Apparatus for indirect impingement cooling of integrated circuit chips
    6.
    发明授权
    Apparatus for indirect impingement cooling of integrated circuit chips 失效
    用于集成电路芯片的间接冲击冷却的装置

    公开(公告)号:US5294830A

    公开(公告)日:1994-03-15

    申请号:US703614

    申请日:1991-05-21

    摘要: An integrated circuit thermal conduction module comprises a substrate having a chip-carrying surface and at least one integrated circuit chip on the substrate. A deformable, liquid-impermeable, thermally conductive film or foil extends over an upper surface of the chip. A piston has a lower surface which urges and conforms the film against the chip upper surface and which contains at least one open channel permitting coolant passage and contact with the film for conveying heat from the chip without direct contact between the coolant and chip. Preferably, the piston has a central passageway extending along the longitudinal axis for channeling the coolant through the piston, and has a plurality of channels extending radially outwardly from the central passageway along the lower face for directing coolant beneath the piston.

    摘要翻译: 集成电路热传导模块包括具有芯片承载表面的衬底和在衬底上的至少一个集成电路芯片。 可变形的液体不可渗透的导热膜或箔在芯片的上表面上延伸。 活塞具有下表面,该下表面促使薄膜抵靠芯片上表面,并且其包含至少一个敞开的通道,允许冷却剂通过并与薄膜接触,用于从芯片传送热量,而不会直接接触冷却剂和芯片。 优选地,活塞具有沿着纵向轴线延伸的中心通道,用于将冷却剂引导通过活塞,并且具有沿着下表面从中心通道径向向外延伸的多个通道,用于将冷却剂引导到活塞下方。