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    Hybrid interconnect and system for testing semiconductor dice
    92.
    发明授权
    Hybrid interconnect and system for testing semiconductor dice 失效

    公开(公告)号：US07049840B1

    公开(公告)日：2006-05-23

    申请号：US09302576

    申请日：1999-04-30

    申请人： David R. Hembree ,  Salman Akram ,  Warren M. Farnworth ,  Alan G. Wood ,  James M. Wark ,  Derek Gochnour

    发明人： David R. Hembree ,  Salman Akram ,  Warren M. Farnworth ,  Alan G. Wood ,  James M. Wark ,  Derek Gochnour

    IPC分类号： G01R31/02

    CPC分类号： G01R1/0466 ,  G01R1/0735

    摘要： An interconnect is provided for making electrical connections with a semiconductor die. The interconnect includes a substrate having integrally formed contact members, configured to electrically contact corresponding contact locations on the die. The interconnect also includes a pattern of conductors formed separately from the substrate, and then bonded to the substrate, in electrical communication with the contact members. The conductors can be mounted to a multi layered tape similar to TAB tape, or alternately bonded directly to the substrate. In addition, each conductor can include an opening aligned with a corresponding contact member, and filled with a conductive material, such as a conductive adhesive or solder. The conductive material electrically connects the contact members and conductors, and provides an expansion joint to allow expansion of the conductors without stressing the contact members. Also provided are a system for testing dice that includes the interconnect, and a system for testing wafers wherein the interconnect is formed as a probe card.

    Method for testing semiconductor wafers
    97.
    发明授权
    Method for testing semiconductor wafers 失效
    半导体晶圆测试方法

    公开(公告)号：US06798224B1

    公开(公告)日：2004-09-28

    申请号：US10072734

    申请日：2002-02-05

    申请人： David R. Hembree ,  Warren M. Farnworth ,  Salman Akram ,  Alan G. Wood ,  C. Patrick Doherty ,  Andrew J. Krivy

    发明人： David R. Hembree ,  Warren M. Farnworth ,  Salman Akram ,  Alan G. Wood ,  C. Patrick Doherty ,  Andrew J. Krivy

    IPC分类号： G01R1073

    CPC分类号： G01R31/2886

    摘要： A probe card for testing semiconductor wafers, and a method and system for testing wafers using the probe card are provided. The probe card is configured for use with a conventional testing apparatus, such as a wafer probe handler, in electrical communication with test circuitry. The probe card includes an interconnect substrate having contact members for establishing electrical communication with contact locations on the wafer. The probe card also includes a membrane for physically and electrically connecting the interconnect substrate to the testing apparatus, and a compressible member for cushioning the pressure exerted on the interconnect substrate by the testing apparatus. The interconnect substrate can be formed of silicon with raised contact members having penetrating projections. Alternately the contact members can be formed as indentations for testing bumped wafers. The membrane can be similar to multi layered TAB tape including metal foil conductors attached to a flexible, electrically-insulating, elastomeric tape. The probe card can be configured to contact all of the dice on the wafer at the same time, so that test signals can be electronically applied to selected dice as required.

    摘要翻译： 提供了用于测试半导体晶片的探针卡，以及使用探针卡测试晶片的方法和系统。 探针卡被配置用于与测试电路电连通的常规测试装置，例如晶片探测器处理器。 探针卡包括具有用于与晶片上的接触位置建立电连通的接触构件的互连基板。 探针卡还包括用于将互连基板物理和电连接到测试装置的膜，以及用于缓冲由测试装置施加在互连基板上的压力的可压缩构件。 互连衬底可以由具有穿透突起的凸起接触构件的硅形成。 或者，接触构件可以形成为用于测试凸起的晶片的凹陷。 膜可以类似于多层TAB带，其包括附接到柔性，电绝缘的弹性体带的金属箔导体。 探针卡可以配置为同时接触晶片上的所有骰子，以便测试信号可以根据需要以电子方式应用于选定的骰子。

    Method and apparatus for testing semiconductor dice
    99.
    发明授权
    Method and apparatus for testing semiconductor dice 失效
    测试半导体骰子的方法和装置

    公开(公告)号：US06639416B1

    公开(公告)日：2003-10-28

    申请号：US09897592

    申请日：2001-07-02

    申请人： Salman Akram ,  Alan G. Wood ,  David R. Hembree ,  Warren M. Farnworth

    发明人： Salman Akram ,  Alan G. Wood ,  David R. Hembree ,  Warren M. Farnworth

    IPC分类号： G01R3102

    CPC分类号： G01R31/2886 ,  G01R1/0483 ,  H01L2224/05554 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49175 ,  H01L2224/73265 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01087 ,  H01L2924/30107 ,  H01L2924/00014 ,  H01L2924/00

    摘要： A method and carrier for testing semiconductor dice such as bare dice or chip scale packages are provided. The carrier includes a base for retaining a single die, an interconnect for establishing temporary electrical communication with the die, and a force applying mechanism for biasing the die and interconnect together. In an illustrative embodiment the base includes conductors arranged in a universal pattern adapted to electrically connect to different sized interconnects. Interconnects are thus interchangeable on a base for testing different types of dice using the same base. The conductors on the base can be formed on a planar active surface of the base or on a stepped active surface having different sized cavities for mounting different sized interconnects. In an alternate embodiment the carrier includes an interposer. In a first interposer embodiment, the interposer connects directly to external test circuitry and can be changed to accommodate different sized interconnects. In a go second interposer embodiment, the interposer connects to conductors on the base and adapts the base for use with different sized interconnects.

    摘要翻译： 提供了用于测试半导体裸片（例如裸裸片或芯片级封装）的方法和载体。 载体包括用于保持单个管芯的基座，用于建立与管芯的临时电连通的互连件，以及用于偏压管芯并互连在一起的施力机构。 在说明性实施例中，底座包括以适于电连接到不同尺寸的互连件的通用图案布置的导体。 因此，互连在基座上可以互换，用于使用相同的基底测试不同类型的骰子。 基座上的导体可以形成在基座的平面有源表面上或具有不同尺寸的空腔的阶梯式有源表面上，用于安装不同尺寸的互连。在替代实施例中，载体包括插入器。 在第一插入器实施例中，插入器直接连接到外部测试电路，并且可以改变以适应不同尺寸的互连。 在第二插入器实施例中，插入器连接到基座上的导体，并且使基座适配不同大小的互连使用。