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    Target processing unit
    31.
    发明授权
    Target processing unit 有权
    目标处理单元

    公开(公告)号：US09263234B2

    公开(公告)日：2016-02-16

    申请号：US14479648

    申请日：2014-09-08

    Applicant: Mapper Lithography IP B.V.

    Inventor： Johan Joost Koning ,  David Johannes van den Bergen

    IPC: H01J37/10 ,  H01J37/30 ,  G03F7/20 ,  H01J37/20 ,  H01J37/317 ,  B01J19/12

    CPC classification number: H01J37/023 ,  B01J19/12 ,  G03F7/708 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/70891 ,  G03F7/709 ,  G03F7/70975 ,  H01J37/10 ,  H01J37/20 ,  H01J37/3007 ,  H01J37/3177

    Abstract: The invention relates to a projection lens assembly for directing a beam toward a target. This assembly includes a lens support body (52) that spans a plane (P), and has a connection region (58) and a lateral edge (56). The lens support body is arranged for insertion into a frame (42) of a processing unit along an insertion direction (X) parallel with the plane (P). The projection lens assembly includes conduits (60-64) emanating from the connection region, and a conduit guiding body (70-81) for accommodating the conduits. The guiding body includes a first guiding portion (72) for guiding the conduits from the connection region, along the plane to a lateral region (B) beyond the lateral edge. The guiding body also includes a second guiding portion (78) for guiding the conduits from the lateral region (B) toward a tilted edge (79) of the conduit guiding body.

    Abstract translation: 本发明涉及一种用于将光束导向目标的投影透镜组件。 该组件包括跨越平面（P）的透镜支撑体（52），并且具有连接区域（58）和侧边缘（56）。 透镜支撑体被布置成沿着与平面（P）平行的插入方向（X）插入到处理单元的框架（42）中。 投影透镜组件包括从连接区域发出的导管（60-64）和用于容纳导管的导管引导体（70-81）。 引导体包括用于将管道从连接区域沿着该平面引导到超过侧边缘的横向区域（B）的第一引导部分（72）。 引导体还包括用于将导管从侧向区域（B）引导到导管引导体的倾斜边缘（79）的第二引导部分（78）。

    Asymmetric electrostatic quadrupole deflector for improved field uniformity
    34.
    发明授权
    Asymmetric electrostatic quadrupole deflector for improved field uniformity 有权
    非对称静电四极偏转器，用于改善场均匀性

    公开(公告)号：US09171694B2

    公开(公告)日：2015-10-27

    申请号：US14532805

    申请日：2014-11-04

    Applicant: KLA-Tencor Corporation

    Inventor： Christopher Sears

    IPC: H01J37/147 ,  H01J37/141 ,  H01J37/12 ,  H01J37/153 ,  H01J37/10

    CPC classification number: H01J37/1472 ,  H01J37/10 ,  H01J37/1471 ,  H01J37/153 ,  H01J2237/10 ,  H01J2237/1508 ,  H01J2237/1516 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2602 ,  H01J2237/28

    Abstract: An electron beam device for inspecting a target substrate or specimen thereon includes a beam separator with an asymmetric quadrupole electrostatic deflector for improving field uniformity for a single direction of deflection. The asymmetric quadrupole electrostatic deflector includes two orthogonal electrode plates spanning roughly 60 degrees and two electrode plates spanning roughly 120 degrees, the two latter plates defining a unidirectional deflection field. The device generates a primary electron beam and focuses the primary electron beam along an optical axis into the target substrate. Secondary electrons detected at the target substrate are focused into a secondary electron beam. The beam separator with asymmetric quadrupole electrostatic deflector deflects the secondary electron beam away from the axis of the primary electron beam in the direction of deflection and into a detector array.

    Abstract translation: 用于检查目标衬底或样本的电子束装置包括具有不对称四极静电偏转器的光束分离器，用于改善单个偏转方向的场均匀性。 不对称四极静电偏转器包括跨越大约60度的两个正交电极板和跨越大约120度的两个电极板，后两个板限定单向偏转场。 器件产生一次电子束，并将一次电子束沿光轴聚焦到目标衬底中。 在目标衬底处检测到的二次电子被聚焦成二次电子束。 具有不对称四极静电偏转器的光束分离器使二次电子束在偏转方向上偏离一次电子束的轴线并且进入检测器阵列。

    Charged Particle Device
    35.
    发明申请
    Charged Particle Device 审中-公开
    带电粒子装置

    公开(公告)号：US20150179394A1

    公开(公告)日：2015-06-25

    申请号：US14404115

    申请日：2013-04-22

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Tsutomu Saito ,  Kenji Aoki

    IPC: H01J37/10 ,  H01J37/26

    CPC classification number: H01J37/10 ,  H01J37/09 ,  H01J37/18 ,  H01J37/26 ,  H01J2237/103

    Abstract: A preferred aim of the present invention is to provide a charged particle beam device having a high differential exhaust performance while maintaining a large dynamic range of an irradiation current by effectively arranging an aperture for differential pumping (111) and an objective final aperture (110). The present invention has features that a lens barrel including therein an optical system of the charged particle beam device (100) includes a first space (106) having a first degree of vacuum and a second space (105) having a degree of vacuum higher than the first degree of vacuum, and that the objective final aperture (110) is arranged in the second space (105).

    Abstract translation: 本发明的优选目的是提供一种具有高差分排气性能的带电粒子束装置，同时通过有效地布置差分泵浦（111）和目标最终孔径（110）的孔径来保持辐射电流的大动态范围， 。 本发明的特征在于，其中包括带电粒子束装置（100）的光学系统的镜筒包括具有第一真空度的第一空间（106）和具有高于 第一真空度，并且目标最终孔（110）布置在第二空间（105）中。

    SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFORE AND METHOD OF OPERATING THEREOF
    38.
    发明申请
    SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFORE AND METHOD OF OPERATING THEREOF 有权
    可切换多用途检测器及其操作方法及其操作方法

    公开(公告)号：US20150021474A1

    公开(公告)日：2015-01-22

    申请号：US13960393

    申请日：2013-08-06

    Applicant: Matthias FIRNKES ,  Stefan LANIO ,  Gerald SCHÖNECKER ,  Dieter WINKLER

    Inventor： Matthias FIRNKES ,  Stefan LANIO ,  Gerald SCHÖNECKER ,  Dieter WINKLER

    IPC: H01J37/21 ,  H01J37/147 ,  H01J37/10

    CPC classification number: H01J37/21 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/24592

    Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.

    Abstract translation: 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中第一孔口具有凹形部分，特别地其中第一孔 开口有枕形。

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