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公开(公告)号:CN107210240B
公开(公告)日:2019-07-19
申请号:CN201680007974.X
申请日:2016-02-01
Applicant: 伊文萨思公司
IPC: H01L21/60
CPC classification number: H01L24/81 , H01L21/768 , H01L23/49838 , H01L23/528 , H01L24/11 , H01L24/13 , H01L24/16 , H01L25/0657 , H01L25/50 , H01L2224/10126 , H01L2224/1182 , H01L2224/13023 , H01L2224/13105 , H01L2224/13109 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13184 , H01L2224/13562 , H01L2224/1357 , H01L2224/1379 , H01L2224/13809 , H01L2224/13811 , H01L2224/13847 , H01L2224/13855 , H01L2224/1601 , H01L2224/16014 , H01L2224/16058 , H01L2224/16145 , H01L2224/16227 , H01L2224/16238 , H01L2224/16503 , H01L2224/16505 , H01L2224/16507 , H01L2224/81007 , H01L2224/81048 , H01L2224/81143 , H01L2224/81193 , H01L2224/8181 , H01L2224/8182 , H01L2224/81862 , H01L2224/81895 , H01L2224/81903 , H01L2224/81905 , H01L2224/94 , H01L2924/01029 , H01L2924/01051 , H01L2924/01327 , H01L2924/364 , H01L2224/11 , H01L2224/81 , H01L2924/00014 , H01L2924/2064
Abstract: 本发明提供了一种大体上涉及微电子器件的设备。在此类设备中,第一基板具有第一表面,其中第一互连件位于所述第一表面上,第二基板具有与所述第一表面间隔开的第二表面,所述第一表面与所述第二表面之间具有间隙。第二互连件位于所述第二表面上。所述第一互连件的下表面和所述第二互连件的上表面彼此耦接以用于所述第一基板和所述第二基板之间的导电性。导电衬圈围绕第一互连件和第二互连件的侧壁,并且介电层围绕所述导电衬圈。
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公开(公告)号:CN108886019A
公开(公告)日:2018-11-23
申请号:CN201780023081.9
申请日:2017-04-27
Applicant: 英帆萨斯公司
IPC: H01L21/768
CPC classification number: H01L25/0657 , H01L24/11 , H01L24/17 , H01L24/27 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L25/50 , H01L2224/11426 , H01L2224/1145 , H01L2224/11452 , H01L2224/11462 , H01L2224/11464 , H01L2224/13111 , H01L2224/13147 , H01L2224/13155 , H01L2224/16112 , H01L2224/16145 , H01L2224/27003 , H01L2224/2761 , H01L2224/27618 , H01L2224/2783 , H01L2224/2919 , H01L2224/32145 , H01L2224/73204 , H01L2224/8385 , H01L2224/9211 , H01L2225/06513 , H01L2924/01013 , H01L2924/01022 , H01L2924/01024 , H01L2924/01079 , H01L2924/0615 , H01L2924/0635 , H01L2924/0645 , H01L2924/00
Abstract: 本发明提供一种微电子组件,其包括:一绝缘层,其具有成一纳米级间距阵列安置于其中的多个纳米级导体;及一对微电子元件。所述纳米级导体可形成所述微电子元件的接点之间的电气互连,而所述绝缘层可以机械方式将所述微电子元件耦接在一起。
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公开(公告)号:CN108122860A
公开(公告)日:2018-06-05
申请号:CN201710419278.6
申请日:2017-06-06
Applicant: 台湾积体电路制造股份有限公司
IPC: H01L23/31 , H01L23/538
CPC classification number: H01L25/117 , H01L21/02354 , H01L21/486 , H01L21/565 , H01L21/568 , H01L21/6835 , H01L21/76883 , H01L22/14 , H01L23/3128 , H01L23/427 , H01L23/49822 , H01L23/49838 , H01L23/5389 , H01L23/562 , H01L24/03 , H01L24/09 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/49 , H01L24/81 , H01L24/83 , H01L25/0657 , H01L25/105 , H01L25/50 , H01L2221/68359 , H01L2224/02331 , H01L2224/0401 , H01L2224/04042 , H01L2224/05573 , H01L2224/05647 , H01L2224/08111 , H01L2224/13021 , H01L2224/1308 , H01L2224/131 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/16227 , H01L2224/2919 , H01L2224/32013 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/49113 , H01L2224/73204 , H01L2224/81005 , H01L2224/83005 , H01L2224/83102 , H01L2224/97 , H01L2225/0651 , H01L2225/0652 , H01L2225/06548 , H01L2225/06568 , H01L2225/06586 , H01L2225/1035 , H01L2225/1058 , H01L2924/18161 , H01L2924/00014 , H01L2924/014 , H01L2924/0665 , H01L2224/81 , H01L2224/83 , H01L23/31 , H01L23/5386
Abstract: 一种封装结构,包含一半导体元件、一第一介电层、一重分布线以及一导电凸块。第一介电层在半导体元件上,且第一介电层具有一第一开口与一第二开口在第一介电层的相对表面上,其中第一开口与第二开口沿着实质上相反的方向渐缩。重分布线部分地在第一介电层的第一开口中,且重分布线电性连接半导体元件。导电凸块部分嵌设在第二开口中,且导电凸块电性连接重分布线。
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公开(公告)号:CN105980087B
公开(公告)日:2018-05-25
申请号:CN201480074919.3
申请日:2014-02-04
Applicant: 千住金属工业株式会社
CPC classification number: B23K35/0244 , B22F1/0003 , B22F1/0048 , B22F1/025 , B22F9/08 , B22F9/082 , B22F9/14 , B22F2009/0848 , B22F2301/10 , B22F2301/15 , B22F2998/10 , B22F2999/00 , B23K1/0016 , B23K1/008 , B23K3/0623 , B23K35/302 , B23K35/3033 , B23K2101/42 , C22C9/00 , C22C19/03 , C22F1/08 , C22F1/10 , H01L23/49816 , H01L23/556 , H01L24/11 , H01L24/13 , H01L24/16 , H01L2224/111 , H01L2224/11334 , H01L2224/13014 , H01L2224/13016 , H01L2224/13105 , H01L2224/13109 , H01L2224/13117 , H01L2224/13118 , H01L2224/1312 , H01L2224/13123 , H01L2224/13124 , H01L2224/13138 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13149 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13163 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13172 , H01L2224/13173 , H01L2224/13176 , H01L2224/13178 , H01L2224/13179 , H01L2224/1318 , H01L2224/13181 , H01L2224/13183 , H01L2224/13184 , H01L2224/132 , H01L2224/13211 , H01L2224/13294 , H01L2224/133 , H01L2224/13305 , H01L2224/13309 , H01L2224/13317 , H01L2224/13318 , H01L2224/1332 , H01L2224/13323 , H01L2224/13324 , H01L2224/13338 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13349 , H01L2224/13355 , H01L2224/13357 , H01L2224/1336 , H01L2224/13363 , H01L2224/13364 , H01L2224/13366 , H01L2224/13369 , H01L2224/1337 , H01L2224/13371 , H01L2224/13372 , H01L2224/13373 , H01L2224/13376 , H01L2224/13378 , H01L2224/13379 , H01L2224/1338 , H01L2224/13381 , H01L2224/13383 , H01L2224/13384 , H01L2224/1339 , H01L2224/136 , H01L2224/13611 , H01L2224/13655 , H01L2224/13657 , H01L2224/1369 , H01L2224/16145 , H01L2224/16225 , H01L2224/81011 , H01L2924/381 , H01L2924/3841 , H05K3/3436 , H05K3/3463 , H05K2203/041 , B22F2202/13 , H01L2924/00012 , H01L2924/014 , H01L2924/01047 , H01L2924/01029 , H01L2924/01049 , H01L2924/01028 , H01L2924/01027 , H01L2924/01051 , H01L2924/01032 , H01L2924/01015 , H01L2924/01026 , H01L2924/01082 , H01L2924/01079 , H01L2924/01092 , H01L2924/0109 , H01L2924/01033 , H01L2924/00014 , H01L2924/01203 , H01L2924/01204 , H01L2924/0105 , H01L2924/01083 , H01L2924/0103 , H01L2924/01048 , H01L2924/01016 , H01L2924/01013 , H01L2924/01012 , H01L2924/01022 , H01L2924/01025 , H01L2924/0106 , H01L2924/01071 , H01L2924/01069 , H01L2924/01021 , H01L2924/01068 , H01L2924/01059 , H01L2924/01067 , H01L2924/01066 , H01L2924/01065 , H01L2924/01064 , H01L2924/01061 , H01L2924/01057 , H01L2924/0102 , H01L2924/01063 , H01L2924/0107 , H01L2924/01058 , H01L2924/01038 , H01L2924/01056 , H01L2924/01052 , H01L2924/01076 , H01L2924/01072 , H01L2924/01043 , H01L2924/01004
Abstract: 制造抑制了所释放的α射线量的金属球。包括如下工序:将纯金属在比作为去除对象的杂质的沸点高、比纯金属的熔点高、且比纯金属的沸点低的温度下进行加热而使纯金属熔融的工序;将熔融的纯金属造球成为球状的工序,其中,该纯金属与在纯金属所含的杂质中作为去除对象的杂质的对应于气压的沸点相比具有更高的沸点,U的含量为5ppb以下,Th的含量为5ppb以下,纯度为99.9%以上且99.995%以下,Pb或Bi中任一者的含量、或者Pb和Bi的总量为1ppm以上。
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公开(公告)号:CN105321891B
公开(公告)日:2018-05-25
申请号:CN201510274149.3
申请日:2015-05-26
Applicant: 台湾积体电路制造股份有限公司
CPC classification number: H01L23/3114 , H01L21/561 , H01L21/565 , H01L21/78 , H01L23/04 , H01L23/06 , H01L23/10 , H01L23/13 , H01L23/293 , H01L23/31 , H01L23/3142 , H01L23/562 , H01L23/585 , H01L24/03 , H01L24/11 , H01L24/94 , H01L2224/0231 , H01L2224/0239 , H01L2224/0401 , H01L2224/05024 , H01L2224/05124 , H01L2224/05139 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05171 , H01L2224/05172 , H01L2224/0518 , H01L2224/05181 , H01L2224/05184 , H01L2224/05572 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/05671 , H01L2224/05672 , H01L2224/0568 , H01L2224/05681 , H01L2224/05684 , H01L2224/1132 , H01L2224/11849 , H01L2224/13022 , H01L2224/13024 , H01L2224/131 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13139 , H01L2224/13147 , H01L2224/13155 , H01L2224/94 , H01L2224/97 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01028 , H01L2924/01029 , H01L2924/01074 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/0665 , H01L2924/181 , H01L2924/186 , H01L2924/3512 , H01L2224/11 , H01L2224/03
Abstract: 本发明提供了一种半导体器件和制造该半导体器件的方法。该半导体器件包括芯片衬底、模具和缓冲层。在芯片衬底上方设置模具。缓冲层从外部嵌入芯片衬底和模具之间。缓冲层具有的弹性模量或热膨胀系数小于模具的弹性模量或热膨胀系数。方法包括:设置至少覆盖衬底的划线的缓冲层;在衬底上方形成模具,并且模具覆盖缓冲层;以及沿着划线并穿过模具、缓冲层和衬底进行切割。
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公开(公告)号:CN104851842B
公开(公告)日:2018-04-10
申请号:CN201410165979.8
申请日:2014-04-23
Applicant: 台湾积体电路制造股份有限公司
CPC classification number: H01L25/0657 , H01L21/565 , H01L23/12 , H01L23/13 , H01L23/3107 , H01L23/3114 , H01L23/3128 , H01L23/49811 , H01L23/50 , H01L23/538 , H01L23/5384 , H01L23/5386 , H01L23/5389 , H01L23/562 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/19 , H01L24/27 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L24/97 , H01L25/105 , H01L25/50 , H01L2224/0401 , H01L2224/04105 , H01L2224/1132 , H01L2224/11334 , H01L2224/1145 , H01L2224/11462 , H01L2224/11849 , H01L2224/12105 , H01L2224/13082 , H01L2224/13109 , H01L2224/13111 , H01L2224/13116 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/16225 , H01L2224/1703 , H01L2224/17181 , H01L2224/2518 , H01L2224/27015 , H01L2224/32145 , H01L2224/32225 , H01L2224/32258 , H01L2224/32502 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73259 , H01L2224/73265 , H01L2224/81815 , H01L2224/92125 , H01L2224/97 , H01L2225/0651 , H01L2225/06513 , H01L2225/06568 , H01L2225/06572 , H01L2225/06586 , H01L2225/1035 , H01L2225/1058 , H01L2924/00014 , H01L2924/12042 , H01L2924/1205 , H01L2924/1206 , H01L2924/1207 , H01L2924/1431 , H01L2924/1432 , H01L2924/1434 , H01L2924/15153 , H01L2924/15311 , H01L2924/181 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/19104 , H01L2924/351 , H01L2924/00012 , H01L2224/82 , H01L2924/00 , H01L2224/45015 , H01L2924/207
Abstract: 本发明的实施例包括器件及其形成方法。一个实施例涉及一种器件,该器件包括:位于衬底的第一侧上方的阻焊涂层、通过第一连接件接合至衬底的第一侧的管芯的有源表面、以及通过第二组连接件安装至管芯的表面安装器件,表面安装器件位于管芯和衬底的第一侧之间,表面安装器件与阻焊涂层间隔开。本发明涉及包括嵌入式表面安装器件的半导体器件及其形成方法。
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公开(公告)号:CN104952746B
公开(公告)日:2018-03-30
申请号:CN201510233832.2
申请日:2015-02-27
Applicant: 英飞凌科技股份有限公司
Inventor: C·马尔贝拉
IPC: H01L21/58 , H01L23/488 , H01L21/60
CPC classification number: H01L24/17 , H01L23/49816 , H01L24/11 , H01L24/81 , H01L2224/10126 , H01L2224/13014 , H01L2224/13016 , H01L2224/13105 , H01L2224/13109 , H01L2224/13111 , H01L2224/13116 , H01L2224/13118 , H01L2224/1312 , H01L2224/13139 , H01L2224/13147 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13171 , H01L2224/14131 , H01L2224/14135 , H01L2224/14136 , H01L2224/14179 , H01L2224/14517 , H01L2224/16106 , H01L2224/1705 , H01L2224/17051 , H01L2224/17106 , H01L2224/81815 , H01L2924/01008 , H01L2924/01032 , H01L2924/014 , H01L2924/20107 , H01L2924/20108 , H05K1/111 , H05K3/3436 , H05K2201/10734 , Y02P70/611 , Y02P70/613
Abstract: 本发明涉及将半导体封装连接到板的方法。将半导体封装连接到板的方法包括:提供具有多个接触区域的板,提供具有多个接触区域的半导体封装,从多个接触区域中选择特定接触区域,施加焊料球到该接触区域并且其中施加两个或更多个特定焊料球到该特定接触区域,并且以这样的方式将该半导体封装连接到板,使得两个或更多个特定焊料球彼此连接或与板的多个接触区域中的接触区域连接。
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公开(公告)号:CN104347601B
公开(公告)日:2018-03-20
申请号:CN201410349913.4
申请日:2014-07-22
Applicant: 三星电子株式会社
IPC: H01L25/065 , H01L23/31 , H01L23/48 , H01L21/98
CPC classification number: H01L25/0657 , H01L21/4853 , H01L21/486 , H01L21/568 , H01L23/3128 , H01L23/481 , H01L23/49816 , H01L23/49827 , H01L23/5389 , H01L24/13 , H01L24/16 , H01L24/19 , H01L24/27 , H01L24/32 , H01L24/73 , H01L24/82 , H01L24/96 , H01L25/50 , H01L2224/11849 , H01L2224/12105 , H01L2224/13023 , H01L2224/13082 , H01L2224/13111 , H01L2224/13116 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/14155 , H01L2224/16058 , H01L2224/16235 , H01L2224/16237 , H01L2224/2746 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/33181 , H01L2224/48228 , H01L2224/73265 , H01L2224/73267 , H01L2224/81191 , H01L2224/81193 , H01L2224/81203 , H01L2224/81447 , H01L2224/81815 , H01L2224/8203 , H01L2224/92244 , H01L2224/96 , H01L2224/97 , H01L2225/0651 , H01L2225/06513 , H01L2225/06517 , H01L2225/06562 , H01L2225/06586 , H01L2924/12042 , H01L2924/15311 , H01L2924/181 , H01L2924/18161 , H01L2924/18162 , H01L2924/00014 , H01L2924/014 , H01L2224/83 , H01L2224/11 , H01L2924/00 , H01L2924/00012
Abstract: 本发明构思的实施例包括一种具有多个层叠的半导体芯片的半导体封装件。多层衬底包括中心绝缘层、设置在中心绝缘层的上表面上的上布线层和设置在中心绝缘层的下表面上的第一下布线层。利用各种方式将层叠的半导体芯片连接至多层衬底和/或彼此连接。半导体封装件能够像基于倒装芯片接合的半导体封装件那样进行高性能操作,并且还通过克服由于单个半导体芯片导致的限制符合大容量的需要。本发明构思的实施例还包括用于制造该半导体封装件的方法。
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公开(公告)号:CN107768337A
公开(公告)日:2018-03-06
申请号:CN201710560292.8
申请日:2017-07-11
Applicant: 联发科技股份有限公司
IPC: H01L23/488
CPC classification number: H01L21/4853 , H01L21/561 , H01L21/6836 , H01L23/3128 , H01L23/49811 , H01L23/49816 , H01L23/50 , H01L24/05 , H01L24/13 , H01L24/16 , H01L24/81 , H01L24/97 , H01L25/0657 , H01L25/50 , H01L2224/04026 , H01L2224/05022 , H01L2224/05124 , H01L2224/05147 , H01L2224/05567 , H01L2224/05572 , H01L2224/05624 , H01L2224/05647 , H01L2224/1146 , H01L2224/1147 , H01L2224/1308 , H01L2224/13083 , H01L2224/13111 , H01L2224/13147 , H01L2224/13155 , H01L2224/73204 , H01L2224/81005 , H01L2224/81024 , H01L2224/81192 , H01L2224/81193 , H01L2224/95001 , H01L2224/97 , H01L2224/81 , H01L2924/00014 , H01L2924/01047 , H01L2924/014 , H01L24/02 , H01L24/14 , H01L24/17 , H01L2224/023 , H01L2224/0233
Abstract: 本发明实施例公开了一种预先凸起的重分布层结构及半导体封装。其中,该预先凸起的RDL(重分布层)结构包括:至少一介电层,具有相对的第一和第二表面;在该第一表面上的第一金属层;在该第二表面上的第二金属层;以及通孔层,电性连接该第一金属层和该第二金属层。其中,至少一凸块垫形成于该第一金属层内。其中,至少一凸块分别设置在该至少一凸块垫上。本发明实施例,在重分布层结构上预先设置凸块,从而可以降低生产成本和节约半导体封装的制造时间。
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公开(公告)号:CN107546138A
公开(公告)日:2018-01-05
申请号:CN201710494979.6
申请日:2017-06-26
Applicant: 台湾积体电路制造股份有限公司
IPC: H01L21/60
CPC classification number: H01L25/50 , H01L21/565 , H01L21/78 , H01L23/49816 , H01L23/49827 , H01L23/49838 , H01L24/09 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/19 , H01L24/20 , H01L24/73 , H01L24/75 , H01L24/81 , H01L24/92 , H01L24/94 , H01L24/97 , H01L25/03 , H01L25/0655 , H01L25/0657 , H01L2224/11464 , H01L2224/12105 , H01L2224/131 , H01L2224/13111 , H01L2224/13116 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13164 , H01L2224/13173 , H01L2224/16145 , H01L2224/1703 , H01L2224/17505 , H01L2224/211 , H01L2224/214 , H01L2224/2919 , H01L2224/73204 , H01L2224/73209 , H01L2224/73217 , H01L2224/756 , H01L2224/7598 , H01L2224/81001 , H01L2224/81007 , H01L2224/811 , H01L2224/8113 , H01L2224/81132 , H01L2224/81139 , H01L2224/81191 , H01L2224/81193 , H01L2224/83104 , H01L2224/92124 , H01L2224/92125 , H01L2224/92144 , H01L2224/94 , H01L2224/97 , H01L2225/06513 , H01L2225/06548 , H01L2225/06568 , H01L2225/06593 , H01L2924/00015 , H01L2924/15311 , H01L2924/00012 , H01L2924/00014 , H01L2224/81 , H01L2924/013 , H01L2924/014 , H01L2924/0665 , H01L2924/07025 , H01L2224/19 , H01L2224/11
Abstract: 公开了半导体器件及其制造方法。在一些实施例中,一种制造器件的方法包括通过间隔件将第一半导体器件连接至第二半导体器件。第一半导体器件具有在第一半导体器件上设置的第一接触焊盘并且第二半导体器件具有在第二半导体器件上设置的第二接触焊盘。该方法包括在第一半导体器件的第一接触焊盘和第二半导体器件的第二接触焊盘之间形成浸没互连件。本发明实施例涉及半导体器件及其制造方法。
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