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公开(公告)号：CN108461457A
公开(公告)日：2018-08-28
申请号：CN201810065539.3
申请日：2013-11-04
申请人： 瑞萨电子株式会社
发明人： 金田芳晴
IPC分类号： H01L23/31 , H01L23/495 , H01L23/488 , H01L21/48 , H01L21/60
CPC分类号： H01L23/49503 , H01L21/4842 , H01L23/3107 , H01L23/3142 , H01L23/4952 , H01L23/49524 , H01L23/49541 , H01L23/49548 , H01L23/49582 , H01L24/06 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/83 , H01L24/85 , H01L24/92 , H01L2224/04042 , H01L2224/05553 , H01L2224/05554 , H01L2224/0603 , H01L2224/29101 , H01L2224/32245 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48175 , H01L2224/48247 , H01L2224/48465 , H01L2224/48472 , H01L2224/48639 , H01L2224/48655 , H01L2224/48739 , H01L2224/48755 , H01L2224/48839 , H01L2224/48855 , H01L2224/4903 , H01L2224/49505 , H01L2224/73265 , H01L2224/85205 , H01L2224/85439 , H01L2224/85455 , H01L2224/92247 , H01L2924/1305 , H01L2924/13091 , H01L2924/15747 , H01L2924/1576 , H01L2924/181 , H01L2924/18301 , H01L2924/00 , H01L2924/00014 , H01L2924/20752 , H01L2924/2076 , H01L2924/00012 , H01L2924/014 , H01L2924/01046
摘要： 一种半导体器件及其制造方法，谋求半导体器件的低成本化。封装(7)的多条引线的针脚式接合部(3bc)包括最表面被实施了Ag镀层(8b)的第1区域(3bd)、和最表面被实施了Ni镀层(8a)的第2区域(3be)，第2区域配置在芯片焊盘(3a)侧，第1区域配置在封固体(4)的周缘部侧。因此，在各针脚式接合部中，能够通过第1区域和第2区域区分对最表面实施的电镀层种类，并能够使粗的Al导线(6b)与第2引线(3bb)的第2区域连接，使细的Au导线(6a)与第1引线(3ba)的第1区域连接。其结果为，能够避免仅使用Au镀层的情况，从而谋求封装(7)的低成本化。
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公开(公告)号：CN105633039A
公开(公告)日：2016-06-01
申请号：CN201510437713.9
申请日：2015-07-23
申请人： 意法半导体股份有限公司
CPC分类号： H01L24/48 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/08 , H01L24/43 , H01L24/45 , H01L24/85 , H01L2224/05647 , H01L2224/0603 , H01L2224/45015 , H01L2224/45147 , H01L2224/4847 , H01L2224/48491 , H01L2224/48839 , H01L2924/00014 , H01L2924/3511 , H01L2924/3512 , H01L2924/2076
摘要： 一种具有引线键合和烧结区域的半导体器件及其制造工艺。一种电子器件包括：半导体基体(24)；前部金属化区域(33b)；顶部缓冲区域(31b)，其被设置在前部金属化区域(33b)和半导体基体(24)之间；以及导电引线(40)，其电连接到前部金属化区域(33b)。顶部缓冲区域(31b)至少部分地被烧结。
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公开(公告)号：CN102593081B
公开(公告)日：2016-01-20
申请号：CN201210008411.6
申请日：2012-01-12
申请人： 英飞凌科技股份有限公司
发明人： R.巴耶雷尔
IPC分类号： H01L23/373 , H01L21/48 , H01L21/50
CPC分类号： H01L24/29 , H01L23/051 , H01L23/057 , H01L23/24 , H01L23/36 , H01L23/373 , H01L23/3735 , H01L23/49811 , H01L24/05 , H01L24/06 , H01L24/32 , H01L24/33 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/85 , H01L25/072 , H01L2224/04026 , H01L2224/04042 , H01L2224/0508 , H01L2224/05083 , H01L2224/05124 , H01L2224/05139 , H01L2224/05144 , H01L2224/05155 , H01L2224/05171 , H01L2224/05639 , H01L2224/05647 , H01L2224/05693 , H01L2224/06181 , H01L2224/27505 , H01L2224/29 , H01L2224/29101 , H01L2224/29111 , H01L2224/29139 , H01L2224/29144 , H01L2224/29147 , H01L2224/29298 , H01L2224/32113 , H01L2224/32225 , H01L2224/32245 , H01L2224/33181 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/4811 , H01L2224/48177 , H01L2224/48227 , H01L2224/48229 , H01L2224/48247 , H01L2224/48472 , H01L2224/48639 , H01L2224/48647 , H01L2224/48739 , H01L2224/48747 , H01L2224/48839 , H01L2224/48847 , H01L2224/48893 , H01L2224/73265 , H01L2224/83439 , H01L2224/83444 , H01L2224/83455 , H01L2224/83464 , H01L2224/8384 , H01L2224/85205 , H01L2924/00011 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/0133 , H01L2924/014 , H01L2924/10253 , H01L2924/12043 , H01L2924/1305 , H01L2924/13055 , H01L2924/1306 , H01L2924/13091 , H01L2924/15747 , H01L2924/15787 , H01L2924/181 , H01L2924/00012 , H01L2924/00 , H01L2924/00014 , H01L2924/3512 , H01L2224/48793 , H01L2224/48693 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299 , H01L2224/2929 , H01L2224/83205
摘要： 本发明涉及包括散热器的半导体器件。半导体器件包括：包括背面金属的半导体芯片；衬底；以及直接接触背面金属的导电散热器。所述半导体芯片包括直接接触散热器且将散热器与衬底电耦合的烧结接头。
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公开(公告)号：CN105006462A
公开(公告)日：2015-10-28
申请号：CN201510378917.X
申请日：2010-06-17
申请人： 罗姆股份有限公司
IPC分类号： H01L23/488 , H01L21/60
CPC分类号： H01L24/85 , B23K20/005 , B23K20/10 , B23K20/24 , H01L21/56 , H01L23/3107 , H01L23/49503 , H01L23/49513 , H01L23/4952 , H01L23/49548 , H01L23/49582 , H01L24/03 , H01L24/05 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/83 , H01L2224/02166 , H01L2224/04042 , H01L2224/05554 , H01L2224/05624 , H01L2224/29111 , H01L2224/29113 , H01L2224/29118 , H01L2224/2919 , H01L2224/2929 , H01L2224/29339 , H01L2224/32225 , H01L2224/32245 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48451 , H01L2224/48453 , H01L2224/48465 , H01L2224/48471 , H01L2224/48479 , H01L2224/48507 , H01L2224/48624 , H01L2224/48639 , H01L2224/48724 , H01L2224/48739 , H01L2224/48747 , H01L2224/48824 , H01L2224/48839 , H01L2224/48847 , H01L2224/49171 , H01L2224/73265 , H01L2224/78301 , H01L2224/78303 , H01L2224/78307 , H01L2224/78309 , H01L2224/83 , H01L2224/8314 , H01L2224/83192 , H01L2224/83439 , H01L2224/838 , H01L2224/85 , H01L2224/85045 , H01L2224/85051 , H01L2224/85181 , H01L2224/85186 , H01L2224/85205 , H01L2224/85439 , H01L2224/8592 , H01L2224/85986 , H01L2224/92 , H01L2224/92247 , H01L2224/97 , H01L2924/00012 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01012 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01016 , H01L2924/01019 , H01L2924/0102 , H01L2924/01022 , H01L2924/01023 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/0104 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01051 , H01L2924/01066 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01204 , H01L2924/01205 , H01L2924/01206 , H01L2924/013 , H01L2924/0132 , H01L2924/01322 , H01L2924/01327 , H01L2924/0133 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/05442 , H01L2924/0665 , H01L2924/10162 , H01L2924/10253 , H01L2924/12042 , H01L2924/15747 , H01L2924/181 , H01L2924/18301 , H01L2924/19107 , H01L2924/20752 , H01L2924/20757 , H01L2924/3512 , H01L2924/01026 , H01L2924/00 , H01L2924/2076 , H01L2924/207 , H01L2924/20753 , H01L2924/20756 , H01L2924/20758 , H01L2924/00015
摘要： 本发明提供一种半导体装置。该半导体装置包括：层问绝缘膜，其形成在半导体基板上；最上层布线，其由铜构成且形成在所述层间绝缘膜上；钝化膜，其形成在所述最上层布线上，且具有使所述最上层布线的表面作为电极焊盘而选择性露出的焊盘开口；和焊线，其由铜构成，且直接接合于所述电极焊盘。
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公开(公告)号：CN102484080B
公开(公告)日：2015-07-22
申请号：CN201080023252.6
申请日：2010-06-17
申请人： 罗姆股份有限公司
IPC分类号： H01L21/60 , H01L21/3205 , H01L23/29 , H01L23/31 , H01L23/52
CPC分类号： H01L24/85 , B23K20/005 , B23K20/10 , B23K20/24 , H01L21/56 , H01L23/3107 , H01L23/49503 , H01L23/49513 , H01L23/4952 , H01L23/49548 , H01L23/49582 , H01L24/03 , H01L24/05 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/83 , H01L2224/02166 , H01L2224/04042 , H01L2224/05554 , H01L2224/05624 , H01L2224/29111 , H01L2224/29113 , H01L2224/29118 , H01L2224/2919 , H01L2224/2929 , H01L2224/29339 , H01L2224/32225 , H01L2224/32245 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48451 , H01L2224/48453 , H01L2224/48465 , H01L2224/48471 , H01L2224/48479 , H01L2224/48507 , H01L2224/48624 , H01L2224/48639 , H01L2224/48724 , H01L2224/48739 , H01L2224/48747 , H01L2224/48824 , H01L2224/48839 , H01L2224/48847 , H01L2224/49171 , H01L2224/73265 , H01L2224/78301 , H01L2224/78303 , H01L2224/78307 , H01L2224/78309 , H01L2224/83 , H01L2224/8314 , H01L2224/83192 , H01L2224/83439 , H01L2224/838 , H01L2224/85 , H01L2224/85045 , H01L2224/85051 , H01L2224/85181 , H01L2224/85186 , H01L2224/85205 , H01L2224/85439 , H01L2224/8592 , H01L2224/85986 , H01L2224/92 , H01L2224/92247 , H01L2224/97 , H01L2924/00012 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01012 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01016 , H01L2924/01019 , H01L2924/0102 , H01L2924/01022 , H01L2924/01023 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/0104 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01051 , H01L2924/01066 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01204 , H01L2924/01205 , H01L2924/01206 , H01L2924/013 , H01L2924/0132 , H01L2924/01322 , H01L2924/01327 , H01L2924/0133 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/05442 , H01L2924/0665 , H01L2924/10162 , H01L2924/10253 , H01L2924/12042 , H01L2924/15747 , H01L2924/181 , H01L2924/18301 , H01L2924/19107 , H01L2924/20752 , H01L2924/20757 , H01L2924/3512 , H01L2924/01026 , H01L2924/00 , H01L2924/2076 , H01L2924/207 , H01L2924/20753 , H01L2924/20756 , H01L2924/20758 , H01L2924/00015
摘要： 本发明是提供一种半导体装置。该半导体装置包括：半导体芯片；电极焊盘，其由含铝的金属材料构成，且形成在所述半导体芯片的表面；电极引脚，其配置在所述半导体芯片的周围；焊线，其具有线状延伸的主体部、和形成在所述主体部的两端且与所述电极焊盘以及所述电极引脚分别接合的焊盘接合部以及引脚接合部；和树脂封装，其对所述半导体芯片、所述电极引脚以及所述焊线进行密封，所述焊线由铜构成，所述电极焊盘整体以及所述焊盘接合部整体被非透水膜呈一体地覆盖。
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公开(公告)号：CN102842539B
公开(公告)日：2015-06-24
申请号：CN201210313521.3
申请日：2008-07-24
申请人： 新日铁住金高新材料株式会社 , 日铁住金新材料股份有限公司
IPC分类号： H01L23/00
CPC分类号： H01L24/85 , H01L24/05 , H01L24/43 , H01L24/45 , H01L24/48 , H01L2224/04042 , H01L2224/05624 , H01L2224/4312 , H01L2224/4321 , H01L2224/43825 , H01L2224/43847 , H01L2224/43848 , H01L2224/43986 , H01L2224/45015 , H01L2224/45144 , H01L2224/45147 , H01L2224/45565 , H01L2224/45572 , H01L2224/456 , H01L2224/45639 , H01L2224/45644 , H01L2224/45655 , H01L2224/45664 , H01L2224/45669 , H01L2224/45671 , H01L2224/45673 , H01L2224/4568 , H01L2224/45684 , H01L2224/48011 , H01L2224/48227 , H01L2224/48247 , H01L2224/4845 , H01L2224/48463 , H01L2224/48472 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48664 , H01L2224/48724 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48864 , H01L2224/78251 , H01L2224/78301 , H01L2224/85045 , H01L2224/85048 , H01L2224/85065 , H01L2224/85075 , H01L2224/85203 , H01L2224/85205 , H01L2224/85207 , H01L2224/85439 , H01L2224/85444 , H01L2224/85464 , H01L2224/859 , H01L2924/00011 , H01L2924/00015 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01042 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01058 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01105 , H01L2924/01204 , H01L2924/01327 , H01L2924/014 , H01L2924/10253 , H01L2924/12041 , H01L2924/15747 , H01L2924/20105 , H01L2924/20106 , H01L2924/20107 , H01L2924/20752 , H01L2924/20753 , H01L2924/20754 , H01L2924/20755 , H01L2924/20756 , H01L2924/20757 , H01L2924/20758 , H01L2924/20759 , H01L2924/3025 , H01L2924/3861 , H01L2924/01001 , H01L2924/01203 , H01L2924/01034 , H01L2924/01081 , H01L2924/20645 , H01L2924/20652 , H01L2924/20653 , H01L2924/00014 , H01L2924/20108 , H01L2224/45657 , H01L2224/45666 , H01L2924/01008 , H01L2924/20109 , H01L2924/2011 , H01L2924/20111 , H01L2924/2076 , H01L2924/2065 , H01L2924/20651 , H01L2924/20654 , H01L2924/00 , H01L2224/45124 , H01L2924/013 , H01L2924/20751 , H01L2924/2075 , H01L2924/00013 , H01L2924/01049
摘要： 本发明的目的是提供材料费廉价且球接合性、热循环试验或软熔试验的可靠性优异、保管寿命也良好的也适应于窄间距用细线化的铜系接合线。本发明的半导体装置用接合线是具有以铜为主成分的芯材、和设置在所述芯材上的含有成分和组成的某一方或两方与所述芯材不同的金属M和铜的外层的接合线，其特征在于，所述外层的厚度为0.021～0.12μm，所述金属M为Pd，所述外层为含有50mol%以上的Pd的部位。
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公开(公告)号：CN103681595A
公开(公告)日：2014-03-26
申请号：CN201310725962.9
申请日：2009-12-02
申请人： 瑞萨电子株式会社
IPC分类号： H01L23/498 , H01L23/49
CPC分类号： H01L24/05 , H01L21/565 , H01L22/32 , H01L23/485 , H01L23/49816 , H01L24/06 , H01L24/12 , H01L24/16 , H01L24/45 , H01L24/46 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/78 , H01L24/81 , H01L24/85 , H01L25/0657 , H01L2224/02166 , H01L2224/02205 , H01L2224/0347 , H01L2224/0401 , H01L2224/04042 , H01L2224/05027 , H01L2224/05082 , H01L2224/05083 , H01L2224/05084 , H01L2224/05124 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05157 , H01L2224/05164 , H01L2224/05166 , H01L2224/05169 , H01L2224/05173 , H01L2224/05181 , H01L2224/05184 , H01L2224/05553 , H01L2224/05554 , H01L2224/05558 , H01L2224/05564 , H01L2224/05568 , H01L2224/05572 , H01L2224/05583 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/0568 , H01L2224/06183 , H01L2224/1134 , H01L2224/13099 , H01L2224/13144 , H01L2224/13147 , H01L2224/16225 , H01L2224/2919 , H01L2224/29198 , H01L2224/32145 , H01L2224/32225 , H01L2224/32245 , H01L2224/4502 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/45164 , H01L2224/46 , H01L2224/4807 , H01L2224/48095 , H01L2224/48145 , H01L2224/48158 , H01L2224/48247 , H01L2224/48453 , H01L2224/48465 , H01L2224/48471 , H01L2224/48507 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48655 , H01L2224/48664 , H01L2224/4868 , H01L2224/48724 , H01L2224/48739 , H01L2224/48744 , H01L2224/48747 , H01L2224/48755 , H01L2224/48764 , H01L2224/4878 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48855 , H01L2224/48864 , H01L2224/4888 , H01L2224/49171 , H01L2224/49175 , H01L2224/73204 , H01L2224/73265 , H01L2224/78301 , H01L2224/81193 , H01L2224/81801 , H01L2224/83101 , H01L2224/85181 , H01L2224/85186 , H01L2224/85205 , H01L2224/85207 , H01L2224/85439 , H01L2224/85444 , H01L2224/85464 , H01L2225/0651 , H01L2225/06517 , H01L2924/00011 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01025 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01061 , H01L2924/01065 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/078 , H01L2924/09701 , H01L2924/10253 , H01L2924/12042 , H01L2924/1306 , H01L2924/13091 , H01L2924/14 , H01L2924/15311 , H01L2924/15787 , H01L2924/15788 , H01L2924/181 , H01L2924/19041 , H01L2924/19043 , H01L2924/3511 , H01L2924/00014 , H01L2924/01039 , H01L2924/0665 , H01L2224/48227 , H01L2924/00 , H01L2924/00012 , H01L2924/0002 , H01L2924/00015
摘要： 本发明提供一种半导体集成电路器件。在用于车辆用途等的半导体集成电路器件中，为便于安装，通常通过导线键合等，使用金导线等将半导体芯片上的铝焊盘和外部器件彼此耦合。然而，这种半导体集成电路器件由于在相对较高温度(约150℃)下长时间的使用中铝和金之间的相互作用而造成连接故障。本申请的发明提供一种半导体集成电路器件(半导体器件或电子电路器件)，其包括作为该器件的一部分的半导体芯片、经由阻挡金属膜设置在半导体芯片上基于铝的键合焊盘之上的电解金镀覆表面膜(基于金的金属镀覆膜)和用于该镀覆表面膜和设置在布线板等(布线衬底)之上的外部引线之间的互连的金键合导线(基于金的键合导线)。
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公开(公告)号：CN103515252A
公开(公告)日：2014-01-15
申请号：CN201310158510.7
申请日：2013-05-02
申请人： 新科金朋有限公司
IPC分类号： H01L21/56 , H01L21/60 , H05K3/34 , H01L23/31 , H01L23/538
CPC分类号： H01L23/49827 , H01L21/4853 , H01L21/56 , H01L21/561 , H01L21/568 , H01L21/78 , H01L23/3114 , H01L23/3121 , H01L23/3128 , H01L23/49811 , H01L23/49816 , H01L23/49822 , H01L23/5389 , H01L23/562 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/19 , H01L24/20 , H01L24/24 , H01L24/27 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/81 , H01L24/82 , H01L24/83 , H01L24/85 , H01L24/92 , H01L24/94 , H01L24/97 , H01L25/03 , H01L25/50 , H01L2224/0401 , H01L2224/04042 , H01L2224/04105 , H01L2224/05082 , H01L2224/05611 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/06131 , H01L2224/06133 , H01L2224/1132 , H01L2224/11334 , H01L2224/1134 , H01L2224/1145 , H01L2224/11462 , H01L2224/11464 , H01L2224/11849 , H01L2224/11901 , H01L2224/12105 , H01L2224/131 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/16225 , H01L2224/2101 , H01L2224/215 , H01L2224/2401 , H01L2224/24011 , H01L2224/2402 , H01L2224/245 , H01L2224/27334 , H01L2224/32225 , H01L2224/32245 , H01L2224/45147 , H01L2224/48091 , H01L2224/48225 , H01L2224/48227 , H01L2224/48245 , H01L2224/48247 , H01L2224/48811 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48855 , H01L2224/73253 , H01L2224/73265 , H01L2224/73267 , H01L2224/81191 , H01L2224/82101 , H01L2224/82104 , H01L2224/82106 , H01L2224/83132 , H01L2224/83191 , H01L2224/83192 , H01L2224/83856 , H01L2224/85411 , H01L2224/85424 , H01L2224/85439 , H01L2224/85444 , H01L2224/85447 , H01L2224/85455 , H01L2224/92147 , H01L2224/92244 , H01L2224/92247 , H01L2224/94 , H01L2224/97 , H01L2924/00011 , H01L2924/01322 , H01L2924/12041 , H01L2924/12042 , H01L2924/1306 , H01L2924/13091 , H01L2924/15311 , H01L2924/181 , H01L2924/1815 , H01L2924/3025 , H01L2924/3511 , H01L2924/3512 , H01L2924/00014 , H01L2924/00 , H01L2224/03 , H01L2924/00012 , H01L2224/83 , H01L2224/85 , H01L2224/27 , H01L2924/014 , H01L2924/01082 , H01L2924/0105 , H01L2224/81805 , H01L2924/01005
摘要： 本发明涉及形成嵌入式SoP扇出型封装的半导体器件和方法。一种半导体器件，包括球栅阵列（BGA）封装，球栅阵列（BGA）封装包括第一凸块。在第一凸块之间将第一半导体管芯安装至BGA封装。将BGA封装和第一半导体管芯安装至载体。将第一密封剂沉积在载体之上以及BGA封装和第一半导体管芯周围。移除载体，以暴露第一凸块和第一半导体管芯。将互连结构电连接至第一凸块和第一半导体管芯。BGA封装还包括衬底和第二半导体管芯，第二半导体管芯被安装且电连接至衬底。将第二密封剂沉积在第二半导体管芯和衬底之上。在衬底之上与第二半导体管芯相对地形成第一凸块。在BGA封装之上形成翘曲平衡层。
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公开(公告)号：CN102842539A
公开(公告)日：2012-12-26
申请号：CN201210313521.3
申请日：2008-07-24
申请人： 新日铁高新材料株式会社 , 日铁新材料股份有限公司
IPC分类号： H01L23/00
CPC分类号： H01L24/85 , H01L24/05 , H01L24/43 , H01L24/45 , H01L24/48 , H01L2224/04042 , H01L2224/05624 , H01L2224/4312 , H01L2224/4321 , H01L2224/43825 , H01L2224/43847 , H01L2224/43848 , H01L2224/43986 , H01L2224/45015 , H01L2224/45144 , H01L2224/45147 , H01L2224/45565 , H01L2224/45572 , H01L2224/456 , H01L2224/45639 , H01L2224/45644 , H01L2224/45655 , H01L2224/45664 , H01L2224/45669 , H01L2224/45671 , H01L2224/45673 , H01L2224/4568 , H01L2224/45684 , H01L2224/48011 , H01L2224/48227 , H01L2224/48247 , H01L2224/4845 , H01L2224/48463 , H01L2224/48472 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48664 , H01L2224/48724 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48864 , H01L2224/78251 , H01L2224/78301 , H01L2224/85045 , H01L2224/85048 , H01L2224/85065 , H01L2224/85075 , H01L2224/85203 , H01L2224/85205 , H01L2224/85207 , H01L2224/85439 , H01L2224/85444 , H01L2224/85464 , H01L2224/859 , H01L2924/00011 , H01L2924/00015 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01042 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01058 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01105 , H01L2924/01204 , H01L2924/01327 , H01L2924/014 , H01L2924/10253 , H01L2924/12041 , H01L2924/15747 , H01L2924/20105 , H01L2924/20106 , H01L2924/20107 , H01L2924/20752 , H01L2924/20753 , H01L2924/20754 , H01L2924/20755 , H01L2924/20756 , H01L2924/20757 , H01L2924/20758 , H01L2924/20759 , H01L2924/3025 , H01L2924/3861 , H01L2924/01001 , H01L2924/01203 , H01L2924/01034 , H01L2924/01081 , H01L2924/20645 , H01L2924/20652 , H01L2924/20653 , H01L2924/00014 , H01L2924/20108 , H01L2224/45657 , H01L2224/45666 , H01L2924/01008 , H01L2924/20109 , H01L2924/2011 , H01L2924/20111 , H01L2924/2076 , H01L2924/2065 , H01L2924/20651 , H01L2924/20654 , H01L2924/00 , H01L2224/45124 , H01L2924/013 , H01L2924/20751 , H01L2924/2075 , H01L2924/00013 , H01L2924/01049
摘要： 本发明的目的是提供材料费廉价且球接合性、热循环试验或软熔试验的可靠性优异、保管寿命也良好的也适应于窄间距用细线化的铜系接合线。本发明的半导体装置用接合线是具有以铜为主成分的芯材、和设置在所述芯材上的含有成分和组成的某一方或两方与所述芯材不同的金属M和铜的外层的接合线，其特征在于，所述外层的厚度为0.021～0.12μm，所述金属M为Pd，所述外层为含有50mol%以上的Pd的部位。
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公开(公告)号：CN101689517B
公开(公告)日：2012-10-17
申请号：CN200880023088.1
申请日：2008-07-24
申请人： 新日铁高新材料株式会社 , 日铁新材料股份有限公司
CPC分类号： H01L24/85 , H01L24/05 , H01L24/43 , H01L24/45 , H01L24/48 , H01L2224/04042 , H01L2224/05624 , H01L2224/4312 , H01L2224/4321 , H01L2224/43825 , H01L2224/43847 , H01L2224/43848 , H01L2224/43986 , H01L2224/45015 , H01L2224/45144 , H01L2224/45147 , H01L2224/45565 , H01L2224/45572 , H01L2224/456 , H01L2224/45639 , H01L2224/45644 , H01L2224/45655 , H01L2224/45664 , H01L2224/45669 , H01L2224/45671 , H01L2224/45673 , H01L2224/4568 , H01L2224/45684 , H01L2224/48011 , H01L2224/48227 , H01L2224/48247 , H01L2224/4845 , H01L2224/48463 , H01L2224/48472 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48664 , H01L2224/48724 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48864 , H01L2224/78251 , H01L2224/78301 , H01L2224/85045 , H01L2224/85048 , H01L2224/85065 , H01L2224/85075 , H01L2224/85203 , H01L2224/85205 , H01L2224/85207 , H01L2224/85439 , H01L2224/85444 , H01L2224/85464 , H01L2224/859 , H01L2924/00011 , H01L2924/00015 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01042 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01058 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01105 , H01L2924/01204 , H01L2924/01327 , H01L2924/014 , H01L2924/10253 , H01L2924/12041 , H01L2924/15747 , H01L2924/20105 , H01L2924/20106 , H01L2924/20107 , H01L2924/20752 , H01L2924/20753 , H01L2924/20754 , H01L2924/20755 , H01L2924/20756 , H01L2924/20757 , H01L2924/20758 , H01L2924/20759 , H01L2924/3025 , H01L2924/3861 , H01L2924/01001 , H01L2924/01203 , H01L2924/01034 , H01L2924/01081 , H01L2924/20645 , H01L2924/20652 , H01L2924/20653 , H01L2924/00014 , H01L2924/20108 , H01L2224/45657 , H01L2224/45666 , H01L2924/01008 , H01L2924/20109 , H01L2924/2011 , H01L2924/20111 , H01L2924/2076 , H01L2924/2065 , H01L2924/20651 , H01L2924/20654 , H01L2924/00 , H01L2224/45124 , H01L2924/013 , H01L2924/20751 , H01L2924/2075 , H01L2924/00013 , H01L2924/01049
摘要： 本发明的目的是提供材料费廉价且球接合性、热循环试验或软熔试验的可靠性优异、保管寿命也良好的也适应于窄间距用细线化的铜系接合线。本发明的半导体装置用接合线是具有以铜为主成分的芯材、和设置在所述芯材上的含有成分和组成的某一方或两方与所述芯材不同的金属M和铜的外层的接合线，其特征在于，所述外层的厚度为0.021～0.12μm。
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