01L2224/48599 , H01L2224/4903 , H01L2224/49051 , H01L2224/73265 , H01L2224/78301 , H01L2224/83801 , H01L2224/83851 , H01L2224/85045 , H01L2224/85181 , H01L2224/85423 , H01L2224/85447 , H01L2224/85455 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01058 , H01L2924/01074 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/07802 , H01L2924/0781 , H01L2924/09701 , H01L2924/15153 , H01L2924/1517 , H01L2924/15747 , H01L2924/15787 , H01L2924/15788 , H01L2924/181 , H01L2924/20752 , H01L2924/00014 , H01L2924/00012 , H01L2924/00
Abstract: 金属細線によるループ高さが従来よりも更に低くされた薄型の半導体装置を提供する。 本発明の半導体装置は、金属細線(51)を経由して半導体チップ(54)のボンディングパッド(55)と電極(53B)とが接続される構成をとる。前記金属細線(51)は、1stボンドから湾曲部(57)を描き、湾曲部(57)端部の曲折部(59)を介して直線的な第2の延在部(60)を有する。
Abstract translation: 与现有技术相比,薄金属线的环路高度进一步降低的薄型半导体器件。 半导体器件具有如下结构:半导体芯片(54)的焊盘(55)和电极(53B)经由薄金属线(51)连接。 薄金属线(51)从第一接合处拉出曲线(57),并且通过弯曲部分(57)的端部处的弯曲部(59)具有第二线性延伸部(60)。
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公开(公告)号:WO2007051142A3
公开(公告)日:2008-09-25
申请号:PCT/US2006060265
申请日:2006-10-26
Applicant: TEXAS INSTRUMENTS INC , ABBOTT DONALD C
Inventor: ABBOTT DONALD C
IPC: H01L21/00 , H01L23/495
CPC classification number: H01L21/6835 , H01L21/4828 , H01L21/568 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/85 , H01L25/105 , H01L2224/32245 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48095 , H01L2224/48247 , H01L2224/48465 , H01L2224/48511 , H01L2224/48599 , H01L2224/73265 , H01L2224/83 , H01L2224/85 , H01L2225/1029 , H01L2225/1058 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/15331 , H01L2924/181 , H01L2924/20752 , H01L2924/30107 , H01L2924/3025 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
Abstract: A semiconductor device comprising a semiconductor chip (101) assembled on a first copper cuboid (110); the cuboid has sides of a height (111). The device further has a plurality of second copper cuboids (120) suitable for wire bond attachment; the second cuboids have sides of a height (121) substantially equal to the height of the first cuboid. The back surfaces of all cuboids are aligned in a plane (130). Encapsulation compound (140) is adhering to and embedding the chip, the wire bonds, and the sides of all cuboids so that the compound forms a first surface (140b) aligned with the plane of the back cuboid surfaces and a second surface (140a) above the embedded wires. For devices intended for stacking, the devices further comprise a plurality of vias (160) through the encapsulation compound from the first to the second compound surfaces; the vias are filled with copper, and the via locations are matching between the devices-to-be-stacked.
Abstract translation: 一种半导体器件,包括组装在第一铜长方体(110)上的半导体芯片(101) 长方体具有高度的一侧(111)。 该装置还具有多个适于引线键合的第二铜长方体(120); 第二长方体具有基本上等于第一长方体的高度的高度(121)的侧面。 所有长方体的背面在平面(130)中对准。 包封化合物(140)粘附并包埋芯片,引线键合和所有长方体的侧面,使得化合物形成与后立方体表面的平面对准的第一表面(140b)和第二表面(140a) 高于嵌入式电线。 对于用于堆叠的装置,装置还包括通过从第一复合表面到第二复合表面的封装化合物的多个通孔(160); 通孔填充有铜,并且通孔位置在待堆叠的器件之间是匹配的。
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公开(公告)号:WO2009096950A1
公开(公告)日:2009-08-06
申请号:PCT/US2008/052378
申请日:2008-01-30
Inventor: CALPITO, Dodgie, Reigh, M. , KWON, Odal
IPC: H01L21/60
CPC classification number: H01L24/85 , H01L21/6835 , H01L23/4952 , H01L24/05 , H01L24/06 , H01L24/48 , H01L24/49 , H01L24/78 , H01L2224/04042 , H01L2224/05553 , H01L2224/05554 , H01L2224/05556 , H01L2224/05599 , H01L2224/32225 , H01L2224/4809 , H01L2224/48095 , H01L2224/48247 , H01L2224/48455 , H01L2224/4846 , H01L2224/48465 , H01L2224/48471 , H01L2224/48479 , H01L2224/48511 , H01L2224/49171 , H01L2224/73265 , H01L2224/78302 , H01L2224/78901 , H01L2224/85001 , H01L2224/85045 , H01L2224/85047 , H01L2224/85051 , H01L2224/85181 , H01L2224/85186 , H01L2224/85201 , H01L2224/85203 , H01L2224/85205 , H01L2224/85399 , H01L2224/85947 , H01L2224/85986 , H01L2924/00014 , H01L2924/01005 , H01L2924/01013 , H01L2924/01033 , H01L2924/01047 , H01L2924/01057 , H01L2924/01075 , H01L2924/01082 , H01L2924/014 , H01L2924/10161 , H01L2924/14 , H01L2224/45099 , H01L2224/48227 , H01L2924/00 , H01L2224/4554
Abstract: A method of forming a wire loop is provided. The method includes: (1) forming a first fold of wire; (2) bonding the first fold of wire to a first bonding location to form a first bond; (3) extending a length of wire, continuous with the first bond, between (a) the first bond and (b) a second bonding location; and (4) bonding a portion of the wire to the second bonding location to form a second bond.
Abstract translation: 提供一种形成线环的方法。 该方法包括:(1)形成线的第一折叠; (2)将所述第一折叠线接合到第一接合位置以形成第一接合; (3)在(a)第一键和(b)第二结合位置之间延伸一段与第一键连续的线的长度; 以及(4)将所述导线的一部分接合到所述第二接合位置以形成第二接合。
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公开(公告)号:WO2009093554A1
公开(公告)日:2009-07-30
申请号:PCT/JP2009/050712
申请日:2009-01-20
Applicant: 新日鉄マテリアルズ株式会社 , 株式会社日鉄マイクロメタル , 宇野 智裕 , 木村 圭一 , 山田 隆
CPC classification number: C22C5/02 , B21C37/047 , B23K35/0261 , B23K35/0272 , B23K35/24 , B23K35/30 , B23K35/3006 , B23K35/3013 , B23K35/302 , C22C9/00 , C22F1/08 , C22F1/14 , H01L24/43 , H01L24/45 , H01L24/48 , H01L24/85 , H01L2224/05624 , H01L2224/4312 , H01L2224/4321 , H01L2224/43825 , H01L2224/43848 , H01L2224/43986 , H01L2224/45014 , H01L2224/45015 , H01L2224/45139 , H01L2224/45144 , H01L2224/45147 , H01L2224/45164 , H01L2224/45169 , H01L2224/45173 , H01L2224/45176 , H01L2224/45565 , H01L2224/45572 , H01L2224/456 , H01L2224/45639 , H01L2224/45644 , H01L2224/45664 , H01L2224/45669 , H01L2224/45673 , H01L2224/45676 , H01L2224/48011 , H01L2224/48227 , H01L2224/48247 , H01L2224/48471 , H01L2224/48479 , H01L2224/4848 , H01L2224/4849 , H01L2224/4851 , H01L2224/48511 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48839 , H01L2224/48844 , H01L2224/85045 , H01L2224/85065 , H01L2224/85075 , H01L2224/85186 , H01L2224/85203 , H01L2224/85207 , H01L2224/85439 , H01L2224/85444 , H01L2225/06562 , H01L2924/00015 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/0102 , H01L2924/01022 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01044 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01327 , H01L2924/10253 , H01L2924/12041 , H01L2924/14 , H01L2924/15311 , H01L2924/15747 , H01L2924/20752 , H01L2924/3025 , H01L2924/01004 , H01L2924/01203 , H01L2224/45655 , H01L2224/45657 , H01L2224/45671 , H01L2224/45666 , H01L2924/01204 , H01L2924/01202 , H01L2224/48465 , H01L2924/20751 , H01L2924/01001 , H01L2924/20655 , H01L2924/20652 , H01L2924/20653 , H01L2924/20654 , H01L2924/20656 , H01L2924/00 , H01L2224/48824 , H01L2924/00014 , H01L2924/013 , H01L2924/20753 , H01L2924/20755 , H01L2924/20756 , H01L2924/20757 , H01L2924/20758 , H01L2924/20759 , H01L2924/2076 , H01L2924/20105 , H01L2924/20106 , H01L2924/20107 , H01L2924/2075 , H01L2924/20754
Abstract: 本発明は、ボール直上部のワイヤ倒れ(リーニング)及び、スプリング不良を抑制することもでき、ループの直線性、ループ高さの安定性等にも優れていることで、積層チップ接続、細線化、狭ピッチ実装等の半導体実装技術にも適応する、高機能のボンディングワイヤを提供することを目的とする。 導電性金属からなる芯材と、該芯材の上に芯材とは異なる金属を主成分とする表皮層を有するボンディングワイヤであって、該表皮層の表面における結晶粒の円周方向の平均サイズaと、ワイヤ軸の垂直断面における該芯材の結晶粒の平均サイズbとの関係について、a/b≦0.7である半導体装置用ボンディングワイヤである。
Abstract translation: 提供一种高功能的接合线,其能够抑制直接发生在球上方的线倾斜和弹簧故障,并且具有优异的环路线性,环路高度稳定性等,因此可应用于多层芯片连接的半导体安装技术 ,线材变薄,窄间距安装等。 接合线具有由导电金属构成的芯材,以及在芯材上具有不同于芯材作为主要成分的金属的表面层。 用于半导体器件的接合线满足a / b = 0.7的不等式,其中(a)是表面层的表面上的圆周方向的晶粒的平均尺寸,(b)是表面层的平均尺寸 芯材的晶粒在线轴的垂直横截面上。
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公开(公告)号:WO2007051142A2
公开(公告)日:2007-05-03
申请号:PCT/US2006/060265
申请日:2006-10-26
Applicant: TEXAS INSTRUMENTS INCORPORATED , ABBOTT, Donald, C.
Inventor: ABBOTT, Donald, C.
CPC classification number: H01L21/6835 , H01L21/4828 , H01L21/568 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/85 , H01L25/105 , H01L2224/32245 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48095 , H01L2224/48247 , H01L2224/48465 , H01L2224/48511 , H01L2224/48599 , H01L2224/73265 , H01L2224/83 , H01L2224/85 , H01L2224/85439 , H01L2225/1029 , H01L2225/1058 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/15331 , H01L2924/181 , H01L2924/20752 , H01L2924/30107 , H01L2924/3025 , H01L2924/00 , H01L2924/00012 , H01L2224/05599
Abstract: A semiconductor device comprising a semiconductor chip (101) assembled on a first copper cuboid (110); the cuboid has sides of a height (111). The device further has a plurality of second copper cuboids (120) suitable for wire bond attachment; the second cuboids have sides of a height (121) substantially equal to the height of the first cuboid. The back surfaces of all cuboids are aligned in a plane (130). Encapsulation compound (140) is adhering to and embedding the chip, the wire bonds, and the sides of all cuboids so that the compound forms a first surface (140b) aligned with the plane of the back cuboid surfaces and a second surface (140a) above the embedded wires. For devices intended for stacking, the devices further comprise a plurality of vias (160) through the encapsulation compound from the first to the second compound surfaces; the vias are filled with copper, and the via locations are matching between the devices-to-be-stacked.
Abstract translation: 一种半导体器件,包括组装在第一铜长方体(110)上的半导体芯片(101) 长方体具有高度的一侧(111)。 该装置还具有多个适于引线键合的第二铜长方体(120); 第二长方体具有基本上等于第一长方体的高度的高度(121)的侧面。 所有长方体的背面在平面(130)中对准。 包封化合物(140)粘附并包埋芯片,引线键合和所有长方体的侧面,使得化合物形成与后立方体表面的平面对准的第一表面(140b)和第二表面(140a) 高于嵌入式电线。 对于用于堆叠的装置,装置还包括通过从第一复合表面到第二复合表面的封装化合物的多个通孔(160); 通孔填充有铜,并且通孔位置在待堆叠的器件之间是匹配的。
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公开(公告)号:WO2006020452A1
公开(公告)日:2006-02-23
申请号:PCT/US2005/027358
申请日:2005-08-02
Applicant: TEXAS INSTRUMENTS INCORPORATED , KALIDAS, Navinchandra , LIBRES, Jeremias, P. , PIERCE, Michael, P.
Inventor: KALIDAS, Navinchandra , LIBRES, Jeremias, P. , PIERCE, Michael, P.
IPC: H01L23/12
CPC classification number: H01L21/568 , H01L23/13 , H01L23/3128 , H01L23/36 , H01L23/49816 , H01L24/48 , H01L24/49 , H01L24/73 , H01L25/0657 , H01L2223/5442 , H01L2223/54473 , H01L2224/05554 , H01L2224/32145 , H01L2224/32245 , H01L2224/45014 , H01L2224/48091 , H01L2224/48227 , H01L2224/48465 , H01L2224/48472 , H01L2224/48511 , H01L2224/49171 , H01L2224/73265 , H01L2225/0651 , H01L2225/06555 , H01L2225/06586 , H01L2225/06589 , H01L2924/00014 , H01L2924/01014 , H01L2924/01087 , H01L2924/14 , H01L2924/15153 , H01L2924/1517 , H01L2924/15311 , H01L2924/1532 , H01L2924/15331 , H01L2924/18165 , H01L2924/3025 , H01L2924/00 , H01L2924/00012 , H01L2224/45015 , H01L2924/207
Abstract: A semiconductor device has an electrically insulating substrate (301) with first and second surfaces, at least one opening, and a given thickness. Electrically conductive routing strips connect contact pads (330) on the first substrate surface. A semiconductor chip (102), of equal or lesser thickness than the substrate, is positioned within the substrate opening with a marginal gap (311) separating externally facing chip sides (703) from internally facing substrate sides (702). Bonding elements (501) connect the substrate routing strips across the gap with chip bond pads located on a chip active surface (102a). The chip (102) has a passive surface (102b) substantially coplanar with the second substrate surface (301 b). Encapsulation material (701) fills the marginal gap (311) and covers the active chip surface (102a) and bonding elements (501). A support tape (101), removed after assembly, serves to provide a gap-filling surface (701 a) of encapsulation material (701) substantially coplanar with the second substrate surface (301 b) and a passive chip surface (102b).
Abstract translation: 半导体器件具有带有第一和第二表面,至少一个开口和给定厚度的电绝缘基底(301)。 导电布线条将接触焊盘(330)连接在第一基板表面上。 位于衬底开口内的半导体芯片(102)等于或小于衬底的边缘间隙(311),其从外部面对的芯片侧面(703)与内部衬底侧面(702)分开。 接合元件(501)将衬底布线条跨过间隙与位于芯片有源表面(102a)上的芯片接合焊盘连接。 芯片(102)具有与第二衬底表面(301b)基本上共面的无源表面(102b)。 封装材料(701)填充边缘间隙(311)并覆盖有源芯片表面(102a)和结合元件(501)。 在组装之后去除的支撑带(101)用于提供与第二基板表面(301b)基本共面的封装材料(701)和无源芯片表面(102b)的间隙填充表面(701a)。
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