中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

175 records (took 0.031 seconds)

    MEMS probes having decoupled electrical and mechanical design
    65.
    发明公开
    MEMS probes having decoupled electrical and mechanical design 审中-公开

    公开(公告)号：US20240201225A1

    公开(公告)日：2024-06-20

    申请号：US18391228

    申请日：2023-12-20

    Applicant: FormFactor, Inc.

    Inventor： Kevin John Hughes ,  January Kister

    IPC: G01R1/073

    CPC classification number: G01R1/07307

    Abstract: MEMS probes are provided having decoupled electrical and mechanical design. In these probes, electrical conduction is primarily through one or more electrically conductive rails, and mechanical compliance for vertical compression is provided by a coil. The resulting independence of electrical and mechanical design advantageously enables probes to have a combination of electrical and mechanical properties that cannot be obtained in probes where the probe body is subject to both electrical and mechanical design constraints.

    REMOTE CONTROL DEVICES FOR PROBE SYSTEMS, PROBE SYSTEMS THAT INCLUDE THE REMOTE CONTROL DEVICES, AND METHODS OF REMOTELY OPERATING A MOTORIZED POSITIONER OF A PROBE SYSTEM
    66.
    发明公开
    REMOTE CONTROL DEVICES FOR PROBE SYSTEMS, PROBE SYSTEMS THAT INCLUDE THE REMOTE CONTROL DEVICES, AND METHODS OF REMOTELY OPERATING A MOTORIZED POSITIONER OF A PROBE SYSTEM 审中-公开

    公开(公告)号：US20240110942A1

    公开(公告)日：2024-04-04

    申请号：US18468568

    申请日：2023-09-15

    Applicant: FormFactor, Inc.

    Inventor： Benjamin E. Waters

    IPC: G01R1/067 ,  G01R31/28

    CPC classification number: G01R1/06705 ,  G01R31/2887

    Abstract: Remote control devices for motorized positioners of probe systems, probe systems that include the remote control devices, and methods of remotely operating a motorized positioner of a probe system are disclosed herein. The remote control devices include a first rotary encoder, a second rotary encoder, a third rotary encoder, and a remote processing device. The probe systems include a chuck, a signal generation and analysis assembly, a probe, a motorized positioner, a local processing device, and the remote control device. The methods include generating a control signal utilizing the remote control device and transmitting the control signal to the probe system. The methods also include translating a probe of the probe system relative to a support surface of the probe system. The translating is based, at least in part, on the control signal.

    Multi-conductor transmission line probe
    67.
    发明授权
    Multi-conductor transmission line probe 有权

    公开(公告)号：US11486898B2

    公开(公告)日：2022-11-01

    申请号：US17345613

    申请日：2021-06-11

    Applicant: FormFactor, Inc.

    Inventor： Tim Lesher ,  Jason William Cosman

    IPC: G01R1/073 ,  G01R1/067

    Abstract: Vertical transmission line probes having alternating capacitive and inductive sections are provided. These alternating sections can be designed to provide a desired transmission line impedance (e.g., between 10 and 100 Ohms, preferably 50 Ohms). Probe flexure in operation is mainly in the inductive sections, advantageously reducing flexure stresses on the dielectrics in the capacitive sections.

    Double-sided probe systems with thermal control systems and related methods
    68.
    发明授权
    Double-sided probe systems with thermal control systems and related methods 有权

    公开(公告)号：US11378619B2

    公开(公告)日：2022-07-05

    申请号：US17111283

    申请日：2020-12-03

    Applicant: FormFactor, Inc.

    Inventor： Masahiro Sameshima

    IPC: G01R31/28 ,  G01R1/44 ,  G01R31/319

    Abstract: Double-sided probe systems with thermal control systems and related methods. Thermally-controlled, double-sided probe systems include a probe assembly configured to test one or more devices under test (DUTs) of a substrate and a chuck configured to support the substrate. The probe assembly includes a thermal control system configured to at least partially control a substrate temperature of the substrate while the probe assembly tests the DUT(s). The chuck is configured to support the substrate such that the probe assembly has access to each of a first substrate side of the substrate and a second substrate side of the substrate while the substrate is operatively supported by the chuck. In some examples, methods of operating double-sided probe systems include regulating the substrate temperature with the thermal control system.

    Probe systems and methods for testing a device under test
    69.
    发明授权
    Probe systems and methods for testing a device under test 有权

    公开(公告)号：US11346883B2

    公开(公告)日：2022-05-31

    申请号：US17076279

    申请日：2020-10-21

    Applicant: FormFactor, Inc.

    Inventor： Kazuki Negishi

    IPC: G01R31/28 ,  G01R1/067

    Abstract: Probe systems and methods for testing a device under test are disclosed herein. The probe systems include an electrically conductive ground loop and a structure that is electrically connected to a ground potential via at least a region of the electrically conductive ground loop. The probe systems also include nonlinear circuitry. The nonlinear circuitry is configured to resist flow of electric current within the ground loop when a voltage differential across the nonlinear circuitry is less than a threshold voltage differential and permit flow of electric current within the ground loop when the voltage differential across the nonlinear circuitry is greater than the threshold voltage differential. The methods include positioning a device under test (DUT) within a probe system that includes an electrically conductive ground loop and nonlinear circuitry. The methods also include selectively resisting and permitting electric current flow within the ground loop and through the nonlinear circuitry.

    Probe systems and methods for characterizing optical coupling between an optical probe of a probe system and a calibration structure
    70.
    发明授权
    Probe systems and methods for characterizing optical coupling between an optical probe of a probe system and a calibration structure 有权

    公开(公告)号：US11313936B2

    公开(公告)日：2022-04-26

    申请号：US17028102

    申请日：2020-09-22

    Applicant: FormFactor, Inc.

    Inventor： Joseph George Frankel ,  Kazuki Negishi

    IPC: G01R35/00 ,  G01R31/308 ,  G01R1/067 ,  G01R31/28

    Abstract: Probe systems and methods of characterizing optical coupling between an optical probe of a probe system and a calibration structure. The probe systems include a probe assembly that includes an optical probe, a support surface configured to support a substrate, and a signal generation and analysis assembly configured to generate an optical signal and to provide the optical signal to the optical device via the optical probe. The probe systems also include an electrically actuated positioning assembly, a calibration structure configured to receive the optical signal, and an optical detector configured to detect a signal intensity of the optical signal. The probe systems further include a controller programmed to control the probe system to generate a representation of signal intensity as a function of the relative orientation between the optical probe and the calibration structure. The methods include methods of operating the probe systems.

Patent Agency Ranking