Method for fabricating molded microstructures on substrates
    51.
    发明授权
    Method for fabricating molded microstructures on substrates 有权
    在基板上制造模塑微结构的方法

    公开(公告)号:US06322736B1

    公开(公告)日:2001-11-27

    申请号:US09393032

    申请日:1999-09-09

    IPC分类号: B29C3338

    摘要: An improved elastomeric mold for use in fabricating microstructures, the mold having first and second surfaces, the first surface including at least one recessed microchannel and the second surface including an access opening or filling member that extends through the mold to the first surface and communicates with the recessed microchannel. The mold is used by placing it onto a substrate with the recessed microchannel facing the substrate. The access opening of the mold is filled with a liquid material which is capable of solidifying. The access opening continuously introduces the liquid material into the space defined between the microchannel and the substrate. After the liquid material solidifies, the mold is removed from the substrate thereby leaving a microstructure formed from the solidified liquid material on the substrate.

    摘要翻译: 一种用于制造微结构的改进的弹性体模具,所述模具具有第一和第二表面,所述第一表面包括至少一个凹入的微通道,所述第二表面包括通过所述模具延伸到所述第一表面并与 嵌入式微通道。 通过将模具放置在具有凹陷的微通道面向衬底的衬底上而被使用。 模具的进入口填充有能够固化的液体材料。 进入开口将液体材料连续地引入到限定在微通道和基底之间的空间中。 在液体材料固化之后,将模具从基材上除去,从而在基板上留下由固化的液体材料形成的微结构。

    Determining the presence of defects in thin film structures
    53.
    发明授权
    Determining the presence of defects in thin film structures 失效
    确定薄膜结构中缺陷的存在

    公开(公告)号:US5982482A

    公开(公告)日:1999-11-09

    申请号:US903901

    申请日:1997-07-31

    IPC分类号: G01N29/24 G01N29/44 G01N29/04

    摘要: The invention features a method for detecting a subsurface defect in a thin film structure. The method includes: optically generating an acoustic wave in a first spatial region of the film; optically measuring a time-dependent reflection of the acoustic wave from subsurface features in the film to produce a time-dependent signal; and analyzing the signal to detect an existence of the defect. The optically measuring step can include measuring the diffraction of a probe beam from the reflected acoustic wave. The analyzing step can include comparing the measured signal to a reference signal for defect-free structure.

    摘要翻译: 本发明的特征在于一种用于检测薄膜结构中的地下缺陷的方法。 该方法包括:在胶片的第一空间区域中光学地产生声波; 光学地测量来自薄膜中的地下特征的声波的时间依赖性反射以产生时间相关信号; 并分析信号以检测缺陷的存在。 光学测量步骤可以包括测量来自反射声波的探测光束的衍射。 分析步骤可以包括将测量的信号与用于无缺陷结构的参考信号进行比较。

    Fabrication of small-scale cylindrical articles
    54.
    发明授权
    Fabrication of small-scale cylindrical articles 失效
    小型圆柱形制品的制造

    公开(公告)号:US5951881A

    公开(公告)日:1999-09-14

    申请号:US681235

    申请日:1996-07-22

    摘要: Techniques for fabrication of small-scale metallic structures such as microinductors, microtransformers and stents are described. A chemically active agent such as a catalyst is applied from an applicator in a pattern to an exterior surface of an article, metal is deposited according to the pattern and optionally, removed from the substrate. Where the substrate is cylindrical, the pattern can serve as a stent. Alternatively, a pattern of a self-assembled monolayer can be printed on a surface, which pattern can dictate metal plating or etching resulting in a patterned metal structure that can be cylindrical. In another embodiment, a structure is patterned on a surface that serves as a phase-modulating pattern or amplitude-modulating pattern. The article subsequently is exposed to radiation that can induce a change in refractive index within the article, and the phase-modulating or amplitude-modulating pattern results in different indices of refraction being created in different portions of the article. By this technique, a grating can be written into a core of an optical fiber.

    摘要翻译: 描述了微型电感器,微型变压器和支架等小型金属结构的制造技术。 将化学活性剂如催化剂从涂布器以图案施加到制品的外表面,根据图案沉积金属,并任选地从基材上除去金属。 在基底为圆柱形的情况下,图案可用作支架。 或者,自组装单层的图案可以印刷在表面上,该图案可以规定金属电镀或蚀刻,导致可以是圆柱形的图案化金属结构。 在另一个实施例中,在用作相位调制图案或幅度调制图案的表面上图案化结构。 该物品随后暴露于可引起制品内的折射率变化的辐射,并且相位调制或幅度调制图案导致在制品的不同部分产生不同的折射率。 通过这种技术,可以将光栅写入光纤的核心。

    Nanostructure templating using low temperature atomic layer deposition
    59.
    发明授权
    Nanostructure templating using low temperature atomic layer deposition 有权
    使用低温原子层沉积的纳米结构模板

    公开(公告)号:US08080280B1

    公开(公告)日:2011-12-20

    申请号:US11872749

    申请日:2007-10-16

    IPC分类号: C23C16/00

    CPC分类号: C23C16/46 C23C16/45525

    摘要: Methods are described for making nanostructures that are mechanically, chemically and thermally stable at desired elevated temperatures, from nanostructure templates having a stability temperature that is less than the desired elevated temperature. The methods comprise depositing by atomic layer deposition (ALD) structural layers that are stable at the desired elevated temperatures, onto a template employing a graded temperature deposition scheme. At least one structural layer is deposited at an initial temperature that is less than or equal to the stability temperature of the template, and subsequent depositions made at incrementally increased deposition temperatures until the desired elevated temperature stability is achieved. Nanostructure templates include three dimensional (3D) polymeric templates having features on the order of 100 nm fabricated by proximity field nanopatterning (PnP) methods.

    摘要翻译: 描述了用于制备在所需高温下机械,化学和热稳定的纳米结构的方法,所述纳米结构具有的稳定性温度低于所需升高的温度。 所述方法包括通过使用渐变温度沉积方案的模板将在期望的高温下稳定的原子层沉积(ALD)结构层沉积到模板上。 至少一个结构层在小于或等于模板的稳定温度的初始温度下沉积,随后在逐渐增加的沉积温度下进行沉积,直至实现所需的高温稳定性。 纳米结构模板包括通过接近场纳米图案(PnP)方法制造的具有大约100nm的特征的三维(3D)聚合物模板。