Dual wafer spin coating
    68.
    发明授权
    Dual wafer spin coating 有权
    双晶圆片旋涂

    公开(公告)号:US08512491B2

    公开(公告)日:2013-08-20

    申请号:US12974611

    申请日:2010-12-21

    IPC分类号: B32B41/00

    CPC分类号: H01L22/12 H01L21/67092

    摘要: A method of bonding a first substrate and a second substrate includes the steps of rotating first substrate with an adhesive mass thereon, and second substrate contacting the mass and overlying the first substrate, controlling a vertical height of a heated control platen spaced apart from and not contacting the second substrate so as to control a temperature of the adhesive mass, so as to at least one of bond the first and second substrates in alignment with one another, or achieve a sufficiently planar adhesive interface between the first and second substrates.

    摘要翻译: 接合第一基板和第二基板的方法包括以下步骤:使第一基板与其上的粘合剂质量物质旋转,第二基板接触物料并覆盖第一基板,控制加热的控制台板的垂直高度, 使所述第二基板接触以控制所述粘合剂物料的温度,以便使所述第一和第二基板彼此对准的至少一个接合,或在所述第一和第二基板之间实现足够平坦的粘合界面。

    Stacked microelectronic assemblies having vias extending through bond pads
    70.
    发明授权
    Stacked microelectronic assemblies having vias extending through bond pads 有权
    堆叠的微电子组件具有延伸穿过接合焊盘的通孔

    公开(公告)号:US08466542B2

    公开(公告)日:2013-06-18

    申请号:US12723039

    申请日:2010-03-12

    IPC分类号: H01L23/48 H01L23/02 H01L29/40

    摘要: A stacked microelectronic assembly is provided which includes first and second stacked microelectronic elements. Each of the first and second microelectronic elements can include a conductive layer extending along a face of such microelectronic element. At least one of the first and second microelectronic elements can include a recess extending from the rear surface towards the front surface, and a conductive via extending from the recess through the bond pad and electrically connected to the bond pad, with a conductive layer connected to the via and extending along a rear face of the microelectronic element towards an edge of the microelectronic element. A plurality of leads can extend from the conductive layers of the first and second microelectronic elements and a plurality of terminals of the assembly can be electrically connected with the leads.

    摘要翻译: 提供堆叠的微电子组件,其包括第一和第二堆叠的微电子元件。 第一和第二微电子元件中的每一个可以包括沿着这种微电子元件的表面延伸的导电层。 第一和第二微电子元件中的至少一个可以包括从后表面朝向前表面延伸的凹部,以及从凹槽穿过接合焊盘延伸并电连接到接合焊盘的导电通孔,导电层连接到 所述通孔沿着所述微电子元件的后表面朝向所述微电子元件的边缘延伸。 多个引线可以从第一和第二微电子元件的导电层延伸,并且组件的多个端子可以与引线电连接。