公开(公告)号：US20160086896A1

公开(公告)日：2016-03-24

申请号：US14958155

申请日：2015-12-03

Applicant: XINTEC INC.

Inventor： Yu-Lung HUANG ,  Chao-Yen LIN ,  Wei-Luen SUEN ,  Chien-Hui CHEN

IPC: H01L23/58 ,  H01L21/78 ,  H01L21/283 ,  H01L21/48

CPC classification number: H01L23/585 ,  H01L21/283 ,  H01L21/4853 ,  H01L21/561 ,  H01L21/6836 ,  H01L21/768 ,  H01L21/78 ,  H01L23/3121 ,  H01L23/49838 ,  H01L23/525 ,  H01L24/05 ,  H01L24/16 ,  H01L24/48 ,  H01L29/0657 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2224/02371 ,  H01L2224/02375 ,  H01L2224/02379 ,  H01L2224/02381 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05548 ,  H01L2224/05558 ,  H01L2224/06165 ,  H01L2224/06167 ,  H01L2224/1302 ,  H01L2224/131 ,  H01L2224/16105 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/24226 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73215 ,  H01L2224/73253 ,  H01L2224/94 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/1306 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2924/00 ,  H01L2224/03 ,  H01L2924/014 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2924/00012

Abstract: An embodiment of the invention provides a chip package including a semiconductor substrate having a first surface and a second surface opposite thereto. A conducting pad is located on the first surface. A side recess is on at least a first side of the semiconductor substrate, wherein the side recess extends from the first surface toward the second surface and across the entire length of the first side. A conducting layer is located on the first surface and electrically connected to the conducting pad, wherein the conducting layer extends to the side recess.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括具有第一表面和与其相对的第二表面的半导体衬底。 导电垫位于第一表面上。 侧凹部位于半导体衬底的至少第一侧上，其中侧凹部从第一表面朝向第二表面延伸并跨越第一侧的整个长度。 导电层位于第一表面上并电连接到导电焊盘，其中导电层延伸到侧凹槽。

公开(公告)号：US20140015111A1

公开(公告)日：2014-01-16

申请号：US13941854

申请日：2013-07-15

Applicant: XINTEC INC.

Inventor： Yen-Shih HO ,  Shih-Chin CHEN ,  Yi-Ming CHANG ,  Chien-Hui CHEN ,  Chia-Ming CHENG ,  Wei-Luen SUEN ,  Chen-Han CHIANG

IPC: H01L23/544 ,  H01L21/78

CPC classification number: H01L23/544 ,  H01L21/78 ,  H01L23/3185 ,  H01L24/05 ,  H01L24/06 ,  H01L24/13 ,  H01L24/14 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2223/5446 ,  H01L2224/02371 ,  H01L2224/02377 ,  H01L2224/03462 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/05554 ,  H01L2224/05567 ,  H01L2224/05569 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05669 ,  H01L2224/06155 ,  H01L2224/0616 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2224/14155 ,  H01L2224/1416 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2224/03 ,  H01L2224/11 ,  H01L2924/014 ,  H01L2924/00 ,  H01L2224/05552

Abstract: An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and an opposite second surface; a device region disposed in the substrate; a dielectric layer located on the first surface of the semiconductor substrate; a plurality of conducting pads located in the dielectric layer and electrically connected to the device region; at least one alignment mark disposed in the semiconductor substrate and extending from the second surface towards the first surface.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：具有第一表面和相对的第二表面的半导体衬底; 设置在所述基板中的装置区域; 位于半导体衬底的第一表面上的电介质层; 位于所述电介质层中并电连接到所述器件区域的多个导电焊盘; 设置在所述半导体衬底中并且从所述第二表面朝向所述第一表面延伸的至少一个对准标记。

公开(公告)号：US20140332969A1

公开(公告)日：2014-11-13

申请号：US14339355

申请日：2014-07-23

Applicant: XINTEC INC.

Inventor： Yen-Shih HO ,  Tsang-Yu LIU ,  Shu-Ming CHANG ,  Yu-Lung HUANG ,  Chao-Yen LIN ,  Wei-Luen SUEN ,  Chien-Hui CHEN ,  Chi-Chang LIAO

IPC: H01L23/00 ,  H01L21/78 ,  H01L21/768 ,  H01L23/48

CPC classification number: H01L24/05 ,  H01L21/561 ,  H01L21/76838 ,  H01L21/78 ,  H01L23/3121 ,  H01L23/3192 ,  H01L23/525 ,  H01L23/5329 ,  H01L24/16 ,  H01L24/32 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L25/0657 ,  H01L29/0657 ,  H01L2224/02381 ,  H01L2224/024 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05548 ,  H01L2224/05558 ,  H01L2224/05567 ,  H01L2224/05572 ,  H01L2224/05611 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/05687 ,  H01L2224/0569 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2224/48227 ,  H01L2224/48611 ,  H01L2224/48624 ,  H01L2224/48644 ,  H01L2224/48647 ,  H01L2224/48655 ,  H01L2224/48669 ,  H01L2224/48687 ,  H01L2224/4869 ,  H01L2224/73203 ,  H01L2224/73265 ,  H01L2224/94 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/10253 ,  H01L2924/10523 ,  H01L2924/12041 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/3701 ,  H01L2224/03 ,  H01L2924/00 ,  H01L2224/05552 ,  H01L2924/00012

Abstract: A chip package including a chip having an upper surface, a lower surface and a sidewall is provided. The chip includes a signal pad region adjacent to the upper surface. A first recess extends from the upper surface toward the lower surface along the sidewall. At least one second recess extends from a first bottom of the first recess toward the lower surface. The first and second recesses further laterally extend along a side of the upper surface, and a length of the first recess extending along the side is greater than that of the second recess extending along the side. A redistribution layer is electrically connected to the signal pad region and extends into the second recess. A method for forming the chip package is also provided.

Abstract translation: 提供了包括具有上表面，下表面和侧壁的芯片的芯片封装。 芯片包括与上表面相邻的信号焊盘区域。 第一凹部沿着侧壁从上表面向下表面延伸。 至少一个第二凹部从第一凹部的第一底部向下表面延伸。 第一和第二凹部沿着上表面的侧面进一步横向延伸，并且沿着侧面延伸的第一凹部的长度大于沿着侧面延伸的第二凹部的长度。 再分配层电连接到信号焊盘区域并延伸到第二凹槽中。 还提供了一种用于形成芯片封装的方法。

公开(公告)号：US20140252659A1

公开(公告)日：2014-09-11

申请号：US14199640

申请日：2014-03-06

Applicant: XINTEC INC.

Inventor： Yung-Tai TSAI ,  Shu-Ming CHANG ,  Chun-Wei CHANG ,  Chien-Hui CHEN ,  Tsang-Yu LIU ,  Yen-Shih HO

IPC: H01L23/00

CPC classification number: H01L24/05 ,  H01L21/78 ,  H01L23/3185 ,  H01L23/3192 ,  H01L24/03 ,  H01L2224/02371 ,  H01L2224/04042 ,  H01L2224/05124 ,  H01L2224/05548 ,  H01L2224/05568 ,  H01L2224/05624 ,  H01L2224/94 ,  H01L2924/10156 ,  H01L2924/1461 ,  H01L2924/00 ,  H01L2224/03 ,  H01L2924/00014

Abstract: A semiconductor structure includes a wafer, at least one nonmetal oxide layer, a pad, a passivation layer, an isolation layer, and a conductive layer. The wafer has a first surface, a second surface, a third surface, a first stage difference surface connected between the second and third surfaces, and a second stage difference surface connected between the first and third surfaces. The nonmetal oxide layer is located on the first surface of the wafer. The pad is located on the nonmetal oxide layer and electrically connected to the wafer. The passivation layer is located on the nonmetal oxide layer. The isolation layer is located on the passivation layer, nonmetal oxide layer, the first, second and third surfaces of the wafer, and the first and second stage difference surfaces of the wafer. The conductive layer is located on the isolation layer and electrically contacts the pad.

Abstract translation: 半导体结构包括晶片，至少一个非金属氧化物层，焊盘，钝化层，隔离层和导电层。 晶片具有连接在第二和第三表面之间的第一表面，第二表面，第三表面，第一阶段差异表面以及连接在第一和第三表面之间的第二阶段差异表面。 非金属氧化物层位于晶片的第一表面上。 垫位于非金属氧化物层上并电连接到晶片。 钝化层位于非金属氧化物层上。 隔离层位于钝化层，非金属氧化物层，晶片的第一，第二和第三表面以及晶片的第一和第二级差分表面上。 导电层位于隔离层上并电接触焊盘。

公开(公告)号：US20140199835A1

公开(公告)日：2014-07-17

申请号：US14214389

申请日：2014-03-14

Applicant: XINTEC INC.

Inventor： Yu-Lin YEN ,  Chien-Hui CHEN ,  Tsang-Yu LIU ,  Long-Sheng YEOU

IPC: H01L21/768

CPC classification number: H01L21/76879 ,  B81B7/007 ,  B81B2207/07 ,  B81B2207/092 ,  H01L21/76805 ,  H01L21/76898 ,  H01L23/3178 ,  H01L23/481 ,  H01L23/49827 ,  H01L24/06 ,  H01L24/13 ,  H01L24/32 ,  H01L24/94 ,  H01L25/0657 ,  H01L2221/68377 ,  H01L2224/0401 ,  H01L2224/05553 ,  H01L2224/0557 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/13025 ,  H01L2224/9202 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01021 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2924/00014 ,  H01L2924/00

Abstract: According to an embodiment of the invention, a chip package is provided. The chip package includes: a substrate having an upper surface and a lower surface; a plurality of conducting pads located under the lower surface of the substrate; a dielectric layer located between the conducting pads; a trench extending from the upper surface towards the lower surface of the substrate; a hole extending from a bottom of the trench towards the lower surface of the substrate, wherein an upper sidewall of the hole inclines to the lower surface of the substrate, and a lower sidewall or a bottom of the hole exposes a portion of the conducting pads; and a conducting layer located in the hole and electrically connected to at least one of the conducting pads.

Abstract translation: 根据本发明的实施例，提供了芯片封装。 芯片封装包括：具有上表面和下表面的基板; 位于所述基板的下表面下方的多个导电垫; 位于导电垫之间的电介质层; 从衬底的上表面延伸到下表面的沟槽; 从所述沟槽的底部延伸到所述衬底的下表面的孔，其中所述孔的上侧壁倾斜到所述衬底的下表面，并且所述孔的下侧壁或底部暴露所述导电垫的一部分 ; 以及导电层，其位于所述孔中并电连接到至少一个所述导电焊盘。

公开(公告)号：US20150162245A1

公开(公告)日：2015-06-11

申请号：US14596185

申请日：2015-01-13

Applicant: XINTEC INC.

Inventor： Bing-Siang CHEN ,  Chien-Hui CHEN ,  Shu-Ming CHANG ,  Tsang-Yu LIU ,  Yen-Shih HO

IPC: H01L21/78 ,  H01L25/00

CPC classification number: H01L21/78 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/16 ,  H01L2225/06513 ,  H01L2225/06582 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/00

Abstract: An embodiment of the invention provides a chip package which includes: a first chip; a second chip disposed on the first chip, wherein a side surface of the second chip is a chemically-etched surface; and a bonding bulk disposed between the first chip and the second chip such that the first chip and the second chip are bonded with each other.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：第一芯片; 设置在所述第一芯片上的第二芯片，其中所述第二芯片的侧表面是化学蚀刻表面; 以及设置在所述第一芯片和所述第二芯片之间的结合体，使得所述第一芯片和所述第二芯片彼此结合。

公开(公告)号：US20140332968A1

公开(公告)日：2014-11-13

申请号：US14339323

申请日：2014-07-23

Applicant: XINTEC INC.

Inventor： Yen-Shih HO ,  Tsang-Yu LIU ,  Shu-Ming CHANG ,  Yu-Lung HUANG ,  Chao-Yen LIN ,  Wei-Luen SUEN ,  Chien-Hui CHEN

IPC: H01L23/498

CPC classification number: H01L23/49805 ,  G06K9/00006 ,  G06K9/00053 ,  H01L21/561 ,  H01L23/3121 ,  H01L23/3135 ,  H01L23/3192 ,  H01L23/525 ,  H01L23/5329 ,  H01L24/05 ,  H01L24/32 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L25/0657 ,  H01L2224/02166 ,  H01L2224/02381 ,  H01L2224/024 ,  H01L2224/04042 ,  H01L2224/05548 ,  H01L2224/05558 ,  H01L2224/05567 ,  H01L2224/05572 ,  H01L2224/05611 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/05687 ,  H01L2224/0569 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2224/48227 ,  H01L2224/48611 ,  H01L2224/48624 ,  H01L2224/48644 ,  H01L2224/48647 ,  H01L2224/48655 ,  H01L2224/48669 ,  H01L2224/48687 ,  H01L2224/4869 ,  H01L2224/73265 ,  H01L2224/8592 ,  H01L2224/94 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/181 ,  H01L2224/03 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/05552

Abstract: A chip package is provided. The chip package includes a chip having an upper surface, a lower surface and a sidewall. The chip includes a sensing region or device region and a signal pad region adjacent to the upper surface. A shallow recess structure is located outside of the signal pad region and extends from the upper surface toward the lower surface along the sidewall. The shallow recess structure has at least a first recess and a second recess under the first recess. A redistribution layer is electrically connected to the signal pad region and extends into the shallow recess structure. A first end of a wire is located in the shallow recess structure and is electrically connected to the redistribution layer. A second end of the wire is used for external electrical connection. A method for forming the chip package is also provided.

Abstract translation: 提供芯片封装。 芯片封装包括具有上表面，下表面和侧壁的芯片。 芯片包括感测区域或器件区域以及与上表面相邻的信号焊盘区域。 浅凹陷结构位于信号垫区域的外侧，并且沿着侧壁从上表面向下表面延伸。 浅凹部结构在第一凹部下方具有至少第一凹部和第二凹部。 再分配层电连接到信号焊盘区域并延伸到浅凹陷结构中。 电线的第一端位于浅凹陷结构中，并且电连接到再分配层。 电线的第二端用于外部电气连接。 还提供了一种用于形成芯片封装的方法。

公开(公告)号：US20140017828A1

公开(公告)日：2014-01-16

申请号：US14024564

申请日：2013-09-11

Applicant: XINTEC INC.

Inventor： Shang-Yi WU ,  Chien-Hui CHEN

IPC: H01L33/60

CPC classification number: H01L33/60 ,  H01L21/486 ,  H01L23/147 ,  H01L23/49827 ,  H01L33/44 ,  H01L33/486 ,  H01L33/62 ,  H01L33/641 ,  H01L2224/73265 ,  H01L2933/0033 ,  H01S5/02236 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: A method for fabricating a silicon submount for LED packaging. A silicon substrate is provided. A reflection layer is formed on the silicon substrate. Portions of the reflection layer and the silicon substrate are removed to form openings. A wafer backside grinding process is carried out to thin the silicon substrate thereby turning the openings into through silicon vias. An insulating layer is then deposited to cover the reflection layer and the silicon substrate. A seed layer is formed on the insulating layer. A resist pattern is then formed on the seed layer. A metal layer is formed on the seed layer not covered by the resist pattern. The resist pattern is then stripped. The seed layer not covered by the metal layer is then removed.

Abstract translation: 一种用于制造用于LED封装的硅基座的方法。 提供硅衬底。 在硅衬底上形成反射层。 去除反射层和硅衬底的部分以形成开口。 进行晶片背面研磨处理以使硅衬底变薄，从而将开口转变成通过硅通孔。 然后沉积绝缘层以覆盖反射层和硅衬底。 种子层形成在绝缘层上。 然后在种子层上形成抗蚀剂图案。 在未被抗蚀剂图案覆盖的种子层上形成金属层。 然后剥离抗蚀剂图案。 然后除去未被金属层覆盖的籽晶层。

公开(公告)号：US20130307125A1

公开(公告)日：2013-11-21

申请号：US13950101

申请日：2013-07-24

Applicant: XINTEC INC.

Inventor： Yu-Lung HUANG ,  Chao-Yen LIN ,  Wei-Luen SUEN ,  Chien-Hui CHEN

IPC: H01L23/498 ,  H01L23/00

CPC classification number: H01L23/49805 ,  H01L21/561 ,  H01L21/6835 ,  H01L23/3121 ,  H01L24/05 ,  H01L24/16 ,  H01L24/48 ,  H01L24/95 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2221/68381 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05558 ,  H01L2224/05572 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/94 ,  H01L2924/00014 ,  H01L2924/10156 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2224/03 ,  H01L2924/00 ,  H01L2224/05552 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: An embodiment of the invention provides a chip package which includes: a semiconductor substrate having an upper surface and a lower surface; a device region or sensing region defined in the semiconductor substrate; a conducting pad located on the upper surface of the semiconductor substrate; at least two recesses extending from the upper surface towards the lower surface of the semiconductor substrate, wherein sidewalls and bottoms of the recesses together form a sidewall of the semiconductor substrate; a conducting layer electrically connected to the conducting pad and extending from the upper surface of the semiconductor substrate to the sidewall of the semiconductor substrate; and an insulating layer located between the conducting layer and the semiconductor substrate.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：具有上表面和下表面的半导体衬底; 限定在所述半导体衬底中的器件区域或感测区域; 导电焊盘，位于所述半导体衬底的上表面上; 至少两个从所述半导体衬底的上表面向下表面延伸的凹槽，其中所述凹槽的侧壁和底部一起形成所述半导体衬底的侧壁; 导电层，电连接到导电焊盘并从半导体衬底的上表面延伸至半导体衬底的侧壁; 以及位于导电层和半导体衬底之间的绝缘层。

公开(公告)号：US20160307779A1

公开(公告)日：2016-10-20

申请号：US15098278

申请日：2016-04-13

Applicant: XINTEC INC.

Inventor： Yu-Tung CHEN ,  Quan-Qun SU ,  Chuan-Jin SHIU ,  Chien-Hui CHEN ,  Hsiao-Lan YEH ,  Yen-Shih HO

IPC: H01L21/56 ,  H01L21/67 ,  B05B1/24 ,  H01L21/78 ,  H01L23/29 ,  H01L23/00 ,  H01L21/687 ,  H01L21/768

CPC classification number: H01L21/561 ,  H01L21/02118 ,  H01L21/02282 ,  H01L21/6715 ,  H01L21/68742 ,  H01L21/68764 ,  H01L21/76831 ,  H01L21/76898 ,  H01L23/3192 ,  H01L24/03 ,  H01L24/11 ,  H01L24/94 ,  H01L2224/02313 ,  H01L2224/0346 ,  H01L2224/0391 ,  H01L2224/0401 ,  H01L2224/05022 ,  H01L2224/05548 ,  H01L2224/05573 ,  H01L2224/05624 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2224/94 ,  H01L2924/00014 ,  H01L2224/03 ,  H01L2224/11 ,  H01L2924/014

Abstract: A wafer coating system includes a wafer chuck, a flowing insulating material sprayer and a wafer tilting lifting pin. The wafer chuck has a carrier part and a rotating part, which the carrier part is mounted on the rotating part to carry a wafer, and the rotating part is configured to rotate with a predetermined axis. The flowing insulating material sprayer is above the wafer chuck and configured to spray a flowing insulating material to the wafer, and the wafer tilting lifting pin is configured to form a first acute angle between the wafer and direction of gravity.

Abstract translation: 晶片涂布系统包括晶片卡盘，流动绝缘材料喷雾器和晶片倾斜提升销。 晶片卡盘具有托架部和旋转部，托架部安装在旋转部上以承载晶片，旋转部构造成以预定轴旋转。 流动的绝缘材料喷雾器位于晶片卡盘之上，并配置成将流动的绝缘材料喷射到晶片上，并且晶片倾斜提升销构造成在晶片和重心之间形成第一锐角。