METHOD OF DICING
    2.
    发明申请
    METHOD OF DICING 审中-公开
    方法

    公开(公告)号:US20080160724A1

    公开(公告)日:2008-07-03

    申请号:US11945896

    申请日:2007-11-27

    IPC分类号: H01L21/304

    摘要: Provided is a method of dicing a wafer where a plurality of semiconductor device regions is formed on a front side of the wafer, the semiconductor device regions being separated by scribe lanes, the method comprising dicing the wafer by irradiating a laser beam on a backside of the wafer along the scribe lanes. A laser beam is irradiated from an opposite side of the semiconductor device regions of the wafer so that thermal influence on the semiconductor device regions is minimized to improve the strength of a semiconductor chip. Furthermore, a third tape is used to maintain an arrangement of the semiconductor chips so as to minimize adherence problems caused by the laser beam.

    摘要翻译: 本发明提供一种切割晶片的方法,其中在晶片的正面形成有多个半导体器件区域,半导体器件区域被划线分隔开,该方法包括通过在背面侧照射激光束来对晶片进行切割 沿着划线的晶圆。 从晶片的半导体器件区域的相对侧照射激光束,使得对半导体器件区域的热影响最小化,以提高半导体芯片的强度。 此外,使用第三带来保持半导体芯片的布置,以便最小化由激光束引起的粘附问题。

    Apparatus for detaching a semiconductor chip from a tape
    6.
    发明授权
    Apparatus for detaching a semiconductor chip from a tape 失效
    用于从胶带上分离半导体芯片的装置

    公开(公告)号:US07624498B2

    公开(公告)日:2009-12-01

    申请号:US11755170

    申请日:2007-05-30

    IPC分类号: B23P19/00 H01L21/00

    摘要: An apparatus for and a method of detaching a semiconductor chip from a tape minimize the likelihood that the semiconductor chip will crack. The apparatus includes a holder, a first ejector having an upper end, and a second ejector whose upper end is disposed centrally of that of the first ejector. The holder has an upper portion and a through-hole extending through the upper portion. The ejectors have upper ends that are extendable and retractable out of and back into the holder via the through-hole in the upper portion of the holder. A tape to which at least one semiconductor chip is attached is set against the upper portion of the holder. The first ejector is extended a first distance from the holder to push the semiconductor chip upward. The second ejector is extended from the holder by a second distance larger than the first distance so as to push the semiconductor chip further upward. Thus, the tape is progressively detached from the semiconductor chip.

    摘要翻译: 从半导体芯片上分离半导体芯片的方法和方法最小化了半导体芯片会破裂的可能性。 该装置包括保持器,具有上端的第一喷射器和其上端设置在第一喷射器的中心的第二喷射器。 保持器具有延伸穿过上部的上部和通孔。 喷射器具有可以通过保持器上部的通孔而延伸和缩回到保持器内的上端。 安装有至少一个半导体芯片的胶带抵靠着保持器的上部。 第一喷射器从保持器延伸第一距离以向上推半导体芯片。 第二喷射器从保持器延伸大于第一距离的第二距离,以将半导体芯片进一步向上推。 因此,磁带从半导体芯片逐渐分离。

    METHOD OF AND APPARATUS FOR DETACHING SEMICONDUCTOR CHIPS FROM A TAPE
    9.
    发明申请
    METHOD OF AND APPARATUS FOR DETACHING SEMICONDUCTOR CHIPS FROM A TAPE 审中-公开
    用于从胶带中分离半导体器件的方法和装置

    公开(公告)号:US20100037445A1

    公开(公告)日:2010-02-18

    申请号:US12603913

    申请日:2009-10-22

    IPC分类号: B23P19/04

    摘要: An apparatus for and a method of detaching a semiconductor chip from a tape minimize the likelihood that the semiconductor chip will crack. The apparatus includes a holder, a first ejector having an upper end, and a second ejector whose upper end is disposed centrally of that of the first ejector. The holder has an upper portion and a through-hole extending through the upper portion. The ejectors have upper ends that are extendable and retractable out of and back into the holder via the through-hole in the upper portion of the holder. A tape to which at least one semiconductor chip is attached is set against the upper portion of the holder. The first ejector is extended a first distance from the holder to push the semiconductor chip upward. The second ejector is extended from the holder by a second distance larger than the first distance so as to push the semiconductor chip further upward. Thus, the tape is progressively detached from the semiconductor chip.

    摘要翻译: 从半导体芯片上分离半导体芯片的方法和方法最小化了半导体芯片会破裂的可能性。 该装置包括保持器,具有上端的第一喷射器和其上端设置在第一喷射器的中心的第二喷射器。 保持器具有延伸穿过上部的上部和通孔。 喷射器具有可以通过保持器上部的通孔而延伸和缩回到保持器内的上端。 安装有至少一个半导体芯片的胶带抵靠着保持器的上部。 第一喷射器从保持器延伸第一距离以向上推半导体芯片。 第二喷射器从保持器延伸大于第一距离的第二距离,以将半导体芯片进一步向上推。 因此,磁带从半导体芯片逐渐分离。