Method of producing semiconductor devices having easy separability from a metal mold after molding
    7.
    发明授权
    Method of producing semiconductor devices having easy separability from a metal mold after molding 失效
    在成型后具有与金属模具容易分离的半导体器件的制造方法

    公开(公告)号:US06511620B1

    公开(公告)日:2003-01-28

    申请号:US09511496

    申请日:2000-02-23

    IPC分类号: B29C3318

    摘要: A method of producing semiconductor devices which have an excellent separability from a metal mold after resin encapsulation and thus eliminates the need to clean the metal mold. A metal mold for producing such semiconductor devices is also provided. According to the method of the present invention, the metal mold is first opened, and two separation sheets are disposed on dividing surfaces including cavity forming surfaces of a first metal mold and a second metal mold. A substrate is then placed on one of the separation sheets, with its semiconductor chip formed surface facing the second metal mold. An encapsulation resin is provided on the substrate placed on one of the separation sheets. The metal mold in a heated state is closed and pressed to form a resin layer for encapsulating electrodes formed on the substrate. The metal mold is again opened, and the resin-encapsulated substrate is taken out of the metal mold. After the separation sheets are removed, the substrate is divided into individual semiconductor devices.

    摘要翻译: 一种制造半导体器件的方法,其在树脂封装之后与金属模具具有优异的可分离性,因此不需要清洁金属模具。 还提供了用于制造这种半导体器件的金属模具。 根据本发明的方法,首先打开金属模具,并且在包括第一金属模具和第二金属模具的空腔形成表面的分割表面上设置两个分离片。 然后将基板放置在一个分离片上,其半导体芯片形成表面面向第二金属模具。 在放置在一个分离片上的基板上设置封装树脂。 将处于加热状态的金属模封闭并压制以形成用于封装形成在基板上的电极的树脂层。 再次打开金属模具,将树脂封装的基板从金属模具中取出。 在分离片被去除之后,将衬底分成单独的半导体器件。