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    Germanium field effect transistors and fabrication thereof
    72.
    发明授权
    Germanium field effect transistors and fabrication thereof 有权
    锗场效应晶体管及其制造

    公开(公告)号：US08124513B2

    公开(公告)日：2012-02-28

    申请号：US12630652

    申请日：2009-12-03

    Applicant: Jing-Cheng Lin

    Inventor： Jing-Cheng Lin

    IPC: H01L29/78

    CPC classification number: H01L29/7833 ,  H01L21/02175 ,  H01L21/28255 ,  H01L29/16 ,  H01L29/4966 ,  H01L29/513 ,  H01L29/517 ,  H01L29/6659

    Abstract: Germanium field effect transistors and methods of fabricating them are described. In one embodiment, the method includes forming a germanium oxide layer over a substrate and forming a metal oxide layer over the germanium oxide layer. The germanium oxide layer and the metal oxide layer are converted into a first dielectric layer. A first electrode layer is deposited over the first dielectric layer.

    Abstract translation: 描述锗场效应晶体管及其制造方法。 在一个实施例中，该方法包括在衬底上形成氧化锗层并在氧化锗层上形成金属氧化物层。 氧化锗层和金属氧化物层被转换为第一电介质层。 第一电极层沉积在第一介电层上。

    Depletion-Free MOS using Atomic-Layer Doping
    78.
    发明申请
    Depletion-Free MOS using Atomic-Layer Doping 有权
    消耗MOS的原子层掺杂

    公开(公告)号：US20100068873A1

    公开(公告)日：2010-03-18

    申请号：US12211546

    申请日：2008-09-16

    Applicant: Jing-Cheng Lin ,  Chen-Hua Yu

    Inventor： Jing-Cheng Lin ,  Chen-Hua Yu

    IPC: H01L21/22

    CPC classification number: H01L21/823842 ,  H01L21/2254 ,  H01L21/28035 ,  H01L29/4925 ,  H01L29/6659

    Abstract: A semiconductor device and a method of manufacturing are provided. A dielectric layer is formed over a substrate, and a first silicon-containing layer, undoped, is formed over the dielectric layer. Atomic-layer doping is used to dope the undoped silicon-containing layer. A second silicon-containing layer is formed over first silicon-containing layer. The process may be expanded to include forming a PMOS and NMOS device on the same wafer. For example, the first silicon-containing layer may be thinned in the PMOS region prior to the atomic-layer doping. In the NMOS region, the doped portion of the first silicon-containing layer is removed such that the remaining portion of the first silicon-containing layer in the NMOS is undoped. Thereafter, another atomic-layer doping process may be used to dope the first silicon-containing layer in the NMOS region to a different conductivity type. A third silicon-containing layer may be formed doped to the respective conductivity type.

    Abstract translation: 提供半导体器件和制造方法。 介电层形成在衬底上，并且在介电层上形成未掺杂的第一含硅层。 原子层掺杂用于掺杂未掺杂的含硅层。 在第一含硅层上形成第二含硅层。 该过程可以扩展到包括在同一晶片上形成PMOS和NMOS器件。 例如，在原子层掺杂之前，第一含硅层可以在PMOS区中减薄。 在NMOS区域中，去除第一含硅层的掺杂部分，使得NMOS中的第一含硅层的剩余部分未掺杂。 此后，可以使用另一种原子层掺杂工艺将NMOS区域中的第一含硅层掺杂到不同的导电类型。 可以形成掺杂到相应导电类型的第三含硅层。

    Diffusion barrier for damascene structures
    80.
    发明申请
    Diffusion barrier for damascene structures 审中-公开
    镶嵌结构的扩散屏障

    公开(公告)号：US20060099802A1

    公开(公告)日：2006-05-11

    申请号：US10985149

    申请日：2004-11-10

    Applicant: Jing-Cheng Lin ,  Shau-Lin Shue

    Inventor： Jing-Cheng Lin ,  Shau-Lin Shue

    IPC: H01L21/4763

    CPC classification number: H01L21/76814 ,  H01L21/76826 ,  H01L21/76831

    Abstract: A semiconductor structure having a via formed in a dielectric layer is provided. The exposed pores of the dielectric material along the sidewalls of the via are partially or completely sealed. Thereafter, one or more barrier layers may be formed and the via may be filled with a conductive material. The barrier layers formed over the sealing layer exhibits a more continuous barrier layer. The pores may be partially or completely sealed by performing, for example, a plasma process in an argon environment.

    Abstract translation: 提供了具有形成在电介质层中的通孔的半导体结构。 沿着通孔的侧壁的电介质材料的暴露的孔部分或完全密封。 此后，可以形成一个或多个阻挡层，并且可以用导电材料填充通孔。 形成在密封层之上的阻挡层表现出更连续的阻挡层。 通过在氩气环境中进行例如等离子体处理，可以将孔部分或完全密封。

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