Package structure having micro-electromechanical element
    2.
    发明授权
    Package structure having micro-electromechanical element 有权
    具有微机电元件的封装结构

    公开(公告)号:US08564115B2

    公开(公告)日:2013-10-22

    申请号:US13492220

    申请日:2012-06-08

    IPC分类号: H01L23/04

    摘要: Proposed is a package structure having a micro-electromechanical (MEMS) element, including a chip having a plurality of electrical connecting pads and a MEMS element formed thereon; a lid disposed on the chip for covering the MEMS element; a stud bump disposed on each of the electrical connecting pads; an encapsulant formed on the chip with part of the stud bumps being exposed from the encapsulant; and a metal conductive layer formed on the encapsulant and connected to the stud bumps. The invention is characterized by completing the packaging process on the wafer directly to enable thinner and cheaper package structures to be fabricated within less time. This invention further provides a method for fabricating the package structure as described above.

    摘要翻译: 提出具有微机电(MEMS)元件的封装结构,其包括具有多个电连接焊盘和形成在其上的MEMS元件的芯片; 设置在所述芯片上用于覆盖所述MEMS元件的盖; 设置在每个电连接焊盘上的螺柱凸块; 形成在芯片上的密封剂,其中一部分柱状凸块从密封剂暴露出来; 以及金属导电层,形成在密封剂上并连接到凸块上。 本发明的特征在于直接完成晶片上的封装工艺,以便在更短的时间内制造更薄和更便宜的封装结构。 本发明还提供如上所述的用于制造封装结构的方法。

    FABRICATION METHOD OF SEMICONDUCTOR PACKAGE STRUCTURE
    4.
    发明申请
    FABRICATION METHOD OF SEMICONDUCTOR PACKAGE STRUCTURE 有权
    半导体封装结构的制造方法

    公开(公告)号:US20110159643A1

    公开(公告)日:2011-06-30

    申请号:US12770059

    申请日:2010-04-29

    IPC分类号: H01L21/60 H01L21/56

    摘要: A fabrication method of a semiconductor package structure includes: patterning a metal plate having first and second surfaces; forming a dielectric layer on the metal plate; forming a metal layer on the first surface and the dielectric layer; forming metal pads on the second surface, the metal layer having a die pad and traces each having a bond pad; mounting a semiconductor chip on the die pad, followed by connecting electrically the semiconductor chip to the bond pads through bonding wires; forming an encapsulant to cover the semiconductor chip and the metal layer; removing portions of the metal plate not covered by the metal pads so as to form metal pillars; and performing a singulation process. The fabrication method is characterized by disposing traces with bond pads close to the die pad to shorten the bonding wires and forming metal pillars protruding from the dielectric layer to avoid solder bridging.

    摘要翻译: 半导体封装结构的制造方法包括:图案化具有第一表面和第二表面的金属板; 在所述金属板上形成电介质层; 在所述第一表面和所述电介质层上形成金属层; 在所述第二表面上形成金属焊盘,所述金属层具有管芯焊盘并且各自具有接合焊盘; 将半导体芯片安装在芯片焊盘上,然后通过接合线将半导体芯片电连接到焊盘; 形成密封剂以覆盖半导体芯片和金属层; 去除未被金属垫覆盖的金属板的部分,以形成金属柱; 并执行单独处理。 该制造方法的特征在于,将具有接合焊盘的迹线设置在芯片焊盘附近以缩短接合线并形成从电介质层突出的金属柱,以避免焊料桥接。