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公开(公告)号:CN1536658A
公开(公告)日:2004-10-13
申请号:CN200410031330.3
申请日:2004-03-26
申请人: 株式会社瑞萨科技
CPC分类号: H01L24/85 , H01L21/565 , H01L23/3128 , H01L24/05 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/78 , H01L24/97 , H01L2224/02166 , H01L2224/0401 , H01L2224/04042 , H01L2224/05553 , H01L2224/05554 , H01L2224/05624 , H01L2224/05644 , H01L2224/32225 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45164 , H01L2224/4807 , H01L2224/48091 , H01L2224/48227 , H01L2224/48453 , H01L2224/48455 , H01L2224/48465 , H01L2224/4847 , H01L2224/48624 , H01L2224/48644 , H01L2224/48724 , H01L2224/49171 , H01L2224/49431 , H01L2224/49433 , H01L2224/73265 , H01L2224/78301 , H01L2224/78704 , H01L2224/85045 , H01L2224/85181 , H01L2224/85201 , H01L2224/85203 , H01L2224/85205 , H01L2224/92247 , H01L2224/97 , H01L2924/00011 , H01L2924/01202 , H01L2924/01204 , H01L2924/014 , H01L2924/05042 , H01L2924/14 , H01L2924/15311 , H01L2924/181 , H01L2924/20752 , H01L2924/351 , H01L2924/01046 , H01L2224/85 , H01L2924/00014 , H01L2924/01013 , H01L2924/00 , H01L2924/00012 , H01L2224/48744 , H01L2924/00015 , H01L2924/0102 , H01L2924/013 , H01L2924/01004 , H01L2924/00013 , H01L2924/01006
摘要: 接合焊盘和金线的球部分之间的粘附力得以改善以提高半导体器件的可靠性。约1wt.%的Pd含在金线中,金线用于连接形成在布线基板上的电极焊盘和形成在半导体芯片上的电极焊盘(主要由Al形成的顶层布线的露出区域),由此,在形成在半导体芯片上的电极焊盘和金线的球部分之间的接合部分中,抑制了Au和Al的相互扩散,以防止PCT(压力锅蒸煮试验)之后形成Au4Al。由于防止了易于被腐蚀的Au4Al的形成,即使形成在半导体芯片上的电极焊盘的间距小于65μm并且每个金线的球部分的直径小于55μm或每个金线的线部分的直径不大于25μm的情况中,也可以得到需要的金线接合强度。同样在顶层布线很厚或者很薄或者接合温度很低的情况中也可以确保需要的接合强度。
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公开(公告)号:CN1114943C
公开(公告)日:2003-07-16
申请号:CN99125526.7
申请日:1999-12-02
申请人: 日本电气株式会社
发明人: 松原义久
IPC分类号: H01L21/768 , H01L21/28 , H01L21/311
CPC分类号: H01L21/0276 , H01L21/76801 , H01L21/76804 , H01L21/76832 , H01L21/76838 , H01L23/53228 , H01L23/5329 , H01L23/53295 , H01L24/05 , H01L2224/04042 , H01L2224/05556 , H01L2224/45144 , H01L2224/48453 , H01L2224/48463 , H01L2924/12042 , H01L2924/14 , H01L2924/3011 , H01L2924/00
摘要: 在本发明中,在此公开一种半导体器件,其铜互连层形成多级结构;其特征在于至少一个位于铜互连层之间的层间膜具有层状结构,其中按照次序从下层铜互连层一侧叠放一含氟的无定形碳膜与一SiO2膜;一层状结构,其中按次序叠放氮化硅,然后叠放氮氧化硅或碳化硅;或者包括单氮化硅层的的一种结构。这种层间膜作为防反射涂层。
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公开(公告)号:CN1104046C
公开(公告)日:2003-03-26
申请号:CN97111464.1
申请日:1997-05-30
申请人: 三菱电机株式会社
IPC分类号: H01L21/60
CPC分类号: H01L24/85 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/73 , H01L2224/04042 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05669 , H01L2224/32245 , H01L2224/45015 , H01L2224/45124 , H01L2224/45139 , H01L2224/45144 , H01L2224/45147 , H01L2224/45169 , H01L2224/4554 , H01L2224/45669 , H01L2224/4807 , H01L2224/48091 , H01L2224/48247 , H01L2224/48451 , H01L2224/48453 , H01L2224/48465 , H01L2224/48505 , H01L2224/48507 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48669 , H01L2224/48724 , H01L2224/48739 , H01L2224/48744 , H01L2224/48747 , H01L2224/48769 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48869 , H01L2224/73265 , H01L2224/78301 , H01L2224/85099 , H01L2224/85181 , H01L2224/85203 , H01L2224/85205 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01327 , H01L2924/014 , H01L2924/12042 , H01L2924/15747 , H01L2924/20106 , H01L2924/20107 , H01L2924/20303 , H01L2924/20753 , Y10S228/904 , H01L2924/00012 , H01L2224/78 , H01L2924/00
摘要: 目的在于提高微小丝焊焊接部的可靠性。在金属球3b接触压焊区2后,将第1键合压力大幅度地提高到120gf,在金属丝3a与压焊区2的接合界面处使其相互迅速产生塑性流动。接着将第2键合压力控制为40gf的低值,以确保与焊接核6a有关的金属球3b与压焊区2的接触。其次,超声振动施加后,以10~20gf施加第3键合压力约10ms,能够均匀地生长出多个岛状焊接部6b。最后,以25~40gf施加第4键合压力约3~5ms,这样就能形成带状焊接部7。
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公开(公告)号:CN1256512A
公开(公告)日:2000-06-14
申请号:CN99125526.7
申请日:1999-12-02
申请人: 日本电气株式会社
发明人: 松原义久
IPC分类号: H01L21/768 , H01L21/28 , H01L21/311
CPC分类号: H01L21/0276 , H01L21/76801 , H01L21/76804 , H01L21/76832 , H01L21/76838 , H01L23/53228 , H01L23/5329 , H01L23/53295 , H01L24/05 , H01L2224/04042 , H01L2224/05556 , H01L2224/45144 , H01L2224/48453 , H01L2224/48463 , H01L2924/12042 , H01L2924/14 , H01L2924/3011 , H01L2924/00
摘要: 在本发明中,在此公开一种半导体器件,其铜互连层形成多级结构;其特征在于至少一个位于铜互连层之间的层间膜具有层状结构,其中按照次序从下层铜互连层一侧叠放一含氟的无定形碳膜与一SiO2膜;一层状结构,其中按次序叠放氮化硅,然后叠放氮氧化硅或碳化硅;或者包括单氮化硅层的一种结构。这种层间膜作为防反射涂层。
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公开(公告)号:CN104054170B
公开(公告)日:2017-03-15
申请号:CN201280066623.8
申请日:2012-11-29
申请人: 罗伯特·博世有限公司
IPC分类号: H01L23/053 , H01L23/26
CPC分类号: H01L23/26 , H01L21/56 , H01L23/053 , H01L23/3107 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/85 , H01L2224/05624 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48453 , H01L2224/48465 , H01L2224/48507 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/49 , H01L2224/73265 , H01L2224/85 , H01L2224/85203 , H01L2924/01327 , H01L2924/19105 , H01L2924/00 , H01L2924/2075 , H01L2924/00014 , H01L2924/20751 , H01L2924/20752 , H01L2924/20753 , H01L2924/20754 , H01L2924/20755 , H01L2924/00012
摘要: 本发明涉及一种具有防腐蚀压焊连接的电子构件(1)和用于制造这种电子构件的方法。为此电子构件(1)在衬底(4)上具有至少一个半导体芯片(3)。此外,在半导体芯片(3)上设有承受腐蚀风险的压焊连接。作为至少一个半导体芯片装,它们由密闭包封的外壳(5)包围。密闭包封的压焊连接是压焊引线连接(2),它完全地与至少部分的衬底(4)包封在外壳(5)内。衬底(4)在外壳(5)内具有至少一个表面安装的易水解的元件(6)。(3)和至少一个承受腐蚀风险的压焊连接的封
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公开(公告)号:CN102915991B
公开(公告)日:2015-08-26
申请号:CN201110353065.0
申请日:2011-11-09
申请人: 台湾积体电路制造股份有限公司
IPC分类号: H01L23/498 , H01L27/146
CPC分类号: H01L27/14636 , H01L21/76898 , H01L23/481 , H01L23/525 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/45 , H01L24/48 , H01L24/83 , H01L27/14623 , H01L27/1463 , H01L27/1464 , H01L27/14643 , H01L27/14683 , H01L27/14685 , H01L27/14689 , H01L2224/02166 , H01L2224/04042 , H01L2224/0557 , H01L2224/05571 , H01L2224/05572 , H01L2224/05624 , H01L2224/1134 , H01L2224/11916 , H01L2224/451 , H01L2224/45124 , H01L2224/45144 , H01L2224/48453 , H01L2224/48463 , H01L2224/83359 , H01L2924/00014 , H01L2924/01013 , H01L2924/10253 , H01L2924/13091 , H01L2924/3025 , H01L2924/00012 , H01L2924/00 , H01L2224/05552 , H01L2224/45015 , H01L2924/207 , H01L2224/45099
摘要: 一种集成电路结构包括:半导体衬底;以及介电焊盘,该介电焊盘从半导体衬底的底面向上延伸到半导体衬底中。低k介电层被设置在半导体衬底下方。第一非低k介电层位于低k介电层下方。金属焊盘位于第一非低k介电层下方。第二非低k介电层位于金属焊盘下方。开口从半导体衬底的顶面向下延伸,从而穿透半导体衬底、介电焊盘、以及低k介电层,其中,开口位于金属焊盘的顶面上方。钝化层的一部分位于开口的侧壁上,其中,位于开口的底部的钝化层的一部分被去除。本发明还提供了一种BSI图像传感器芯片中的焊盘结构。
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公开(公告)号:CN102687259A
公开(公告)日:2012-09-19
申请号:CN201180005261.7
申请日:2011-02-03
申请人: 新日铁高新材料株式会社 , 日铁新材料股份有限公司
IPC分类号: H01L21/60
CPC分类号: H01L24/48 , B23K35/0244 , B23K35/3046 , C22C9/00 , C22F1/08 , H01L24/05 , H01L24/43 , H01L24/45 , H01L24/85 , H01L2224/04042 , H01L2224/05624 , H01L2224/43848 , H01L2224/45015 , H01L2224/45147 , H01L2224/45565 , H01L2224/45639 , H01L2224/45644 , H01L2224/45664 , H01L2224/48453 , H01L2224/48463 , H01L2224/48507 , H01L2224/48799 , H01L2224/48824 , H01L2224/85 , H01L2224/85203 , H01L2224/85205 , H01L2924/00011 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01019 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/10253 , H01L2924/181 , H01L2924/20104 , H01L2924/20105 , H01L2924/01032 , H01L2924/00012 , H01L2924/00 , H01L2924/013 , H01L2924/20751 , H01L2924/20752 , H01L2924/20753 , H01L2924/20754 , H01L2924/20755 , H01L2924/20756 , H01L2924/20757 , H01L2924/01049 , H01L2924/01203 , H01L2924/00013 , H01L2924/01004 , H01L2924/01204
摘要: 本发明的目的是提供一种材料费便宜,与Al电极的接合部的长期可靠性优异,在车载用LSI用途中也能够应用的接合结构、以及半导体用铜接合线。形成将在铜接合线的尖端形成的球部与铝电极接合了的球接合部,所述的将在铜接合线的尖端形成的球部与铝电极接合了的球接合部,其特征在于,在将所述球接合部在130~200℃的任一温度下加热后,相对于在所述球接合部的截面中具有的由Cu和Al构成的金属间化合物的厚度,CuAl相的金属间化合物的厚度的比例即相对化合物比率R1为40%~100%。
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公开(公告)号:CN102484080A
公开(公告)日:2012-05-30
申请号:CN201080023252.6
申请日:2010-06-17
申请人: 罗姆股份有限公司
IPC分类号: H01L21/60 , H01L21/3205 , H01L23/29 , H01L23/31 , H01L23/52
CPC分类号: H01L24/85 , B23K20/005 , B23K20/10 , B23K20/24 , H01L21/56 , H01L23/3107 , H01L23/49503 , H01L23/49513 , H01L23/4952 , H01L23/49548 , H01L23/49582 , H01L24/03 , H01L24/05 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/83 , H01L2224/02166 , H01L2224/04042 , H01L2224/05554 , H01L2224/05624 , H01L2224/29111 , H01L2224/29113 , H01L2224/29118 , H01L2224/2919 , H01L2224/2929 , H01L2224/29339 , H01L2224/32225 , H01L2224/32245 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48451 , H01L2224/48453 , H01L2224/48465 , H01L2224/48471 , H01L2224/48479 , H01L2224/48507 , H01L2224/48624 , H01L2224/48639 , H01L2224/48724 , H01L2224/48739 , H01L2224/48747 , H01L2224/48824 , H01L2224/48839 , H01L2224/48847 , H01L2224/49171 , H01L2224/73265 , H01L2224/78301 , H01L2224/78303 , H01L2224/78307 , H01L2224/78309 , H01L2224/83 , H01L2224/8314 , H01L2224/83192 , H01L2224/83439 , H01L2224/838 , H01L2224/85 , H01L2224/85045 , H01L2224/85051 , H01L2224/85181 , H01L2224/85186 , H01L2224/85205 , H01L2224/85439 , H01L2224/8592 , H01L2224/85986 , H01L2224/92 , H01L2224/92247 , H01L2224/97 , H01L2924/00012 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01012 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01016 , H01L2924/01019 , H01L2924/0102 , H01L2924/01022 , H01L2924/01023 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/0104 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01051 , H01L2924/01066 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01204 , H01L2924/01205 , H01L2924/01206 , H01L2924/013 , H01L2924/0132 , H01L2924/01322 , H01L2924/01327 , H01L2924/0133 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/05442 , H01L2924/0665 , H01L2924/10162 , H01L2924/10253 , H01L2924/12042 , H01L2924/15747 , H01L2924/181 , H01L2924/18301 , H01L2924/19107 , H01L2924/20752 , H01L2924/20757 , H01L2924/3512 , H01L2924/01026 , H01L2924/00 , H01L2924/2076 , H01L2924/207 , H01L2924/20753 , H01L2924/20756 , H01L2924/20758 , H01L2924/00015
摘要: 本发明是提供一种半导体装置。该半导体装置包括:半导体芯片;电极焊盘,其由含铝的金属材料构成,且形成在所述半导体芯片的表面;电极引脚,其配置在所述半导体芯片的周围;焊线,其具有线状延伸的主体部、和形成在所述主体部的两端且与所述电极焊盘以及所述电极引脚分别接合的焊盘接合部以及引脚接合部;和树脂封装,其对所述半导体芯片、所述电极引脚以及所述焊线进行密封,所述焊线由铜构成,所述电极焊盘整体以及所述焊盘接合部整体被非透水膜呈一体地覆盖。
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公开(公告)号:CN1612322B
公开(公告)日:2012-03-21
申请号:CN200410086605.3
申请日:2004-10-29
申请人: 瑞萨电子株式会社
IPC分类号: H01L21/82 , H01L21/768 , H01L21/28 , H01L21/60 , H01L21/66
CPC分类号: H01L22/14 , G01R1/06711 , G01R1/06744 , G01R1/07307 , G01R3/00 , H01L2224/05553 , H01L2224/05554 , H01L2224/0603 , H01L2224/45144 , H01L2224/48453 , H01L2224/48463 , H01L2224/49171 , H01L2924/014 , H01L2924/3011 , H01L2924/00
摘要: 提供了一种技术,该技术允许电测试具有以窄间距布置的测试焊盘的半导体集成电路器件。棱锥体或梯形棱锥体形状的探针由通过连续地层叠铑膜和镍膜形成的金属膜形成。通过互连和金属膜之间的聚酰亚胺膜中形成的通孔,互连电连接到金属膜。通过旋转配备有其他探针和通孔的其他金属膜的平面图形获得配备有一个探针和通孔的金属膜之一的平面图形。
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公开(公告)号:CN101752335B
公开(公告)日:2012-02-15
申请号:CN200910254194.7
申请日:2009-12-10
申请人: 夏普株式会社
发明人: 冲田真大
CPC分类号: H01L24/85 , H01L23/49811 , H01L24/03 , H01L24/05 , H01L24/29 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/78 , H01L24/83 , H01L31/02008 , H01L2224/04042 , H01L2224/05556 , H01L2224/05557 , H01L2224/05639 , H01L2224/29101 , H01L2224/2919 , H01L2224/29288 , H01L2224/29339 , H01L2224/32225 , H01L2224/45014 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/4807 , H01L2224/48091 , H01L2224/48095 , H01L2224/48227 , H01L2224/48453 , H01L2224/48465 , H01L2224/48471 , H01L2224/48472 , H01L2224/48479 , H01L2224/48639 , H01L2224/48739 , H01L2224/73265 , H01L2224/78301 , H01L2224/83192 , H01L2224/838 , H01L2224/83801 , H01L2224/85051 , H01L2224/85181 , H01L2224/85186 , H01L2224/85201 , H01L2224/85203 , H01L2224/85205 , H01L2224/85986 , H01L2224/92 , H01L2224/92247 , H01L2924/00011 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01014 , H01L2924/01033 , H01L2924/01047 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/078 , H01L2924/10253 , H01L2924/19041 , H01L2924/19043 , H01L2924/20105 , H01L2924/20751 , H01L2924/20752 , Y02E10/50 , H01L2924/00 , H01L2924/00012 , H01L2924/00015 , H01L2224/83205 , H01L2224/4554
摘要: 本发明涉及半导体装置以及半导体装置的制造方法。本发明的半导体装置,具有形成有能够与外部电连接的外部电极的基材和形成有由导电膏构成的表面电极的半导体元件,在基材上安装有半导体元件,其中,基材的外部电极和半导体元件的表面电极通过引线接合由金丝电连接在一起。由此,提供一种半导体装置以及半导体装置的制造方法,在包括具有能够与外部电连接的外部电极的基材和具有由导电膏构成的表面电极的半导体元件的结构中,能够确保接合可靠性的同时,使表面电极和外部电极的连接方法或连接工序简化。
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