公开(公告)号：US10181457B2

公开(公告)日：2019-01-15

申请号：US15332991

申请日：2016-10-24

申请人： Invensas Corporation

发明人： Ashok S. Prabhu ,  Rajesh Katkar

IPC分类号： H01L23/00 ,  H01L23/31 ,  H01L25/10 ,  H01L21/48 ,  H01L21/56 ,  H01L21/60

摘要： Apparatuses and methods relating generally to a microelectronic package for wafer-level chip scale packaging with fan-out are disclosed. In an apparatus, there is a substrate having an upper surface and a lower surface opposite the upper surface. A microelectronic device is coupled to the upper surface with the microelectronic device in a face-up orientation. Wire bond wires are coupled to and extending away from the upper surface. Posts of the microelectronic device extend away from a front face thereof. Conductive pads are formed in the substrate associated with the wire bond wires for electrical conductivity.

公开(公告)号：US10159148B2

公开(公告)日：2018-12-18

申请号：US15700483

申请日：2017-09-11

申请人： Invensas Corporation

发明人： Rajesh Katkar ,  Cyprian Emeka Uzoh ,  Belgacem Haba ,  Ilyas Mohammed

IPC分类号： H05K1/09 ,  H05K1/03 ,  H05K1/11 ,  H01L23/498 ,  H01L21/48 ,  H01L23/13 ,  H05K3/40 ,  H05K3/42 ,  H01L23/373 ,  H01L23/538 ,  H01L23/00 ,  H01L25/065

摘要： Interposers and methods of making the same are disclosed herein. In one embodiment, an interposer includes a region having first and second oppositely facing surfaces and a plurality of pores, each pore extending in a first direction from the first surface towards the second surface, wherein alumina extends along a wall of each pore; a plurality of electrically conductive connection elements extending in the first direction, consisting essentially of aluminum and being electrically isolated from one another by at least the alumina; a first conductive path provided at the first surface for connection with a first component external to the interposer; and a second conductive path provided at the second surface for connection with a second component external to the interposer, wherein the first and second conductive paths are electrically connected through at least some of the connection elements.

公开(公告)号：US20180337118A1

公开(公告)日：2018-11-22

申请号：US16017010

申请日：2018-06-25

申请人： Invensas Corporation

发明人： Hong Shen ,  Liang Wang ,  Gabriel Z. Guevara ,  Rajesh Katkar ,  Cyprian Emeka Uzoh ,  Laura Wills Mirkarimi

IPC分类号： H01L23/498 ,  H01L25/00 ,  H01L21/48 ,  H01L23/00 ,  H01L25/065

摘要： An interposer (110) has contact pads at the top and/or bottom surfaces for connection to circuit modules (e.g. ICs 112). The interposer includes a substrate made of multiple layers (110.i). Each layer can be a substrate (110S), possibly a ceramic substrate, with circuitry. The substrates extend vertically. Multiple interposers are fabricated in a single structure (310) made of vertical layers (310.i) corresponding to the interposers' layers. The structure is diced along horizontal planes (314) to provide the interposers. An interposer's vertical conductive lines (similar to through-substrate vias) can be formed on the substrates' surfaces before dicing and before all the substrates are attached to each other. Thus, there is no need to make through-substrate holes for the vertical conductive lines. Non-vertical features can also be formed on the substrates' surfaces before the substrates are attached to each other. Other embodiments are also provided.

公开(公告)号：US10008469B2

公开(公告)日：2018-06-26

申请号：US15357553

申请日：2016-11-21

申请人： Invensas Corporation

发明人： Rajesh Katkar ,  Tu Tam Vu ,  Bongsub Lee ,  Kyong-Mo Bang ,  Xuan Li ,  Long Huynh ,  Gabriel Z. Guevara ,  Akash Agrawal ,  Willmar Subido ,  Laura Wills Mirkarimi

IPC分类号： H01L23/00 ,  H01L23/31 ,  H01L25/065 ,  H01L21/56 ,  H01L21/78 ,  H01L23/538 ,  H01L25/10 ,  H01L25/00 ,  H01L23/498 ,  H01L21/48

CPC分类号： H01L24/49 ,  H01L21/486 ,  H01L21/561 ,  H01L21/565 ,  H01L21/568 ,  H01L21/78 ,  H01L23/3114 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/5389 ,  H01L24/19 ,  H01L24/20 ,  H01L24/48 ,  H01L24/85 ,  H01L24/96 ,  H01L24/97 ,  H01L25/0657 ,  H01L25/105 ,  H01L25/50 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/33181 ,  H01L2224/4801 ,  H01L2224/48235 ,  H01L2224/484 ,  H01L2224/4845 ,  H01L2224/49171 ,  H01L2224/49173 ,  H01L2224/49177 ,  H01L2224/73217 ,  H01L2224/73267 ,  H01L2224/85005 ,  H01L2224/92244 ,  H01L2224/97 ,  H01L2225/06506 ,  H01L2225/0651 ,  H01L2225/1035 ,  H01L2225/1041 ,  H01L2225/1058 ,  H01L2924/00014 ,  H01L2924/10252 ,  H01L2924/10253 ,  H01L2924/10271 ,  H01L2924/10272 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2924/2064 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2224/45099 ,  H01L2224/83 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2224/85399

摘要： An apparatus relates generally to a microelectronic package. In such an apparatus, a microelectronic die has a first surface, a second surface opposite the first surface, and a sidewall surface between the first and second surfaces. A plurality of wire bond wires with proximal ends thereof are coupled to either the first surface or the second surface of the microelectronic die with distal ends of the plurality of wire bond wires extending away from either the first surface or the second surface, respectively, of the microelectronic die. A portion of the plurality of wire bond wires extends outside a perimeter of the microelectronic die into a fan-out (“FO”) region. A molding material covers the first surface, the sidewall surface, and portions of the plurality of the wire bond wires from the first surface of the microelectronic die to an outer surface of the molding material.

公开(公告)号：US20180145105A1

公开(公告)日：2018-05-24

申请号：US15875067

申请日：2018-01-19

申请人： Invensas Corporation

发明人： Rajesh Katkar

IPC分类号： H01L27/146 ,  H01L21/768 ,  H01L23/00 ,  H01L23/48

CPC分类号： H01L27/14634 ,  H01L21/76898 ,  H01L23/481 ,  H01L24/18 ,  H01L27/14618 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14687 ,  H01L27/1469 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/18 ,  H01L2224/19 ,  H01L2224/32145 ,  H01L2224/73267 ,  H01L2924/15153 ,  H01L2924/16235

摘要： An image sensor device, as well as methods therefor, is disclosed. This image sensor device includes a substrate having bond pads. The substrate has a through substrate channel defined therein extending between a front side surface and a back side surface thereof. The front side surface is associated with an optically-activatable surface. The bond pads are located at or proximal to the front side surface aligned for access via the through substrate channel. Wire bond wires are bonded to the bond pads at first ends thereof extending away from the bond pads with second ends of the wire bond wires located outside of an opening of the channel at the back side surface. A molding layer is disposed along the back side surface and in the through substrate channel. A redistribution layer is in contact with the molding layer and interconnected to the second ends of the wire bond wires.

公开(公告)号：US09911718B2

公开(公告)日：2018-03-06

申请号：US15353552

申请日：2016-11-16

申请人： Invensas Corporation

发明人： Ashok S. Prabhu ,  Rajesh Katkar

IPC分类号： H01L21/76 ,  H01L25/065 ,  H01L21/768 ,  H01L21/56 ,  H01L21/683 ,  H01L21/288 ,  H01L25/00 ,  H01L23/31 ,  H01L23/48 ,  H01L21/48 ,  H01L21/54 ,  H01L23/18 ,  H01L23/538 ,  H01L25/10 ,  H01L23/498

CPC分类号： H01L25/0657 ,  H01L21/288 ,  H01L21/4853 ,  H01L21/486 ,  H01L21/54 ,  H01L21/56 ,  H01L21/565 ,  H01L21/568 ,  H01L21/6835 ,  H01L21/76885 ,  H01L21/76895 ,  H01L23/18 ,  H01L23/3114 ,  H01L23/3128 ,  H01L23/481 ,  H01L23/49811 ,  H01L23/5384 ,  H01L23/5386 ,  H01L23/5389 ,  H01L24/19 ,  H01L25/105 ,  H01L25/50 ,  H01L2221/68331 ,  H01L2221/68345 ,  H01L2221/68359 ,  H01L2224/16225 ,  H01L2224/81005 ,  H01L2225/06517 ,  H01L2225/0652 ,  H01L2225/06548 ,  H01L2225/06572 ,  H01L2225/1035 ,  H01L2225/1041 ,  H01L2225/1058 ,  H01L2225/1094 ,  H01L2924/15311 ,  H01L2924/19107 ,  H01L2924/3511

摘要： Methods and apparatuses relate generally to a packaged microelectronic device for a package-on-package device (“PoP”) with enhanced tolerance for warping. In one such packaged microelectronic device, at least one redistribution layer includes first interconnect pads on a lower surface and second interconnect pads on an upper surface of the at least one redistribution layer. Interconnect structures are on and extend away from corresponding upper surfaces of the second interconnect pads. A microelectronic device is coupled to an upper surface of the at least one redistribution layer. A dielectric layer surrounds at least portions of shafts of the interconnect structures. The interconnect structures have upper ends thereof protruding above an upper surface of the dielectric layer a distance to increase a warpage limit for a combination of at least the packaged microelectronic device and one other packaged microelectronic device directly coupled to protrusions of the interconnect structures.

公开(公告)号：US09888584B2

公开(公告)日：2018-02-06

申请号：US14942781

申请日：2015-11-16

申请人： Invensas Corporation

发明人： Liang Wang ,  Rajesh Katkar ,  Hong Shen ,  Cyprian Emeka Uzoh

IPC分类号： H05K1/11 ,  H01L23/00 ,  H05K3/40 ,  H05K3/34

CPC分类号： H05K3/4007 ,  H01L24/81 ,  H01L2224/81193 ,  H01L2924/3841 ,  H05K1/111 ,  H05K3/3431

摘要： A contact pad includes a solder-wettable porous network (310) which wicks the molten solder (130) and thus restricts the lateral spread of the solder, thus preventing solder bridging between adjacent contact pads.

公开(公告)号：US20170372994A1

公开(公告)日：2017-12-28

申请号：US15700483

申请日：2017-09-11

申请人： Invensas Corporation

发明人： Rajesh Katkar ,  Cyprian Emeka Uzoh ,  Belgacem Haba ,  Ilyas Mohammed

IPC分类号： H01L23/498 ,  H01L25/065 ,  H01L23/373 ,  H01L23/538 ,  H01L23/00 ,  H01L21/48

CPC分类号： H05K1/0306 ,  H01L21/481 ,  H01L21/4853 ,  H01L21/486 ,  H01L23/13 ,  H01L23/3731 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/49833 ,  H01L23/49838 ,  H01L23/49894 ,  H01L23/5381 ,  H01L23/5384 ,  H01L23/5385 ,  H01L23/5386 ,  H01L24/17 ,  H01L25/0655 ,  H01L25/0657 ,  H01L2224/16113 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/16235 ,  H01L2225/06517 ,  H01L2225/0652 ,  H01L2225/06548 ,  H01L2225/06572 ,  H01L2225/06586 ,  H01L2225/06589 ,  H01L2225/1023 ,  H01L2225/107 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/15331 ,  H05K1/09 ,  H05K1/112 ,  H05K1/115 ,  H05K3/4007 ,  H05K3/42 ,  H05K2201/09545 ,  H05K2201/10378 ,  H05K2203/0323

摘要： Interposers and methods of making the same are disclosed herein. In one embodiment, an interposer includes a region having first and second oppositely facing surfaces and a plurality of pores, each pore extending in a first direction from the first surface towards the second surface, wherein alumina extends along a wall of each pore; a plurality of electrically conductive connection elements extending in the first direction, consisting essentially of aluminum and being electrically isolated from one another by at least the alumina; a first conductive path provided at the first surface for connection with a first component external to the interposer; and a second conductive path provided at the second surface for connection with a second component external to the interposer, wherein the first and second conductive paths are electrically connected through at least some of the connection elements.

公开(公告)号：US09852969B2

公开(公告)日：2017-12-26

申请号：US15191333

申请日：2016-06-23

申请人： Invensas Corporation

发明人： Cyprian Emeka Uzoh ,  Rajesh Katkar

IPC分类号： H01L23/498 ,  H01L23/36 ,  H01L25/065 ,  H01L23/00

CPC分类号： H01L23/49816 ,  H01L23/36 ,  H01L23/49811 ,  H01L24/10 ,  H01L24/13 ,  H01L24/16 ,  H01L24/17 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L24/81 ,  H01L24/94 ,  H01L24/97 ,  H01L25/0657 ,  H01L2224/13111 ,  H01L2224/13116 ,  H01L2224/13124 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13169 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/1703 ,  H01L2224/1718 ,  H01L2224/32145 ,  H01L2224/45147 ,  H01L2224/4823 ,  H01L2224/48247 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2224/81825 ,  H01L2224/97 ,  H01L2225/06506 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00014 ,  H01L2924/01322 ,  H01L2924/15192 ,  H01L2924/15787 ,  H01L2924/15788 ,  H01L2924/16152 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207

摘要： An apparatus relating generally to a die stack is disclosed. In such an apparatus, a substrate is included. A first bond via array includes first wires each of a first length extending from a first surface of the substrate. An array of bump interconnects is disposed on the first surface. A die is interconnected to the substrate via the array of bump interconnects. A second bond via array includes second wires each of a second length different than the first length extending from a second surface of the die.

公开(公告)号：US09847238B2

公开(公告)日：2017-12-19

申请号：US15443371

申请日：2017-02-27

申请人： Invensas Corporation

发明人： Xuan Li ,  Rajesh Katkar ,  Long Huynh ,  Laura Wills Mirkarimi ,  Bongsub Lee ,  Gabriel Z. Guevara ,  Tu Tam Vu ,  Kyong-Mo Bang ,  Akash Agrawal

IPC分类号： H01L21/56 ,  H01L21/683 ,  H01L21/768 ,  H01L25/00 ,  H01L21/02 ,  H01L23/00 ,  H01L21/304 ,  H01L23/29 ,  H01L25/065

CPC分类号： H01L21/568 ,  H01L21/02118 ,  H01L21/304 ,  H01L21/4846 ,  H01L21/561 ,  H01L21/565 ,  H01L21/6835 ,  H01L21/76838 ,  H01L21/76892 ,  H01L23/293 ,  H01L23/3135 ,  H01L23/4985 ,  H01L23/5384 ,  H01L24/09 ,  H01L24/13 ,  H01L24/14 ,  H01L24/16 ,  H01L24/19 ,  H01L24/29 ,  H01L24/32 ,  H01L24/81 ,  H01L24/83 ,  H01L24/97 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/13006 ,  H01L2224/131 ,  H01L2224/1403 ,  H01L2224/14051 ,  H01L2224/16111 ,  H01L2224/16237 ,  H01L2224/27436 ,  H01L2224/29011 ,  H01L2224/2919 ,  H01L2224/73203 ,  H01L2224/73267 ,  H01L2224/81005 ,  H01L2224/8114 ,  H01L2224/81191 ,  H01L2224/8185 ,  H01L2224/81903 ,  H01L2224/81904 ,  H01L2224/8192 ,  H01L2224/83192 ,  H01L2224/83856 ,  H01L2224/92244 ,  H01L2224/97 ,  H01L2924/15311 ,  H01L2224/81 ,  H01L2924/0665 ,  H01L2924/00014 ,  H01L2924/014

摘要： Fan-out wafer-level packaging (WLP) using metal foil lamination is provided. An example wafer-level package incorporates a metal foil, such as copper (Cu), to relocate bonding pads in lieu of a conventional deposited or plated RDL. A polymer such as an epoxy layer adheres the metal foil to the package creating conductive contacts between the metal foil and metal pillars of a die. The metal foil may be patterned at different stages of a fabrication process. An example wafer-level package with metal foil provides relatively inexpensive electroplating-free traces that replace expensive RDL processes. Example techniques can reduce interfacial stress at fan-out areas to enhance package reliability, and enable smaller chips to be used. The metal foil provides improved fidelity of high frequency signals. The metal foil can be bonded to metallic pillar bumps before molding, resulting in less impact on the mold material.