Injection molded microoptics
    2.
    发明申请
    Injection molded microoptics 有权
    注塑微光学

    公开(公告)号:US20070029277A1

    公开(公告)日:2007-02-08

    申请号:US11195147

    申请日:2005-08-02

    IPC分类号: B29D11/00 B29C35/08 B29C45/00

    摘要: A wafer-scale apparatus and method is described for the automation of forming, aligning and attaching two-dimensional arrays of microoptic elements on semiconductor and other image display devices, backplanes, optoelectronic boards, and integrated optical systems. In an ordered fabrication sequence, a mold plate comprised of optically designed cavities is formed by reactive ion etching or alternative processes, optionally coated with a release material layer and filled with optically specified materials by an automated fluid-injection and defect-inspection subsystem. Optical alignment fiducials guide the disclosed transfer and attachment processes to achieve specified tolerances between the microoptic elements and corresponding optoelectronic devices and circuits. The present invention applies to spectral filters, waveguides, fiber-optic mode-transformers, diffraction gratings, refractive lenses, diffractive lens/Fresnel zone plates, reflectors, and to combinations of elements and devices, including microelectromechanical systems (MEMS) and liquid crystal device (LCD) matrices for adaptive, tunable elements. Preparation of interfacial layer properties and attachment process embodiments are taught.

    摘要翻译: 描述了用于在半导体和其他图像显示装置,背板,光电板和集成光学系统上形成,对准和附着微量元件的二维阵列的自动化的晶片级装置和方法。 在有序的制造顺序中,由光学设计的空腔构成的模具板通过反应离子蚀刻或可选的工艺形成,任选地涂覆有释放材料层,并通过自动化流体注入和缺陷检查子系统填充光学特定的材料。 光学校准基准指导所公开的转移和附着过程以实现微光学元件与对应的光电器件和电路之间的特定公差。 本发明适用于光谱滤波器,波导管,光纤模式变压器,衍射光栅,折射透镜,衍射透镜/菲涅耳带片,反射器以及元件和器件的组合,包括微机电系统(MEMS)和液晶器件 (LCD)矩阵,用于自适应,可调元素。 教导界面层性质和附着工艺实施例的制备。

    Composite solder transfer moldplate structure and method of making same
    3.
    发明申请
    Composite solder transfer moldplate structure and method of making same 审中-公开
    复合焊料传递模板结构及其制作方法

    公开(公告)号:US20060289607A1

    公开(公告)日:2006-12-28

    申请号:US11168182

    申请日:2005-06-28

    IPC分类号: B23K35/12

    CPC分类号: B23K35/3613

    摘要: A method for constructing a composite solder transfer moldplate for flip chip wafer bumping of a substrate, comprising the steps of coating at least one polymer layer onto a first side of a transparent plate, the plate having a thermal expansion coefficient similar to that of the substrate; and forming a multiplicity of cavities in a polymer layer on one side of the plate, each cavity being for receiving solder. A moldplate made by the method. The structure has required behavior through temperature excursions between room temperature and various solder molten temperatures.

    摘要翻译: 一种用于构造用于衬底的倒装芯片晶片凸起的复合焊料传递模板的方法,包括以下步骤:将至少一个聚合物层涂覆到透明板的第一侧上,该板具有与衬底的热膨胀系数相似的热膨胀系数 ; 并且在该板的一侧上的聚合物层中形成多个空腔,每个空腔用于接收焊料。 通过该方法制成的模板。 该结构通过室温和各种焊料熔融温度之间的温度偏移需要行为。

    Chip packaging module with active cooling mechanisms
    8.
    发明申请
    Chip packaging module with active cooling mechanisms 审中-公开
    具有主动冷却机构的芯片封装模块

    公开(公告)号:US20050168947A1

    公开(公告)日:2005-08-04

    申请号:US10733672

    申请日:2003-12-11

    摘要: The invention is directed to structure and methods of improving the cooling capacity of chip packaging modules. The chip packaging module has a substrate with thin-film wiring on one side and grooves or channels etched on one or both sides where coolant pumps are embedded. The coolant pumps are used to enhance the liquid flowing inside the module. The coolant flows through the chips within the vias in the chips or around the chips when the chips do not have vias. Both cooling modes, single or two-phase modes can be adopted in the module.

    摘要翻译: 本发明涉及提高芯片封装模块的冷却能力的结构和方法。 芯片封装模块具有在一侧具有薄膜布线的基板,在嵌入有冷却剂泵的一侧或两侧蚀刻的凹槽或通道。 冷却液泵用于增强模块内流动的液体。 当芯片没有通孔时,冷却剂流过芯片内或芯片周围的通孔内的芯片。 模块中可以采用两种冷却模式,单相或双相模式。