Post passivation interconnection schemes on top of the IC chips
    93.
    发明申请
    Post passivation interconnection schemes on top of the IC chips 有权
    后置钝化互连方案在IC芯片之上

    公开(公告)号:US20070246834A1

    公开(公告)日:2007-10-25

    申请号:US11818028

    申请日:2007-06-13

    IPC分类号: H01L23/48

    摘要: A new method is provided for the creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over the layer of dielectric and a thick second layer of dielectric is created over the surface of the layer of passivation. Thick and wide post-passivation interconnect lines are created in the thick second layer of dielectric. The first layer of dielectric may also be eliminated, creating the wide thick passivation interconnect network on the surface of the layer of passivation that has been deposited over the surface of a substrate.

    摘要翻译: 提供了一种创建互连线的方法。 细线互连提供在已经在衬底的表面中或其上形成的半导体电路的第一绝缘层中。 在电介质层上沉积钝化层,并在钝化层的表面上形成厚的第二电介质层。 在厚的第二层电介质中产生厚而宽的后钝化互连线。 也可以消除第一层电介质,在已​​经沉积在衬底的表面上的钝化层的表面上产生宽厚的钝化互连网络。