Stacked die semiconductor package and method of assembly
    79.
    发明授权
    Stacked die semiconductor package and method of assembly 有权
    堆叠半导体封装和组装方法

    公开(公告)号:US07883938B2

    公开(公告)日:2011-02-08

    申请号:US12124880

    申请日:2008-05-21

    IPC分类号: H01L21/00

    摘要: A method of manufacturing a plurality of stacked die semiconductor packages, including: attaching a second silicon wafer to a first silicon wafer, wherein the second silicon wafer has a plurality of open vias; attaching a third silicon wafer to the second silicon wafer, wherein the third silicon wafer has a plurality of open vias, and the open vias of the second and third silicon wafers are aligned with one another; etching a bonding material that attaches the wafers from the aligned open vias; filling the aligned open vias with a conductor; forming conductive bumps at open ends of the aligned open vias; back grinding the first silicon wafer; separating the stacked semiconductor dies from each other; attaching the bump end of the stacked semiconductor dies onto a substrate; encapsulating the stacked semiconductor dies and substrate; and singulating the encapsulated assembly.

    摘要翻译: 一种制造多个堆叠管芯半导体封装的方法,包括:将第二硅晶片连接到第一硅晶片,其中所述第二硅晶片具有多个开口; 将第三硅晶片附接到所述第二硅晶片,其中所述第三硅晶片具有多个开放通孔,并且所述第二和第三硅晶片的所述开放通孔彼此对准; 蚀刻从对准的开放通孔连接晶片的接合材料; 用导体填充对齐的开放通孔; 在对齐的开放通孔的开口端形成导电凸块; 背面研磨第一个硅晶片; 将堆叠的半导体管芯彼此分离; 将堆叠的半导体管芯的凸起端附接到基板上; 封装堆叠的半导体管芯和衬底; 并分离封装的组件。