Semiconductor chips having redistributed power/ground lines directly connected to power/ground lines of internal circuits and methods of fabricating the same
    37.
    发明授权
    Semiconductor chips having redistributed power/ground lines directly connected to power/ground lines of internal circuits and methods of fabricating the same 有权
    具有直接连接到内部电路的电源/接地线的重新分配的电源/接地线的半导体芯片及其制造方法

    公开(公告)号:US07545037B2

    公开(公告)日:2009-06-09

    申请号:US11378899

    申请日:2006-03-17

    申请人: Jong-Joo Lee

    发明人: Jong-Joo Lee

    IPC分类号: H01L23/52

    摘要: Provided are embodiments of semiconductor chips having a redistributed metal interconnection directly connected to power/ground lines of an internal circuit are provided. Embodiments of the semiconductor chips include an internal circuit formed on a semiconductor substrate. A chip pad is disposed on the semiconductor substrate. The chip pad is electrically connected to the internal circuit through an internal interconnection. A passivation layer is provided over the chip pad. A redistributed metal interconnection is provided on the passivation layer. The redistributed metal interconnection directly connects the internal interconnection to the chip pad through a via-hole and a chip pad opening, which penetrate at least the passivation layer. Methods of fabricating the semiconductor chip are also provided.

    摘要翻译: 提供了具有直接连接到内部电路的电源/接地线的重分布金属互连的半导体芯片的实施例。 半导体芯片的实施例包括形成在半导体衬底上的内部电路。 芯片焊盘设置在半导体衬底上。 芯片焊盘通过内部互连电连接到内部电路。 钝化层设置在芯片焊盘的上方。 在钝化层上设置重新分布的金属互连。 再分布的金属互连通过穿孔至少钝化层的通孔和芯片焊盘开口将内部互连直接连接到芯片焊盘。 还提供了制造半导体芯片的方法。