METHOD FOR WIRE BONDING AND DEVICE PRODUCED THEREBY
    10.
    发明申请
    METHOD FOR WIRE BONDING AND DEVICE PRODUCED THEREBY 审中-公开
    用于线接合的方法及其生产的装置

    公开(公告)号:WO2015024597A1

    公开(公告)日:2015-02-26

    申请号:PCT/EP2013/067400

    申请日:2013-08-21

    Inventor: KHAW, Wei Chin

    Abstract: In various embodiments a method is provided, comprising the steps of: Arranging a wire bond (20) in a capillary (50) for wire-bonding such that a first end of the wire bond (20) extends from a tip of the capillary (50); forming a ball (27) out of the first end of the wire bond (20); leading the wire bond (20) with the ball (27) towards a substrate (14) such that a bond ball (28) is formed on an electric contact area (16) of the substrate (14) by the ball (27); leading the capillary (50) with the wire bond (20) away from the bond ball (28) towards a bond pad (12) on a die (10); leading the capillary (50) towards the bond pad (12) such that the tip of the capillary (50) presses the wire bond (20) against the bond pad (12) and that there is a clearance between the tip of the capillary (50) and the bond pad (12); applying ultrasonic energy on the wire bond (20) on the bond pad (12) in order to fix the wire bond (20) to the bond pad (12), wherein a first portion (54) of the wire bond (20) extends from the bond ball (28) on the substrate (14) to the bond pad (12) on the die (10); increasing the clearance between the bond pad (12) and the capillary (50) tip; leading the wire bond (20) back to the substrate (14); fixing the wire bond (20) to the substrate (14), wherein a second portion (56) of the wire bond (20) extends from the bond pad (12) on the die (10) to the bond ball (28) on the substrate (14).

    Abstract translation: 在各种实施方案中,提供了一种方法,包括以下步骤:在毛细管(50)中布置引线接合(20)以进行引线接合,使得引线键合(20)的第一端从毛细管的尖端 50); 在所述引线接合(20)的第一端中形成球(27); 将引线接合(20)与球(27)导向基板(14),使得接合球(28)由球(27)形成在基板(14)的电接触区域(16)上; 引导毛细管(50),其中导线接合(20)远离接合球(28)朝向模具(10)上的接合焊盘(12); 使毛细管(50)朝向接合焊盘(12)引导,使得毛细管(50)的尖端将引线接合(20)压靠在接合焊盘(12)上,并且毛细管的尖端 50)和接合焊盘(12); 在所述接合焊盘(12)上的所述引线接合(20)上施加超声波能量,以将所述引线接合(20)固定到所述接合焊盘(12),其中,所述引线接合(20)的第一部分(54)延伸 从衬底(14)上的粘合球(28)到模具(10)上的接合焊盘(12); 增加接合焊盘(12)和毛细管(50)尖端之间的间隙; 将引线键(20)引导回到基板(14)上; 将引线接合(20)固定到基底(14)上,其中引线接合(20)的第二部分(56)从模具(10)上的接合焊盘(12)延伸到接合球(28)上 基板(14)。

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