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公开(公告)号:US08334582B2
公开(公告)日:2012-12-18
申请号:US12347026
申请日:2008-12-31
申请人: Shin-Puu Jeng , Hsien-Wei Chen , Shang-Yun Hou , Hao-Yi Tsai , Anbiarshy N. F. Wu , Yu-Wen Liu
发明人: Shin-Puu Jeng , Hsien-Wei Chen , Shang-Yun Hou , Hao-Yi Tsai , Anbiarshy N. F. Wu , Yu-Wen Liu
IPC分类号: H01L23/544
CPC分类号: H01L21/78 , H01L23/562 , H01L23/564 , H01L23/585 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor chip includes a semiconductor substrate; a plurality of low-k dielectric layers over the semiconductor substrate; a first passivation layer over the plurality of low-k dielectric layers; and a second passivation layer over the first passivation layer. A first seal ring is adjacent to an edge of the semiconductor chip, wherein the first seal ring has an upper surface substantially level to a bottom surface of the first passivation layer. A second seal ring is adjacent to the first seal ring and on an inner side of the semiconductor chip than the first seal ring. The second seal ring includes a pad ring in the first passivation layer and the second passivation layer. A trench ring includes at least a portion directly over the first seal ring. The trench ring extends from a top surface of the second passivation layer down to at least an interface between the first passivation layer and the second passivation layer.
摘要翻译: 半导体芯片包括半导体衬底; 半导体衬底上的多个低k电介质层; 在所述多个低k电介质层上的第一钝化层; 以及在所述第一钝化层上的第二钝化层。 第一密封环邻近半导体芯片的边缘,其中第一密封环具有基本上平坦于第一钝化层的底表面的上表面。 第二密封环与第一密封环相邻,并且在半导体芯片的内侧与第一密封环相邻。 第二密封环包括在第一钝化层和第二钝化层中的焊盘环。 沟槽环包括直接在第一密封环上的至少一部分。 沟槽环从第二钝化层的顶表面延伸到至少第一钝化层和第二钝化层之间的界面。
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公开(公告)号:US20120313247A1
公开(公告)日:2012-12-13
申请号:US13157137
申请日:2011-06-09
申请人: Chen-Hua Yu , Shin-Puu Jeng , Wen-Chih Chiou , Fang Wen Tsai , Chen-Yu Tsai
发明人: Chen-Hua Yu , Shin-Puu Jeng , Wen-Chih Chiou , Fang Wen Tsai , Chen-Yu Tsai
IPC分类号: H01L23/48 , H01L21/768
CPC分类号: H01L25/0657 , H01L21/0217 , H01L21/6835 , H01L21/76831 , H01L21/76834 , H01L21/76871 , H01L21/76895 , H01L21/76898 , H01L23/481 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/16 , H01L25/50 , H01L2221/68372 , H01L2224/03002 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/0347 , H01L2224/0391 , H01L2224/0401 , H01L2224/05008 , H01L2224/05018 , H01L2224/05023 , H01L2224/05025 , H01L2224/05073 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05166 , H01L2224/05548 , H01L2224/05559 , H01L2224/05562 , H01L2224/05568 , H01L2224/05647 , H01L2224/13023 , H01L2224/13025 , H01L2224/1411 , H01L2224/14181 , H01L2224/16113 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2924/00014 , H01L2924/10253 , H01L2924/01029 , H01L2224/05552
摘要: A system and method for manufacturing a through silicon via is disclosed. An embodiment comprises forming a through silicon via with a liner protruding from a substrate. A passivation layer is formed over the substrate and the through silicon via, and the passivation layer and liner are recessed from the sidewalls of the through silicon via. Conductive material may then be formed in contact with both the sidewalls and a top surface of the through silicon via.
摘要翻译: 公开了一种制造硅通孔的系统和方法。 一个实施例包括用从衬底突出的衬垫形成通孔硅通孔。 钝化层形成在衬底和穿通硅通孔之上,钝化层和衬垫从通硅通孔的侧壁凹陷。 然后可以将导电材料形成为与通孔硅通孔的两个侧壁和顶表面接触。
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公开(公告)号:US20120306073A1
公开(公告)日:2012-12-06
申请号:US13343582
申请日:2012-01-04
申请人: Chen-Hua Yu , Shin-Puu Jeng , Shang-Yun Hou , Cheng-Chieh Hsieh , Kuo-Ching Hsu , Ying-Ching Shih , Po-Hoa Tsai , Chin-Fu Kao , Cheng-Lin Huang , Jing-Cheng Lin
发明人: Chen-Hua Yu , Shin-Puu Jeng , Shang-Yun Hou , Cheng-Chieh Hsieh , Kuo-Ching Hsu , Ying-Ching Shih , Po-Hoa Tsai , Chin-Fu Kao , Cheng-Lin Huang , Jing-Cheng Lin
IPC分类号: H01L23/485 , H01L21/768
CPC分类号: H01L24/11 , H01L23/147 , H01L23/49827 , H01L24/13 , H01L24/16 , H01L24/81 , H01L25/04 , H01L25/50 , H01L2224/0361 , H01L2224/03912 , H01L2224/0401 , H01L2224/05022 , H01L2224/05027 , H01L2224/05073 , H01L2224/05124 , H01L2224/05139 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05184 , H01L2224/05666 , H01L2224/05681 , H01L2224/05686 , H01L2224/10145 , H01L2224/10156 , H01L2224/1146 , H01L2224/1147 , H01L2224/1182 , H01L2224/11831 , H01L2224/13017 , H01L2224/1308 , H01L2224/13082 , H01L2224/13083 , H01L2224/13111 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/13565 , H01L2224/13578 , H01L2224/13686 , H01L2224/16058 , H01L2224/16145 , H01L2224/81193 , H01L2224/81815 , H01L2924/01322 , H01L2924/01327 , H01L2924/3651 , H01L2924/3841 , H01L2924/00014 , H01L2924/01029 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/01047 , H01L2924/049 , H01L2924/053 , H01L2924/00
摘要: A device includes a top dielectric layer having a top surface. A metal pillar has a portion over the top surface of the top dielectric layer. A non-wetting layer is formed on a sidewall of the metal pillar, wherein the non-wetting layer is not wettable to the molten solder. A solder region is disposed over and electrically coupled to the metal pillar.
摘要翻译: 一种器件包括具有顶表面的顶部电介质层。 金属柱在顶部介电层的顶表面上具有一部分。 在金属柱的侧壁上形成非润湿层,其中非润湿层不能熔化到熔融焊料上。 焊接区域设置在金属柱上并电耦合到金属柱。
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公开(公告)号:US08278737B2
公开(公告)日:2012-10-02
申请号:US12417394
申请日:2009-04-02
申请人: Hsien-Wei Chen , Hao-Yi Tsai , Ying-Ju Chen , Yu-Wen Liu , Shin-Puu Jeng
发明人: Hsien-Wei Chen , Hao-Yi Tsai , Ying-Ju Chen , Yu-Wen Liu , Shin-Puu Jeng
IPC分类号: H01L21/00
CPC分类号: H01L21/78 , H01L23/562 , H01L23/585 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device is provided that includes a semiconductor substrate, a plurality of dies formed on the semiconductor substrate, the plurality of dies being separated from one another by a first region extending along a first direction and a second region extending along a second direction different from the first direction, a dummy metal structure formed within a third region that includes a region defined by an intersection of the first region and the second region, a plurality of metal interconnection layers formed over the substrate, and a plurality of dielectric layers formed over the substrate. Each of the metal interconnection layers is disposed within each of the dielectric layers and a dielectric constant of at least one of the dielectric layers is less than about 2.6.
摘要翻译: 提供了一种半导体器件,其包括半导体衬底,形成在半导体衬底上的多个管芯,所述多个管芯沿着第一方向延伸的第一区域彼此分离,并且沿着不同于第二方向的第二方向延伸的第二区域 第一方向,形成在第三区域内的虚设金属结构,所述第三区域包括由所述第一区域和所述第二区域的交点限定的区域,形成在所述基板上的多个金属互连层,以及形成在所述第二区域上的多个电介质层 基质。 每个金属互连层设置在每个介电层内,并且至少一个电介质层的介电常数小于约2.6。
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公开(公告)号:US20120206160A1
公开(公告)日:2012-08-16
申请号:US13025931
申请日:2011-02-11
申请人: Wei-Cheng WU , Hsien-Pin HU , Shang-Yun HOU , Shin-Puu JENG , Chen-Hua YU , Chao-Hsiang YANG
发明人: Wei-Cheng WU , Hsien-Pin HU , Shang-Yun HOU , Shin-Puu JENG , Chen-Hua YU , Chao-Hsiang YANG
IPC分类号: G01R31/00
CPC分类号: G01R31/2896 , G01R1/0416 , G01R31/2601 , G01R31/2884 , G01R31/2886 , G01R31/2889 , G01R31/2893 , H01L22/32 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/11 , H01L24/13 , H01L2224/02377 , H01L2224/0392 , H01L2224/0401 , H01L2224/05027 , H01L2224/05147 , H01L2224/05552 , H01L2224/05568 , H01L2224/05655 , H01L2224/0614 , H01L2224/0616 , H01L2224/1146 , H01L2224/1147 , H01L2224/11849 , H01L2224/13005 , H01L2224/13083 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13139 , H01L2224/13147 , H01L2224/13155 , H01L2224/14131 , H01L2224/16238 , H01L2924/20752 , H01L2924/00012 , H01L2924/00014 , H01L2924/01047 , H01L2924/014
摘要: Test structures for performing electrical tests of devices under one or more microbumps are provided. Each test structure includes at least one microbump pad and a test pad. The microbump pad is a part of a metal pad connected to an interconnect for a device. A width of the microbump pad is equal to or less than about 50 μm. The test pad is connected to the at least one microbump pad. The test pad has a size large enough to allow circuit probing of the device. The test pad is another part of the metal pad. A width of the test pad is greater than the at least one microbump pad.
摘要翻译: 提供用于对一个或多个微丸下的装置进行电测试的测试结构。 每个测试结构包括至少一个微型块和测试垫。 微型焊盘是与设备的互连件连接的金属焊盘的一部分。 微型焊盘的宽度等于或小于约50μm。 测试垫连接到至少一个微型块。 测试垫的尺寸足够大以允许设备的电路探测。 测试垫是金属垫的另一部分。 测试垫的宽度大于至少一个微小块垫。
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公开(公告)号:US08178980B2
公开(公告)日:2012-05-15
申请号:US12026312
申请日:2008-02-05
申请人: Shin-Puu Jeng , Yu-Wen Liu , Hao-Yi Tsai , Hsien-Wei Chen
发明人: Shin-Puu Jeng , Yu-Wen Liu , Hao-Yi Tsai , Hsien-Wei Chen
IPC分类号: H01L29/40
CPC分类号: H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/0401 , H01L2224/05093 , H01L2224/05096 , H01L2224/05124 , H01L2224/05147 , H01L2224/05166 , H01L2224/05181 , H01L2224/05184 , H01L2224/05187 , H01L2224/05552 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/16 , H01L2224/85201 , H01L2224/85205 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/01046 , H01L2924/01049 , H01L2924/01068 , H01L2924/01073 , H01L2924/01074 , H01L2924/01078 , H01L2924/01082 , H01L2924/01087 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/10253 , H01L2924/10329 , H01L2924/14 , H01L2924/30105 , H01L2924/3011 , H01L2924/37001 , H01L2924/00012 , H01L2924/00
摘要: A bonding pad structure is provided that includes two conductive layers and a connective layer interposing the two conductive layers. The connective layer includes a contiguous, conductive structure. In an embodiment, the contiguous conductive structure is a solid layer of conductive material. In other embodiments, the contiguous conductive structure is a conductive network including, for example, a matrix configuration or a plurality of conductive stripes. At least one dielectric spacer may interpose the conductive network. In an embodiment, the conductive density of the connective layer is between approximately 20% and 100%.
摘要翻译: 提供了一种焊盘结构,其包括两个导电层和插入两个导电层的连接层。 连接层包括连续的导电结构。 在一个实施例中,邻接的导电结构是导电材料的固体层。 在其它实施例中,连续导电结构是包括例如矩阵配置或多个导电条纹的导电网络。 至少一个电介质间隔物可以插入导电网络。 在一个实施例中,连接层的导电密度在大约20%和100%之间。
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公开(公告)号:US08169076B2
公开(公告)日:2012-05-01
申请号:US12537001
申请日:2009-08-06
申请人: Mirng-Ji Lii , Chien-Hsiun Lee , Chen-Hua Yu , Shin-Puu Jeng , Chin-Yu Ku
发明人: Mirng-Ji Lii , Chien-Hsiun Lee , Chen-Hua Yu , Shin-Puu Jeng , Chin-Yu Ku
IPC分类号: H01L23/498
CPC分类号: H01L24/05 , H01L24/12 , H01L24/16 , H01L2224/0401 , H01L2224/05022 , H01L2224/05027 , H01L2224/05572 , H01L2224/0558 , H01L2224/056 , H01L2224/13023 , H01L2224/131 , H01L2224/29111 , H01L2924/0002 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01019 , H01L2924/01022 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01075 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/05042 , H01L2924/10253 , H01L2924/14 , H01L2924/19041 , H01L2924/19043 , H01L2924/00014 , H01L2924/00 , H01L2224/05552
摘要: An integrated circuit structure includes a semiconductor substrate, and a polyimide layer over the semiconductor substrate. An under-bump-metallurgy (UBM) has a first portion over the polyimide layer, and a second portion level with the polyimide layer. A first solder bump and a second solder bump are formed over the polyimide layer, with a pitch between the first solder bump and the second solder bump being no more than 150 μm. A width of the UBM equals one-half of the pitch plus a value greater than 5 μm.
摘要翻译: 集成电路结构包括半导体衬底和半导体衬底上的聚酰亚胺层。 凸块下冶金(UBM)在聚酰亚胺层上具有第一部分,并且具有与聚酰亚胺层的第二部分水平。 第一焊料凸块和第二焊料凸块形成在聚酰亚胺层上,第一焊料凸块和第二焊料凸块之间的间距不超过150μm。 UBM的宽度等于间距的一半加上大于5μm的值。
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公开(公告)号:US20120056315A1
公开(公告)日:2012-03-08
申请号:US12874952
申请日:2010-09-02
申请人: Hsin Chang , Fang Wen Tsai , Jing-Cheng Lin , Wen-Chih Chiou , Shin-Puu Jeng
发明人: Hsin Chang , Fang Wen Tsai , Jing-Cheng Lin , Wen-Chih Chiou , Shin-Puu Jeng
IPC分类号: H01L23/48 , H01L21/768 , H01L23/498
CPC分类号: H01L21/76898 , H01L21/6835 , H01L23/481 , H01L23/49827 , H01L23/544 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L2221/68327 , H01L2221/6834 , H01L2221/68381 , H01L2223/5442 , H01L2223/54426 , H01L2224/03002 , H01L2224/03912 , H01L2224/0401 , H01L2224/05166 , H01L2224/05181 , H01L2224/05187 , H01L2224/05647 , H01L2224/11002 , H01L2224/1146 , H01L2224/1147 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/01077 , H01L2924/01327 , H01L2924/14 , H01L2924/04941 , H01L2924/04953 , H01L2924/00
摘要: A device includes a substrate, and an alignment mark including a conductive through-substrate via (TSV) penetrating through the substrate.
摘要翻译: 一种器件包括衬底和包括穿透衬底的导电贯穿衬底通孔(TSV)的对准标记。
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公开(公告)号:US20120049322A1
公开(公告)日:2012-03-01
申请号:US12873931
申请日:2010-09-01
申请人: An-Jhih Su , Chi-Chun Hsieh , Tzu-Yu Wang , Wei-Cheng Wu , Hsien-Pin Hu , Shang-Yun Hou , Wei-Chih Chiou , Shin-Puu Jeng
发明人: An-Jhih Su , Chi-Chun Hsieh , Tzu-Yu Wang , Wei-Cheng Wu , Hsien-Pin Hu , Shang-Yun Hou , Wei-Chih Chiou , Shin-Puu Jeng
IPC分类号: H01L29/92 , H01L21/768
CPC分类号: H01L28/40 , H01L21/76898 , H01L23/481 , H01L24/11 , H01L24/13 , H01L24/14 , H01L28/92 , H01L2224/0401 , H01L2224/05008 , H01L2224/0557 , H01L2224/13025 , H01L2224/13099 , H01L2224/131 , H01L2224/13147 , H01L2224/1403 , H01L2224/14181 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/01049 , H01L2924/01074 , H01L2924/01078 , H01L2924/014 , H01L2924/14 , H01L2224/05552 , H01L2924/00
摘要: A device includes a substrate having a front surface and a back surface opposite the front surface. A capacitor is formed in the substrate and includes a first capacitor plate; a first insulation layer encircling the first capacitor plate; and a second capacitor plate encircling the first insulation layer. Each of the first capacitor plate, the first insulation layer, and the second capacitor plate extends from the front surface to the back surface of the substrate.
摘要翻译: 一种装置包括具有与前表面相对的前表面和后表面的基底。 电容器形成在衬底中,并包括第一电容器板; 围绕所述第一电容器板的第一绝缘层; 以及环绕所述第一绝缘层的第二电容器板。 第一电容器板,第一绝缘层和第二电容器板中的每一个从衬底的前表面延伸到后表面。
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公开(公告)号:US08105875B1
公开(公告)日:2012-01-31
申请号:US12904835
申请日:2010-10-14
申请人: Hsien-Pin Hu , Chen-Hua Yu , Shin-Puu Jeng , Shang-Yun Hou , Jing-Cheng Lin , Wen-Chih Chiou , Hung-Jung Tu
发明人: Hsien-Pin Hu , Chen-Hua Yu , Shin-Puu Jeng , Shang-Yun Hou , Jing-Cheng Lin , Wen-Chih Chiou , Hung-Jung Tu
IPC分类号: H01L21/50
CPC分类号: H01L21/561 , H01L21/486 , H01L23/147 , H01L23/3128 , H01L23/49816 , H01L23/49822 , H01L23/49827 , H01L24/97 , H01L25/0655 , H01L2224/05001 , H01L2224/05027 , H01L2224/05571 , H01L2224/16225 , H01L2224/16227 , H01L2224/32225 , H01L2224/73204 , H01L2224/97 , H01L2924/00014 , H01L2924/01029 , H01L2924/01322 , H01L2924/014 , H01L2924/14 , H01L2924/15311 , H01L2924/181 , H01L2924/18161 , H01L2224/81 , H01L2924/00012 , H01L2924/00 , H01L2224/05541 , H01L2224/05005 , H01L2224/05599 , H01L2224/05099
摘要: A method includes providing an interposer wafer including a substrate, and a plurality of through-substrate vias (TSVs) extending from a front surface of the substrate into the substrate. A plurality of dies is bonded onto a front surface of the interposer wafer. After the step of bonding the plurality of dies, a grinding is performed on a backside of the substrate to expose the plurality of TSVs. A plurality of metal bumps is formed on a backside of the interposer wafer and electrically coupled to the plurality of TSVs.
摘要翻译: 一种方法包括提供包括衬底的中介层晶片,以及从衬底的前表面延伸到衬底中的多个贯通衬底通孔(TSV)。 多个管芯结合到插入件晶片的前表面上。 在结合多个模具的步骤之后,在基板的背面进行研磨以暴露多个TSV。 多个金属凸块形成在插入器晶片的背面并电耦合到多个TSV。
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