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    Rotational rate sensor
    11.
    发明授权
    Rotational rate sensor 有权
    转速传感器

    公开(公告)号：US07313958B2

    公开(公告)日：2008-01-01

    申请号：US10471635

    申请日：2002-09-25

    Applicant: Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

    Inventor： Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

    IPC: G01C19/00

    CPC classification number: G01C19/5747

    Abstract: A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.

    Abstract translation: 提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面上方; 提供了一种驱动装置，通过该驱动装置将科里奥利元件引入平行于第一轴线的振动; 提供了一种检测装置，通过该检测装置可以基于设置成基本上垂直于第一轴线的第二轴线中的科里奥利力检测科里奥利元件的偏移; 所述第一和第二轴平行于所述基板的表面; 指定为相对于所述基板至少部分移动的传感器元件; 提供力传递装置; 所述力输送装置被提供以在所述基底和所述传感器元件中的至少一个之间传递静态力效应。

    Device for determining the rotational speed
    12.
    发明授权
    Device for determining the rotational speed 失效
    用于确定转速的装置

    公开(公告)号：US06249754B1

    公开(公告)日：2001-06-19

    申请号：US09091912

    申请日：1998-06-24

    Applicant: Reinhard Neul ,  Dirk Lamprecht

    Inventor： Reinhard Neul ,  Dirk Lamprecht

    IPC: G01C1900

    CPC classification number: G01C19/56

    Abstract: A device for determining a rotation rate can be employed in conjunction with a rotation rate sensor which furnishes one or two output signals that among other things are a measure for the Coriolis acceleration and thus also for the rotation rate. The device includes an arrangement for signal processing, with which both digital subtraction of the output signals and an ensuing digital multiplication by a carrier signal shifted in a digital phase shifter are accomplished. The digital multiplication is followed by a digital/analog conversion and low-pass filtration, which in the final analysis furnishes an output signal (DR) that is equivalent to the rotation rate.

    Abstract translation: 用于确定旋转速率的装置可以与提供一个或两个输出信号的旋转速率传感器一起使用，其中除了其它方面之外，其是测量科里奥利加速度并因此也用于旋转速率。 该装置包括用于信号处理的装置，通过该装置完成输出信号的数字相减和在数字移相器中移位的载波信号的随后的数字乘法。 数字乘法之后是数字/模拟转换和低通滤波，其在最终分析中提供等效于转速的输出信号（DR）。

    Piezoresistive Micromechanical Sensor Component and Corresponding Measuring Method
    14.
    发明申请
    Piezoresistive Micromechanical Sensor Component and Corresponding Measuring Method 有权
    压电微机械传感器部件及相应的测量方法

    公开(公告)号：US20130098154A1

    公开(公告)日：2013-04-25

    申请号：US13635581

    申请日：2011-01-19

    Applicant: Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

    Inventor： Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

    IPC: G01P15/09

    CPC classification number: G01P15/09 ,  G01P15/0802 ,  G01P15/12 ,  G01P15/123

    Abstract: A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.

    Abstract translation: 压阻微机电传感器部件包括基板，抗震块，至少一个压阻棒和测量装置。 地震质量从基板悬挂使其能够偏转。 所述至少一个压阻棒设置在所述基底和所述抗震块之间，并且当所述地震质量被偏转时，所述至少一个压阻棒经受阻力的变化。 至少一个压阻棒具有至少部分地覆盖压阻棒并延伸到衬底的区域中的横向和/或上部和/或下部导体轨道。 测量装置电连接到基板和导体轨道，并且被配置成测量电路的电阻变化，该电阻通过基板通过压阻棒和从压阻棒通过横向和/或上部和/ 或下导体轨道。

    Micromechanical motion sensor
    16.
    发明授权
    Micromechanical motion sensor 有权
    微机械运动传感器

    公开(公告)号：US07591179B2

    公开(公告)日：2009-09-22

    申请号：US10556172

    申请日：2004-03-24

    Applicant: Dietmar Krieg ,  Udo-Martin Gomez ,  Reinhard Neul

    Inventor： Dietmar Krieg ,  Udo-Martin Gomez ,  Reinhard Neul

    IPC: G01P9/04

    CPC classification number: G01C19/5712 ,  G01C19/5726 ,  G01C19/5776

    Abstract: A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.

    Abstract translation: 微机械运动传感器能够检测通过施加周期性驱动电压的静电振荡驱动器激发到永久周期性振荡的可摆放安装的弹簧元件的偏转。 为了补偿棒弹簧元件的共振频率响应的非线性，可以将正常驱动电压信号和补偿驱动信号的总和施加到梳齿驱动器。 在替代实施例中，分离的补偿梳驱动单元可以附加地提供给用于振荡驱动的梳状驱动单元，并且补偿电压信号可以被施加到它们以补偿非线性。

    Yaw rate sensor
    17.
    发明授权
    Yaw rate sensor 有权
    偏航率传感器

    公开(公告)号：US09261363B2

    公开(公告)日：2016-02-16

    申请号：US12303443

    申请日：2007-06-06

    Applicant: Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    Inventor： Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC: G01C19/56 ,  G01C19/5762 ,  G01C19/5747

    CPC classification number: G01C19/5762 ,  G01C19/5747

    Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

    Abstract translation: 偏航率传感器包括驱动质量元件，该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动，沿着沿表面延伸的第一轴线振动，具有检测质量元件，该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线，并且具有检测装置，通过该检测装置可以检测到检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置，横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。

    Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration
    18.
    发明授权
    Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration 有权
    微机械式旋转加速度传感器及旋转加速度检测方法

    公开(公告)号：US09164123B2

    公开(公告)日：2015-10-20

    申请号：US13453425

    申请日：2012-04-23

    Applicant: Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

    Inventor： Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

    IPC: G01P15/00 ,  G01P15/097

    CPC classification number: G01P15/097

    Abstract: The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.

    Abstract translation: 本公开涉及一种微机械式旋转加速度传感器，其包括具有至少一个锚定装置和至少两个飞轮块的基板。 至少一个飞轮质量通过联接元件连接到至少一个锚定装置。 所述至少一个锚定装置被设计成使得所述至少两个飞轮块可以围绕至少一个旋转轴线从相应的静止位置弹性偏转。 至少两个飞轮质量被设计成使得它们具有不同的固有频率。

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