Germanium field effect transistors and fabrication thereof
    93.
    发明授权
    Germanium field effect transistors and fabrication thereof 有权
    锗场效应晶体管及其制造

    公开(公告)号:US08395215B2

    公开(公告)日:2013-03-12

    申请号:US13351824

    申请日:2012-01-17

    Applicant: Jing-Cheng Lin

    Inventor: Jing-Cheng Lin

    Abstract: Germanium field effect transistors and methods of fabricating them are described. In one embodiment, the method includes forming a germanium oxide layer over a substrate and forming a metal oxide layer over the germanium oxide layer. The germanium oxide layer and the metal oxide layer are converted into a first dielectric layer. A first electrode layer is deposited over the first dielectric layer.

    Abstract translation: 描述锗场效应晶体管及其制造方法。 在一个实施例中,该方法包括在衬底上形成氧化锗层并在氧化锗层上形成金属氧化物层。 氧化锗层和金属氧化物层被转换为第一电介质层。 第一电极层沉积在第一介电层上。

    Germanium field effect transistors and fabrication thereof
    96.
    发明授权
    Germanium field effect transistors and fabrication thereof 有权
    锗场效应晶体管及其制造

    公开(公告)号:US08124513B2

    公开(公告)日:2012-02-28

    申请号:US12630652

    申请日:2009-12-03

    Applicant: Jing-Cheng Lin

    Inventor: Jing-Cheng Lin

    Abstract: Germanium field effect transistors and methods of fabricating them are described. In one embodiment, the method includes forming a germanium oxide layer over a substrate and forming a metal oxide layer over the germanium oxide layer. The germanium oxide layer and the metal oxide layer are converted into a first dielectric layer. A first electrode layer is deposited over the first dielectric layer.

    Abstract translation: 描述锗场效应晶体管及其制造方法。 在一个实施例中,该方法包括在衬底上形成氧化锗层并在氧化锗层上形成金属氧化物层。 氧化锗层和金属氧化物层被转换为第一电介质层。 第一电极层沉积在第一介电层上。

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