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公开(公告)号:CN107210237A
公开(公告)日:2017-09-26
申请号:CN201580074691.2
申请日:2015-12-08
申请人: 半导体元件工业有限责任公司
IPC分类号: H01L21/60 , H01L21/683 , H01L23/482
CPC分类号: H01L24/32 , H01L21/4825 , H01L21/6836 , H01L21/78 , H01L23/482 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/27 , H01L24/28 , H01L24/29 , H01L24/30 , H01L24/31 , H01L24/33 , H01L24/81 , H01L24/83 , H01L24/94 , H01L2221/68327 , H01L2221/68381 , H01L2224/03416 , H01L2224/03418 , H01L2224/03444 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/03464 , H01L2224/0347 , H01L2224/0348 , H01L2224/0401 , H01L2224/04026 , H01L2224/05075 , H01L2224/05082 , H01L2224/05083 , H01L2224/05147 , H01L2224/05155 , H01L2224/05166 , H01L2224/05171 , H01L2224/05639 , H01L2224/05647 , H01L2224/11462 , H01L2224/11464 , H01L2224/11849 , H01L2224/1308 , H01L2224/13111 , H01L2224/13139 , H01L2224/13147 , H01L2224/13155 , H01L2224/13166 , H01L2224/13171 , H01L2224/16227 , H01L2224/16503 , H01L2224/16507 , H01L2224/17106 , H01L2224/2908 , H01L2224/29082 , H01L2224/29083 , H01L2224/29111 , H01L2224/29139 , H01L2224/29147 , H01L2224/29155 , H01L2224/29166 , H01L2224/29171 , H01L2224/29565 , H01L2224/29582 , H01L2224/29655 , H01L2224/29666 , H01L2224/3003 , H01L2224/30505 , H01L2224/32225 , H01L2224/32245 , H01L2224/32503 , H01L2224/81439 , H01L2224/8181 , H01L2224/81815 , H01L2224/81825 , H01L2224/83439 , H01L2224/8381 , H01L2224/83815 , H01L2224/83825 , H01L2224/8481 , H01L2224/8581 , H01L2224/8681 , H01L2224/94 , H01L2924/00015 , H01L2924/01327 , H01L2924/10162 , H01L2924/12041 , H01L2224/03 , H01L2224/27 , H01L2924/00014 , H01L2924/00012 , H01L2924/01074 , H01L2924/01024 , H01L2924/20642 , H01L2224/48
摘要: 提供了形成半导体封装件的方法。具体实施方式包括在管芯背面(16)形成具有多个子层(40‑46)的中间金属层(26),每个子层包含金属,所述金属选自钛、镍、铜、银、以及它们的组合。将锡层(48)沉积到所述中间金属层(26)上,然后与衬底(50)的银层(52)一起进行回流焊以形成熔融温度大于260摄氏度并包括银和锡组成的金属间化合物和/或铜和锡组成的金属间化合物的金属间化合物层(56)。形成半导体封装件的另一种方法包括在管芯(14)的顶侧(18)上的多个裸露焊盘(20)中的每个裸露焊盘上形成凸块(22),每个裸露焊盘(20)由钝化层(24)所包围,每个凸块(22)包括如上所述的中间金属层(36)和耦接到所述中间金属层(36)的锡层(48),锡层(48)然后被以衬底(50)的银层(52)回流焊以形成如上所述的金属间化合物层(64)。
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公开(公告)号:CN102576798A
公开(公告)日:2012-07-11
申请号:CN201080047702.5
申请日:2010-07-22
申请人: 索尼化学&信息部件株式会社
IPC分类号: H01L33/60 , C09J9/02 , C09J11/04 , C09J201/00 , H01L21/60
CPC分类号: C09J9/02 , C08G59/42 , C08K3/08 , C08K9/02 , C08L23/02 , C08L63/00 , C09J11/04 , C09J123/02 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/73 , H01L24/83 , H01L33/60 , H01L2224/13144 , H01L2224/16225 , H01L2224/16227 , H01L2224/2929 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/29386 , H01L2224/2939 , H01L2224/29444 , H01L2224/29447 , H01L2224/29455 , H01L2224/2949 , H01L2224/29499 , H01L2224/29644 , H01L2224/29647 , H01L2224/29655 , H01L2224/32225 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73265 , H01L2224/83851 , H01L2924/00013 , H01L2924/01004 , H01L2924/01012 , H01L2924/01015 , H01L2924/01019 , H01L2924/01029 , H01L2924/01046 , H01L2924/01047 , H01L2924/01057 , H01L2924/01078 , H01L2924/01079 , H01L2924/07811 , H01L2924/12041 , H01L2924/181 , H01L2924/00014 , H01L2924/00 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599 , H01L2924/00012 , H01L2924/0665 , H01L2924/00011
摘要: 用于在配线板上各向异性导电连接发光元件的各向异性导电粘合剂用的光反射性导电颗粒,由被金属材料包覆的芯粒和在该芯粒表面由折射率为1.52以上的光反射性无机颗粒形成的光反射层构成。作为折射率为1.52以上的光反射性无机颗粒,可以列举氧化钛颗粒、氧化锌颗粒或氧化铝颗粒。
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公开(公告)号:CN102576798B
公开(公告)日:2016-11-16
申请号:CN201080047702.5
申请日:2010-07-22
申请人: 迪睿合电子材料有限公司
IPC分类号: H01L33/60 , C09J9/02 , C09J11/04 , C09J201/00 , H01L21/60
CPC分类号: C09J9/02 , C08G59/42 , C08K3/08 , C08K9/02 , C08L23/02 , C08L63/00 , C09J11/04 , C09J123/02 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/73 , H01L24/83 , H01L33/60 , H01L2224/13144 , H01L2224/16225 , H01L2224/16227 , H01L2224/2929 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/29386 , H01L2224/2939 , H01L2224/29444 , H01L2224/29447 , H01L2224/29455 , H01L2224/2949 , H01L2224/29499 , H01L2224/29644 , H01L2224/29647 , H01L2224/29655 , H01L2224/32225 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73265 , H01L2224/83851 , H01L2924/00013 , H01L2924/01004 , H01L2924/01012 , H01L2924/01015 , H01L2924/01019 , H01L2924/01029 , H01L2924/01046 , H01L2924/01047 , H01L2924/01057 , H01L2924/01078 , H01L2924/01079 , H01L2924/07811 , H01L2924/12041 , H01L2924/181 , H01L2924/00014 , H01L2924/00 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599 , H01L2924/00012 , H01L2924/0665 , H01L2924/00011
摘要: 用于在配线板上各向异性导电连接发光元件的各向异性导电粘合剂用的光反射性导电颗粒,由被金属材料包覆的芯粒和在该芯粒表面由折射率为1.52以上的光反射性无机颗粒形成的光反射层构成。作为折射率为1.52以上的光反射性无机颗粒,可以列举氧化钛颗粒、氧化锌颗粒或氧化铝颗粒。
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公开(公告)号:CN103094138A
公开(公告)日:2013-05-08
申请号:CN201210433490.5
申请日:2012-11-02
申请人: 国际商业机器公司
发明人: S·V·源
IPC分类号: H01L21/60 , H01L23/488
CPC分类号: H01L23/488 , H01L23/481 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/81 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L2224/13025 , H01L2224/13147 , H01L2224/13562 , H01L2224/1357 , H01L2224/1358 , H01L2224/13649 , H01L2224/13655 , H01L2224/13657 , H01L2224/13666 , H01L2224/13676 , H01L2224/13681 , H01L2224/13684 , H01L2224/16145 , H01L2224/16501 , H01L2224/29147 , H01L2224/29564 , H01L2224/2957 , H01L2224/2958 , H01L2224/29649 , H01L2224/29655 , H01L2224/29657 , H01L2224/29666 , H01L2224/29676 , H01L2224/29681 , H01L2224/29684 , H01L2224/32501 , H01L2224/80075 , H01L2224/80097 , H01L2224/80895 , H01L2224/80896 , H01L2224/81005 , H01L2224/81193 , H01L2224/8183 , H01L2224/81895 , H01L2224/83005 , H01L2224/83193 , H01L2224/8383 , H01L2225/06513 , H01L2225/06541 , H01L2924/12042 , H01L2924/1306 , H01L2924/00014 , H01L2924/013 , H01L2924/00012 , H01L2924/053 , H01L2924/00
摘要: 本发明公开涉及具有增强的铜对铜接合的三维(3D)集成电路及其形成方法。至少在第一器件晶片的Cu表面上形成至少一个金属粘附层。具有另一Cu表面的第二器件晶片被放置在第一器件晶片的Cu表面顶上且在至少一个金属粘附层上面。第一器件晶片和第二器件晶片然后被接合在一起。接合包含在施加或不施加外部施加的压力的情况下在低于400°C的温度下加热器件晶片。在加热期间,两个Cu表面被接合在一起,并且至少一个金属粘附层从两个Cu表面得到氧原子,并且在Cu表面之间形成至少一个金属氧化物接合层。
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公开(公告)号:CN103779303A
公开(公告)日:2014-05-07
申请号:CN201310631177.7
申请日:2013-10-18
申请人: 英飞凌科技股份有限公司
IPC分类号: H01L23/488 , H01L25/07 , H01L21/60
CPC分类号: H01L25/50 , H01L21/78 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/24 , H01L24/27 , H01L24/29 , H01L24/30 , H01L24/92 , H01L24/96 , H01L25/072 , H01L25/16 , H01L2224/0401 , H01L2224/04026 , H01L2224/05553 , H01L2224/05554 , H01L2224/05555 , H01L2224/11003 , H01L2224/1112 , H01L2224/114 , H01L2224/1161 , H01L2224/11826 , H01L2224/13006 , H01L2224/13019 , H01L2224/13147 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13171 , H01L2224/13562 , H01L2224/1357 , H01L2224/13611 , H01L2224/13618 , H01L2224/13639 , H01L2224/13644 , H01L2224/13655 , H01L2224/13669 , H01L2224/1403 , H01L2224/14181 , H01L2224/14505 , H01L2224/24101 , H01L2224/24137 , H01L2224/2518 , H01L2224/27003 , H01L2224/2712 , H01L2224/274 , H01L2224/2761 , H01L2224/27826 , H01L2224/28105 , H01L2224/29006 , H01L2224/29019 , H01L2224/29155 , H01L2224/29157 , H01L2224/2916 , H01L2224/29171 , H01L2224/29562 , H01L2224/2957 , H01L2224/29611 , H01L2224/29618 , H01L2224/29639 , H01L2224/29644 , H01L2224/29655 , H01L2224/29669 , H01L2224/3003 , H01L2224/30181 , H01L2224/30505 , H01L2224/92133 , H01L2224/92135 , H01L2224/94 , H01L2224/96 , H01L2924/01322 , H01L2924/12032 , H01L2924/12042 , H01L2924/1301 , H01L2924/1305 , H01L2924/13055 , H01L2924/1306 , H01L2924/13062 , H01L2924/00 , H01L2924/00014 , H01L2924/014 , H01L2924/01082 , H01L2224/11 , H01L2224/27 , H01L2224/82
摘要: 本发明涉及凸点式封装及其形成方法。根据本发明的实施例,半导体封装包括半导体芯片和凸点。半导体芯片具有主表面上的接触垫。凸点被置于半导体芯片的接触垫上。焊料层被置于凸点的侧壁上。
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公开(公告)号:CN100424862C
公开(公告)日:2008-10-08
申请号:CN200510114180.7
申请日:2005-10-26
申请人: 精工爱普生株式会社
发明人: 田中秀一
IPC分类号: H01L23/485 , H01L21/28
CPC分类号: H01L23/562 , G02F1/13458 , H01L21/563 , H01L24/06 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/90 , H01L24/91 , H01L2224/0231 , H01L2224/02313 , H01L2224/0233 , H01L2224/0236 , H01L2224/02377 , H01L2224/0239 , H01L2224/024 , H01L2224/0401 , H01L2224/114 , H01L2224/116 , H01L2224/11831 , H01L2224/13016 , H01L2224/13099 , H01L2224/131 , H01L2224/1319 , H01L2224/13624 , H01L2224/13644 , H01L2224/13647 , H01L2224/13655 , H01L2224/13664 , H01L2224/13666 , H01L2224/13671 , H01L2224/13684 , H01L2224/16225 , H01L2224/27825 , H01L2224/27831 , H01L2224/29008 , H01L2224/29013 , H01L2224/29017 , H01L2224/29023 , H01L2224/29101 , H01L2224/2919 , H01L2224/29191 , H01L2224/29563 , H01L2224/2957 , H01L2224/29582 , H01L2224/29624 , H01L2224/29644 , H01L2224/29647 , H01L2224/29655 , H01L2224/29664 , H01L2224/29666 , H01L2224/29671 , H01L2224/29684 , H01L2224/29695 , H01L2224/30155 , H01L2224/32225 , H01L2224/73204 , H01L2224/83101 , H01L2224/83191 , H01L2224/83856 , H01L2924/0001 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01049 , H01L2924/0105 , H01L2924/01066 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/014 , H01L2924/0665 , H01L2924/14 , H01L2924/3511 , H01L2924/00014 , H01L2924/01023 , H01L2924/00 , H01L2924/01028 , H01L2924/01084
摘要: 一种半导体装置,具备:半导体元件,在所述半导体元件上形成的电极焊盘,与所述电极焊盘导电连接的凸块电极;所述凸块电极,具备在所述半导体元件的有源面上形成的树脂突起,和从所述电极焊盘到所述树脂突起的表面配置的导电膜;所述导电膜和所述树脂突起,被非贴紧地配置的半导体装置。
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公开(公告)号:CN105474376A
公开(公告)日:2016-04-06
申请号:CN201480046486.0
申请日:2014-03-26
申请人: LG电子株式会社
发明人: 李炳俊
CPC分类号: H01L33/62 , C09J9/02 , C09J2201/602 , H01L23/4828 , H01L23/4922 , H01L23/5328 , H01L24/29 , H01L24/32 , H01L24/81 , H01L24/83 , H01L24/91 , H01L33/36 , H01L33/38 , H01L51/5246 , H01L2224/0401 , H01L2224/1134 , H01L2224/1411 , H01L2224/2929 , H01L2224/29355 , H01L2224/29386 , H01L2224/29561 , H01L2224/29644 , H01L2224/29655 , H01L2224/81191 , H01L2224/81903 , H01L2224/83192 , H01L2224/83851 , H01L2224/9211 , H01L2225/1058 , H01L2924/12041 , H01L2924/156 , H01L2924/35 , H01L2924/36 , H01L2924/00014 , H01L2924/00 , H01L2224/81 , H01L2224/83
摘要: 一种半导体器件,其包括:电极,所述电极包括多个具有相同长度的支柱;半导体元件,所述半导体元件被构造成从所述电极接收电能;基板,所述基板具有用于向所述半导体元件传送电能或信号的电极图案;以及导电粘合层,所述导电粘合层包括被构造成将所述支柱和所述电极图案彼此电连接的导电物质,并且包括包围所述导电物质的基体。
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公开(公告)号:CN103094138B
公开(公告)日:2015-07-22
申请号:CN201210433490.5
申请日:2012-11-02
申请人: 国际商业机器公司
发明人: S·V·源
IPC分类号: H01L21/60 , H01L23/488
CPC分类号: H01L23/488 , H01L23/481 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/81 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L2224/13025 , H01L2224/13147 , H01L2224/13562 , H01L2224/1357 , H01L2224/1358 , H01L2224/13649 , H01L2224/13655 , H01L2224/13657 , H01L2224/13666 , H01L2224/13676 , H01L2224/13681 , H01L2224/13684 , H01L2224/16145 , H01L2224/16501 , H01L2224/29147 , H01L2224/29564 , H01L2224/2957 , H01L2224/2958 , H01L2224/29649 , H01L2224/29655 , H01L2224/29657 , H01L2224/29666 , H01L2224/29676 , H01L2224/29681 , H01L2224/29684 , H01L2224/32501 , H01L2224/80075 , H01L2224/80097 , H01L2224/80895 , H01L2224/80896 , H01L2224/81005 , H01L2224/81193 , H01L2224/8183 , H01L2224/81895 , H01L2224/83005 , H01L2224/83193 , H01L2224/8383 , H01L2225/06513 , H01L2225/06541 , H01L2924/12042 , H01L2924/1306 , H01L2924/00014 , H01L2924/013 , H01L2924/00012 , H01L2924/053 , H01L2924/00
摘要: 本发明公开涉及具有增强的铜对铜接合的三维(3D)集成电路及其形成方法。至少在第一器件晶片的Cu表面上形成至少一个金属粘附层。具有另一Cu表面的第二器件晶片被放置在第一器件晶片的Cu表面顶上且在至少一个金属粘附层上面。第一器件晶片和第二器件晶片然后被接合在一起。接合包含在施加或不施加外部施加的压力的情况下在低于400°C的温度下加热器件晶片。在加热期间,两个Cu表面被接合在一起,并且至少一个金属粘附层从两个Cu表面得到氧原子,并且在Cu表面之间形成至少一个金属氧化物接合层。
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公开(公告)号:CN1779959A
公开(公告)日:2006-05-31
申请号:CN200510114180.7
申请日:2005-10-26
申请人: 精工爱普生株式会社
发明人: 田中秀一
IPC分类号: H01L23/485 , H01L21/28
CPC分类号: H01L23/562 , G02F1/13458 , H01L21/563 , H01L24/06 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/90 , H01L24/91 , H01L2224/0231 , H01L2224/02313 , H01L2224/0233 , H01L2224/0236 , H01L2224/02377 , H01L2224/0239 , H01L2224/024 , H01L2224/0401 , H01L2224/114 , H01L2224/116 , H01L2224/11831 , H01L2224/13016 , H01L2224/13099 , H01L2224/131 , H01L2224/1319 , H01L2224/13624 , H01L2224/13644 , H01L2224/13647 , H01L2224/13655 , H01L2224/13664 , H01L2224/13666 , H01L2224/13671 , H01L2224/13684 , H01L2224/16225 , H01L2224/27825 , H01L2224/27831 , H01L2224/29008 , H01L2224/29013 , H01L2224/29017 , H01L2224/29023 , H01L2224/29101 , H01L2224/2919 , H01L2224/29191 , H01L2224/29563 , H01L2224/2957 , H01L2224/29582 , H01L2224/29624 , H01L2224/29644 , H01L2224/29647 , H01L2224/29655 , H01L2224/29664 , H01L2224/29666 , H01L2224/29671 , H01L2224/29684 , H01L2224/29695 , H01L2224/30155 , H01L2224/32225 , H01L2224/73204 , H01L2224/83101 , H01L2224/83191 , H01L2224/83856 , H01L2924/0001 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01049 , H01L2924/0105 , H01L2924/01066 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/014 , H01L2924/0665 , H01L2924/14 , H01L2924/3511 , H01L2924/00014 , H01L2924/01023 , H01L2924/00 , H01L2924/01028 , H01L2924/01084
摘要: 一种半导体装置,具备:半导体元件,在所述半导体元件上形成的电极焊盘,与所述电极焊盘导电连接的凸块电极;所述凸块电极,具备在所述半导体元件的有源面上形成的树脂突起,和从所述电极焊盘到所述树脂突起的表面配置的导电膜;所述导电膜和所述树脂突起,被非贴紧地配置的半导体装置。
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