公开(公告)号：US20160245732A1

公开(公告)日：2016-08-25

申请号：US15052313

申请日：2016-02-24

申请人： FEI Company

发明人： Hervé-William Rémigy

IPC分类号： G01N1/28 ,  H01J37/20 ,  G01N1/42 ,  H01J37/26

CPC分类号： G01N1/2813 ,  G01N1/42 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/002 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/201 ,  H01J2237/208

摘要： A system for preparing a sample for study in a charged-particle microscope by: Providing a substantially planar sample holder having opposed faces substantially parallel to one another, comprising at least one aperture that connects said faces and across which a membrane has been mounted, which membrane comprises at least one perforation; Spanning a film of aqueous liquid across said perforation, which liquid comprises at least one study specimen suspended therein; Prior to said spanning step, placing a blotting sheet of blotting material in intimate contact with a first surface of said membrane, at a side distal from said sample holder; Depositing said aqueous liquid through said aperture and onto a second surface of said membrane, opposite said first surface; and Subsequently removing said blotting sheet from said membrane.

摘要翻译： 一种用于制备用于在带电粒子显微镜中研究的样品的系统，其通过以下方式来制备：提供具有基本上彼此平行的相对面的基本平坦的样品保持器，所述样品保持器包括连接所述面并且已经安装有膜的至少一个孔， 膜包括至少一个穿孔; 跨过所述穿孔跨越水性液体膜，该液体包括悬浮在其中的至少一个研究样本; 在所述跨越步骤之前，在远离所述样品保持器的一侧放置吸印材料的印迹片与所述膜的第一表面紧密接触; 将所述水性液体通过所述孔沉积到与所述第一表面相对的所述膜的第二表面上; 然后从所述膜中除去所述印迹片。

公开(公告)号：US09406482B2

公开(公告)日：2016-08-02

申请号：US14326341

申请日：2014-07-08

申请人： FEI Company

发明人： Johannes Jacobus Lambertus Mulders ,  Laurens Kuipers

IPC分类号： G01N21/00 ,  H01J37/26 ,  G01N21/65 ,  H01J37/22 ,  H01J37/28

CPC分类号： H01J37/261 ,  G01N21/65 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/31745

摘要： A charged-particle microscope with Raman spectroscopy capability and a method for examining a sample using a combined charged-particle microscope and Raman spectroscope. The method includes imaging a region of a sample by irradiating the sample with a beam of charged particles from the microscope; identifying a feature of interest in the region using the microscope; radiatively stimulating and spectroscopically analyzing a portion of the region comprising the feature of interest using a light spot of a width D from the spectroscope, wherein the feature of interest has at least one lateral dimension smaller than width D and, prior to using the light spot of the width D from the spectroscope, an in situ surface modification technique is used to cause positive discrimination of an expected Raman signal from the feature of interest relative to an expected Raman signal from the part of the portion other than the feature of interest.

摘要翻译： 具有拉曼光谱能力的带电粒子显微镜和使用组合带电粒子显微镜和拉曼光谱仪检查样品的方法。 该方法包括用来自显微镜的带电粒子束照射样品来对样品的区域进行成像; 使用显微镜识别该地区感兴趣的特征; 使用来自分光器的宽度为D的光点对包含感兴趣特征的区域的一部分进行辐射刺激和光谱分析，其中感兴趣的特征具有至少一个小于宽度D的横向尺寸，并且在使用光斑之前 的来自分光器的宽度D，使用原位表面修饰技术来引起来自感兴趣特征的预期拉曼信号相对于除感兴趣特征部分以外的部分的预期拉曼信号的正面鉴别。

公开(公告)号：US20160199878A1

公开(公告)日：2016-07-14

申请号：US14992743

申请日：2016-01-11

申请人： FEI Company

发明人： Tomas Vystavel ,  Aurelien Philippe Jean Maclou Botman

IPC分类号： B05D5/02 ,  B05C3/10 ,  B05D3/04 ,  C23C18/16 ,  H01L21/02 ,  C25D5/16 ,  C25D21/04 ,  H01L21/306 ,  H01L21/3205 ,  B05D5/00 ,  C25D7/12

CPC分类号： B05D5/02 ,  B05C3/10 ,  B05D3/0493 ,  B05D5/00 ,  C23C18/1633 ,  C25D5/16 ,  C25D7/12 ,  C25D21/04 ,  G01N1/32 ,  G01N1/44 ,  H01J37/20 ,  H01J37/317 ,  H01J2237/20 ,  H01J2237/2067 ,  H01J2237/31745 ,  H01L21/02041 ,  H01L21/30604 ,  H01L21/32051

摘要： A method of modifying a sample surface layer in the vacuum chamber of a particle-optical apparatus, the method performed in vacuum, the method comprising: Providing the microscopic sample attached to a manipulator, Providing a first liquid at a first (controlled) temperature, Dipping the sample in the first liquid, thereby causing a sample surface modification, Removing the sample from the first liquid, Providing a second liquid at a second (controlled) temperature, Dipping the sample in the second liquid, and Removing the sample from the second liquid. This enables the wet processing of a sample in-situ, thereby enhancing speed and/or avoiding subsequent alteration/contamination of the sample, such as oxidation, etc. The method is particularly useful for etching a lamella after machining the lamella with a (gallium) FIB to remove the surface layer where gallium implantation occurred, or where the crystal lattice is disturbed.

摘要翻译： 一种修改粒子光学装置的真空室中的样品表面层的方法，该方法是在真空中进行的，该方法包括：提供附着于机械手的微观样品，在第一（受控）温度下提供第一液体， 将样品浸入第一液体中，从而引起样品表面改性，从第一液体中取出样品，在第二（受控）温度下提供第二液体，将样品浸入第二液体，并从第二液体中取出样品 液体。 这使得能够原地对样品进行湿法处理，从而提高速度和/或避免样品随后的变化/污染，例如氧化等。该方法特别可用于在用（镓 ）FIB以去除发生镓注入的表面层，或者晶格被扰乱的表面层。

公开(公告)号：US09384982B2

公开(公告)日：2016-07-05

申请号：US14758043

申请日：2013-12-30

申请人： FEI Company

发明人： Sang Hoon Lee ,  Jeffrey Blackwood ,  Stacey Stone

IPC分类号： H01L21/76 ,  H01L21/31 ,  H01L21/469 ,  H01L21/26 ,  H01L21/02 ,  H01L21/285 ,  C23C16/04 ,  H01L21/768

CPC分类号： H01L21/2605 ,  C23C16/045 ,  C23C16/047 ,  H01L21/02115 ,  H01L21/02277 ,  H01L21/0243 ,  H01L21/0262 ,  H01L21/02636 ,  H01L21/28556 ,  H01L21/76879 ,  H01L21/76898

摘要： A method is provided, along with a corresponding apparatus, for filling a high aspect ratio hole without voids or for producing high aspect ratio structures without voids. A beam having a diameter smaller than the diameter of the hole is directed into the hole to induced deposition beginning in the center region of the hole bottom. After an elongated structure is formed in the hole by the beam-induced deposition, a beam can then be scanned in a pattern at least as large as the hole diameter to fill the remainder of the hole. The high aspect ratio hole can then be cross-sectioned using an ion beam for observation without creating artefacts. When electron-beam-induced deposition is used, the electrons preferably have a high energy to reach the bottom of the hole, and the beam has a low current, to reduce spurious deposition by beam tails.

摘要翻译： 提供了一种方法，连同相应的装置，用于填充没有空隙的高纵横比孔或用于产生没有空隙的高纵横比结构。 直径小于孔直径的梁被引导到孔中以在孔底的中心区域开始诱导沉积。 在通过光束沉积在孔中形成细长结构之后，可以以至少与孔直径一样大的图案扫描光束，以填充孔的其余部分。 然后可以使用离子束对高纵横比孔进行横截面观察而不产生伪影。 当使用电子束感应沉积时，电子优选具有高能量以到达孔的底部，并且光束具有低电流，以减少光束尾部的杂散沉积。

公开(公告)号：US09378925B2

公开(公告)日：2016-06-28

申请号：US14869553

申请日：2015-09-29

申请人： FEI Company

发明人： Jeffrey Blackwood ,  Matthew Bray ,  Corey Senowitz ,  Cliff Bugge

IPC分类号： H01J37/00 ,  H01J37/305 ,  G01N1/28 ,  H01J37/26

CPC分类号： H01J37/3056 ,  G01N1/286 ,  G01N2001/2886 ,  H01J37/261 ,  H01J2237/31745

摘要： An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform “hardmask” that controls the ultimate results of the sample thinning, and allows for reliable and robust preparation of samples having thicknesses down to the 10 nm range.

公开(公告)号：US09349570B2

公开(公告)日：2016-05-24

申请号：US14674840

申请日：2015-03-31

申请人： FEI Company

发明人： Enrique Agorio ,  James Edgar Hudson ,  Gerhard Daniel ,  Michael Tanguay ,  Jason Arjavac

IPC分类号： H01J37/20 ,  G01N1/28 ,  G01N1/32 ,  H01J37/26 ,  H01J37/28 ,  H01J37/31 ,  H01J37/285 ,  G01R31/28

CPC分类号： H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

摘要： An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

公开(公告)号：US09336985B2

公开(公告)日：2016-05-10

申请号：US14684825

申请日：2015-04-13

申请人： FEI Company

发明人： Jeffrey Blackwood ,  Stacey Stone

IPC分类号： H01J37/28 ,  H01J37/18 ,  H01J37/20 ,  H01J37/06 ,  G01N23/04 ,  G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  H01J37/305 ,  H01J37/26

CPC分类号： G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

摘要： An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

公开(公告)号：US20160093470A1

公开(公告)日：2016-03-31

申请号：US14502099

申请日：2014-09-30

申请人： FEI Company

发明人： Kevin Kagarice ,  Charles Otis ,  N. William Parker

IPC分类号： H01J37/32

CPC分类号： H01J37/045 ,  H01J37/05 ,  H01J2237/004 ,  H01J2237/028 ,  H01J2237/057 ,  H01J2237/15 ,  H01J2237/28 ,  H01J2237/31745 ,  H01J2237/31749 ,  H01J2237/32

摘要： A chicane blanker assembly for a charged particle beam system includes an entrance and an exit, at least one neutrals blocking structure, a plurality of chicane deflectors, a beam blanking deflector, and a beam blocking structure. The entrance is configured to accept a beam of charged particles propagating along an axis. The at least one neutrals blocking structure intersects the axis. The plurality of chicane deflectors includes a first chicane deflector, a second chicane deflector, a third chicane deflector, and a fourth chicane deflector sequentially arranged in series between the entrance and the exit and configured to deflect the beam along a path that bypasses the neutrals blocking structure and exits the chicane blanker assembly through the exit. In embodiments, the chicane blanker assembly includes a two neutrals blocking structures. In embodiments, the beam blocking structure is arranged between the third chicane deflector and the fourth chicane deflector.

摘要翻译： 一种用于带电粒子束系统的通道消除器组件包括入口和出口，至少一个中性阻挡结构，多个拐角偏转器，光束消隐偏转器和光束阻挡结构。 入口构造成接受沿着轴传播的带电粒子束。 至少一个中性阻挡结构与轴相交。 多个拐角偏转器包括顺序地布置在入口和出口之间并被配置为沿着旁路中性阻塞的路径偏转光束的第一拐角拐弯器，第二拐角偏转器，第三拐角偏转器和第四通道偏转器 结构，并通过出口离开通道阻塞组件。 在实施例中，拐弯夹板组件包括两个中性阻挡结构。 在实施例中，梁阻挡结构布置在第三拐角偏转器和第四通道偏转器之间。

公开(公告)号：US20160086762A1

公开(公告)日：2016-03-24

申请号：US14860586

申请日：2015-09-21

申请人： FEI Company

发明人： Erwin Fernand de Jong ,  Sorin Lazar ,  Peter Christiaan Tiemeijer ,  Rudolf Geurink

IPC分类号： H01J37/05 ,  H01J37/21 ,  H01J37/285 ,  H01J37/20

CPC分类号： H01J37/05 ,  H01J37/20 ,  H01J37/21 ,  H01J37/244 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/24485 ,  H01J2237/2802

摘要： A Transmission Charged-Particle Microscope includes an imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus including: a dispersing device, for dispersing said flux into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis; a detector; an adjustable aperture device for defining an aperture in a path of said array, so as to select a subset of said array to be admitted to the detector, which aperture is delimited in a dispersion direction perpendicular to said propagation axis by first and second opposed edges, each of which edges is independently positionable relative to said propagation axis, thereby allowing independent adjustment of both of: a width of said aperture parallel to said dispersion direction; and a position of a center of said aperture relative to said propagation axis.

摘要翻译： 透射带电粒子显微镜包括成像系统，用于将透射通过样本的带电粒子的通量引导到分光装置，所述分光装置包括：分散装置，用于将所述通量分散到基本上平行传播的光谱子束的能量分辨阵列 到传播轴; 检测器 用于限定所述阵列的路径中的孔径的可调节孔径装置，以便选择要进入检测器的所述阵列的子集，所述孔径在垂直于所述传播轴线的分散方向上由第一和第二相对边缘限定 每个边缘相对于所述传播轴线独立地定位，从而允许独立调整以下两者：平行于所述分散方向的所述孔的宽度; 以及所述孔的中心相对于所述传播轴的位置。

公开(公告)号：US20160063749A1

公开(公告)日：2016-03-03

申请号：US14935840

申请日：2015-11-09

申请人： FEI Company

发明人： Garth Howell ,  Michael James Owen ,  Leonardo Salazar ,  David Haberlah ,  Eric Goergen

IPC分类号： G06T11/60 ,  G06T7/40 ,  G01N23/203 ,  G06T11/00

CPC分类号： G06T11/60 ,  G01N23/203 ,  G01N23/2206 ,  G01N23/2252 ,  G06T5/50 ,  G06T11/001 ,  G06T2207/20216 ,  G06T2207/20221 ,  G06T2207/30181

摘要： Optimized blending mode for mineralogy images. A luminosity value is determined for a pixel in a base layer or top layer mineralogy image. An image weighting value is determined from the luminosity value and an optional mixing parameter. A multiply value is determined by multiplying the base and top layer pixel values. An overlay value is determined from twice the multiply value if the value of one of the base layer or top layer pixel values is over a threshold, otherwise it is determined by inverting twice the product of the inverted top layer pixel value with the inverted base layer pixel value. A blended image pixel value is determined by adding the multiply value weighted with the image weighting value and the overlay value weighted with the inverted image weighting value.

摘要翻译： 矿物图像优化混合模式。 确定基层或顶层矿物学图像中的像素的亮度值。 根据亮度值和可选的混合参数确定图像加权值。 通过乘以基层和顶层像素值来确定乘法值。 如果基层或顶层像素值之一的值超过阈值，则由乘法值的两倍确定覆盖值，否则通过将反向顶层像素值与反向基底层的乘积反相两倍来确定 像素值。 通过将用图像加权值加权的乘积值和用反转图像加权值加权的覆盖值相加来确定混合图像像素值。