Scribe line layout design
    80.
    发明申请
    Scribe line layout design 有权
    划线设计

    公开(公告)号:US20080265378A1

    公开(公告)日:2008-10-30

    申请号:US11796202

    申请日:2007-04-27

    IPC分类号: H01L23/544

    摘要: A scribe line layout design to reduce the damage caused by sawing the wafer is presented. An embodiment comprises metal plates located within the scribe lines and at least partially within the junctions of the scribe lines. Each of these metal plates has one or more slots to help relieve the pressure. Alternatively, instead of metal plates, grooves that may be filled with metal could be placed into the scribe lines. These metal plates could also be used concurrently with a seal ring for better protection during sawing.

    摘要翻译: 提出了一种划线设计,以减少锯切锯片造成的损坏。 一个实施例包括位于划线内且至少部分地位于划线内的金属板。 这些金属板中的每一个具有一个或多个槽以帮助减轻压力。 或者,代替金属板,可以将填充有金属的凹槽放置在划线中。 这些金属板也可以与密封环同时使用,以便在锯切期间更好地保护。