Polishing Slurry for Cmp
    81.
    发明申请
    Polishing Slurry for Cmp 审中-公开
    抛光浆料为Cmp

    公开(公告)号:US20080105651A1

    公开(公告)日:2008-05-08

    申请号:US11572321

    申请日:2005-08-09

    IPC分类号: C09K13/00 C03C15/00

    CPC分类号: H01L21/3212 C09G1/02

    摘要: A polishing liquid for CMP has a composition loaded with, for example, an inorganic salt, a protective film forming agent and a surfactant capable of imparting a dissolution accelerating activity to enlarge a difference between polishing speed under non-load and polishing speed under load. By virtue of this polishing liquid for CMP, there can be simultaneously accomplished a speed increase for increasing CMP productivity, and wiring planarization for miniaturization and multilayer formation of wiring.

    摘要翻译: 用于CMP的抛光液具有负载有例如无机盐,保护膜形成剂和能够赋予溶解促进活性的表面活性剂的组合物,以增加负载下的抛光速度和负载下的抛光速度之间的差异。 由于该CMP用抛光液,可以同时实现提高CMP生产率的速度增加,以及用于小型化和布线的多层形成的布线平面化。

    Phase-Separation-Controlled Polybutadiene Resin Composition and Printed Wiring Board Using the Resin Composition
    82.
    发明申请
    Phase-Separation-Controlled Polybutadiene Resin Composition and Printed Wiring Board Using the Resin Composition 有权
    相分离控制的聚丁二烯树脂组合物和使用该树脂组合物的印刷线路板

    公开(公告)号:US20080090478A1

    公开(公告)日:2008-04-17

    申请号:US11867091

    申请日:2007-10-04

    摘要: It is an objective of this invention to obtain: a composition superior in processability, dielectric properties, heat resistance, and adhesiveness by controlling phase separation of a 1,2-polybutadiene resin composition without deterioration of dielectric properties exhibited in high-frequency regions; and a multilayer printed wiring board using the same. This invention relates to a polybutadiene resin composition, comprising: a crosslinking component (A) comprising repeating units represented by the following formula (1) and having a number average molecular weight of 1000 to 20000; a radical polymerization initiator (B), the one-minute half-life temperature of which is 80° C. to 140° C.; and a radical polymerization initiator (C), the one-minute half-life temperature of which is 170° C. to 230° C.; wherein 3 to 10 parts by weight of the component (B) and 5 to 15 parts by weight of the component (C) are contained relative to 100 parts by weight of the component (A). The invention also relates to a prepreg, a laminate, and a printed wiring board, which are produced using the same.

    摘要翻译: 本发明的目的是获得:通过控制1,2-聚丁二烯树脂组合物的相分离而不会在高频区域表现出的介电性能降低,从而加工性,介电特性,耐热性和粘合性优异; 和使用其的多层印刷线路板。 本发明涉及一种聚丁二烯树脂组合物,其包含:交联组分(A),其包含由下式(1)表示的数均分子量为1000至20000的重复单元; 自由基聚合引发剂(B),其一分钟半衰期温度为80℃至140℃; 和自由基聚合引发剂(C),其一分钟的半衰期温度为170℃至230℃; 相对于100重量份的成分(A),含有3〜10重量份的成分(B)和5〜15重量份的成分(C)。 本发明还涉及使用其制造的预浸料坯,层压板和印刷线路板。

    Abrasive-free polishing slurry and CMP process
    84.
    发明申请
    Abrasive-free polishing slurry and CMP process 审中-公开
    无磨料抛光浆和CMP工艺

    公开(公告)号:US20070147551A1

    公开(公告)日:2007-06-28

    申请号:US11643691

    申请日:2006-12-22

    IPC分类号: H03D1/00

    CPC分类号: C09G1/04

    摘要: A CMP slurry is mixed with an oxidant in polishing and contains a copper rust inhibitor, a water-soluble polymer, a pH controller capable of forming a complex with copper, and water, and is substantially free from abrasive. The CMP slurry effectively reduces dishing in chemical polishing of copper and forms reliable wiring. Preferably, the contents of the rust inhibitor, the water-soluble polymer, and the oxidant are 0.1 to 5 wt %, 0.05 to 5 wt %, and 0.01 to 5M relative to 1 liter of the CMP slurry, respectively, and the amount of the pH controller is a necessary amount for adjusting pH of the CMP slurry to 1.5 to 2.5.

    摘要翻译: 将CMP浆料与抛光中的氧化剂混合,并含有铜锈病抑制剂,水溶性聚合物,能够与铜形成络合物的pH控制剂和水,并且基本上不含研磨剂。 CMP浆料有效减少了铜化学抛光中的凹陷,形成了可靠的布线。 防锈剂,水溶性聚合物和氧化剂的含量优选分别相对于1升CMP浆料为0.1〜5重量%,0.05〜5重量%,0.01〜5微米, pH控制器是将CMP浆料的pH调节至1.5至2.5的必需量。

    Electroless copper plating machine thereof, and multi-layer printed wiring board
    87.
    发明申请
    Electroless copper plating machine thereof, and multi-layer printed wiring board 审中-公开
    无电镀铜机,多层印刷线路板

    公开(公告)号:US20050252684A1

    公开(公告)日:2005-11-17

    申请号:US11113011

    申请日:2005-04-25

    摘要: A method is provided for removing plating blocking ions, such as anions, in pairs with copper ions and oxidant ions of a copper ion reducing agent from an electroless copper plating solution and keeping a constant salt concentration in the electroless copper plating solution during plating. The electroless copper plating method uses a plating solution containing copper sulfate as copper ion sources, and a copper ion complexing agent as copper ion sources, glyoxylic acid as a copper ion reducing agent, and a pH conditioner. The method is characterized by precipitating and removing sulfuric and oxalic ions in said electroless copper plating solution and keeping an optimum concentration of at least one of sulfuric and oxalic ions in said electroless copper plating solution during plating.

    摘要翻译: 提供了一种从电化学镀铜溶液中去除铜离子还原剂的铜离子和氧化剂离子的电镀阻挡离子(例如阴离子)的方法,并且在镀覆期间在化学镀铜溶液中保持恒定的盐浓度。 无电镀铜方法使用含有硫酸铜作为铜离子源的镀液,铜离子源铜离子络合剂,作为铜离子还原剂的乙醛酸和pH调节剂。 该方法的特征在于在所述化学镀铜溶液中析出和除去硫酸和草酸离子,并且在镀覆期间保持所述无电镀铜溶液中的硫酸和草酸离子中的至少一种的最佳浓度。