Semiconductor wafer with assisting dicing structure and dicing method thereof
    114.
    发明授权
    Semiconductor wafer with assisting dicing structure and dicing method thereof 有权
    具有辅助切割结构的半导体晶片及其切割方法

    公开(公告)号:US08629532B2

    公开(公告)日:2014-01-14

    申请号:US11745595

    申请日:2007-05-08

    IPC分类号: H01L23/544 H01L29/06

    摘要: A semiconductor wafer with an assisting dicing structure. The wafer comprises a substrate having a front surface and a rear surface. The front surface of the substrate comprises at least two device regions separated by at least one dicing lane. The rear surface of the substrate comprises at least one pre-dicing trench formed therein and substantially aligned with the dicing lane. A method for dicing a semiconductor wafer is also disclosed.

    摘要翻译: 具有辅助切割结构的半导体晶片。 晶片包括具有前表面和后表面的基板。 衬底的前表面包括由至少一个切割通道分开的至少两个器件区域。 衬底的后表面包括形成在其中并与切割通道基本对齐的至少一个预切割沟槽。 还公开了一种用于切割半导体晶片的方法。

    METHODS AND APPARATUS FOR HEAT SPREADER ON SILICON
    117.
    发明申请
    METHODS AND APPARATUS FOR HEAT SPREADER ON SILICON 有权
    有机硅热交换器的方法与装置

    公开(公告)号:US20130270686A1

    公开(公告)日:2013-10-17

    申请号:US13444558

    申请日:2012-04-11

    IPC分类号: H01L23/34 H01L21/60

    摘要: Apparatus and methods for forming a heat spreader on a substrate to release heat for a semi-conductor package are disclosed. The apparatus comprises a substrate. A dielectric layer is formed next to the substrate and in contact with a surface of the substrate. A heat spreader is formed next to the substrate and in contact with another surface of the substrate. A passivation layer is formed next to the dielectric layer. A connection pad is placed on top of the passivation layer. The substrate may comprise additional through-silicon-vias. The contact surface between the substrate and the heat spreader may be a scraggy surface. The packaging method further proceeds to connect a chip to the connection pad by way of a connection device such as a solder ball or a bump.

    摘要翻译: 公开了一种用于在基板上形成散热器以释放用于半导体封装的热量的装置和方法。 该装置包括基板。 在基板的旁边形成介电层,与基板的表面接触。 散热器形成在基板的旁边并与基板的另一个表面接触。 在电介质层的旁边形成钝化层。 连接焊盘放置在钝化层的顶部。 衬底可以包括另外的通硅通孔。 基板和散热器之间的接触表面可能是肮脏的表面。 包装方法还进一步通过诸如焊球或凸块的连接装置将芯片连接到连接焊盘。

    Scribe line metal structure
    119.
    发明授权
    Scribe line metal structure 有权
    划线金属结构

    公开(公告)号:US08368180B2

    公开(公告)日:2013-02-05

    申请号:US12619464

    申请日:2009-11-16

    IPC分类号: H01L23/544

    CPC分类号: H01L21/78

    摘要: A system and method for preventing defaults during singulation is presented. An embodiment comprises a dummy metal structure located in the scribe region. The dummy metal structure comprises a series of alternating dummy lines that are connected through dummy vias. The dummy lines are offset from dummy lines in adjacent metal layers. Additionally, the dummy lines and dummy vias in the upper layers of the scribe line may be formed with larger dimensions than the dummy lines and dummy vias located in the lower layers.

    摘要翻译: 提出了一种在分割过程中防止违约的系统和方法。 一个实施例包括位于划线区域中的虚拟金属结构。 虚拟金属结构包括通过虚拟通孔连接的一系列交替虚拟线。 伪线与相邻金属层中的虚拟线偏移。 此外,划线的上层中的虚拟线和虚拟通路可以形成为具有比位于下层中的虚拟线和虚拟通孔更大的尺寸。