Method of forming cavity substrates using compressive pads
    1.
    发明授权
    Method of forming cavity substrates using compressive pads 失效
    使用压缩垫形成空腔基板的方法

    公开(公告)号:US5759320A

    公开(公告)日:1998-06-02

    申请号:US834302

    申请日:1997-04-13

    IPC分类号: H01L21/48 B32B31/20

    摘要: The present invention relates generally to a new apparatus and method for forming cavities in semiconductor substrates without the necessity of using an insert. More particularly, the invention encompasses an apparatus and a method for fabricating cavities in semiconductor substrates wherein a cured thick compressible elastic pad is placed over the cavity prior to lamination and caused to conform to the contour of the cavity, thus preventing collapse of, or damage to, the cavity shelves or corners during the lamination process. After the lamination process, the cured thick compressible elastic pad is conveniently removed from the cavity area without causing any damage to the cavity shelves or corners or having any paste pull-outs. This pad can be reused multiple number of times to form these MLC cavity substrates.

    摘要翻译: 本发明一般涉及一种用于在半导体衬底中形成空腔的新装置和方法,而不需要使用插入件。 更具体地说,本发明包括一种用于在半导体衬底中制造空腔的装置和方法,其中在层压之前将固化的厚的可压缩弹性垫放置在空腔上方并使其符合空腔的轮廓,从而防止破坏或损坏 到层压过程中的腔架或角落。 在层压处理之后,固化的厚的可压缩弹性垫可以方便地从空腔区域移除,而不会对腔架或角落造成任何损坏或具有任何糊状物抽出。 该垫可以重复使用多次以形成这些MLC空腔衬底。

    Apparatus for forming cavity substrates using compressive pads
    2.
    发明授权
    Apparatus for forming cavity substrates using compressive pads 失效
    用于使用压缩垫形成腔体衬底的装置

    公开(公告)号:US5788808A

    公开(公告)日:1998-08-04

    申请号:US834304

    申请日:1997-04-15

    IPC分类号: H01L21/48 B32B31/20

    摘要: The present invention relates generally to a new apparatus and method for forming cavities in semiconductor substrates without the necessity of using an insert. More particularly, the invention encompasses an apparatus and a method for fabricating cavities in semiconductor substrates wherein a cured thick compressible elastic pad is placed over the cavity prior to lamination and caused to conform to the contour of the cavity, thus preventing collapse of, or damage to, the cavity shelves or corners during the lamination process. After the lamination process, the cured thick compressible elastic pad is conveniently removed from the cavity area without causing any damage to the cavity shelves or corners or having any paste pull-outs. This pad can be reused multiple number of times to form these MLC cavity substrates.

    摘要翻译: 本发明一般涉及一种用于在半导体衬底中形成空腔的新装置和方法,而不需要使用插入件。 更具体地说,本发明包括一种用于在半导体衬底中制造空腔的装置和方法,其中在层压之前将固化的厚的可压缩弹性垫放置在空腔上方并使其符合空腔的轮廓,从而防止破坏或损坏 到层压过程中的腔架或角落。 在层压处理之后,固化的厚的可压缩弹性垫可以方便地从空腔区域移除,而不会对腔架或角落造成任何损坏或具有任何糊状物抽出。 该垫可以重复使用多次以形成这些MLC空腔衬底。